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个人简介

2021.12 - 至今 大连理工大学,物理学院,教授(破格) 2017.12 - 2021.12 大连理工大学,物理学院,副教授; 2015.03 - 2016.08 比利时安特卫普大学,博士后 2014.01 - 2017.12 大连理工大学,物理学院,讲师 2013.04-2013.10 比利时安特卫普大学,化学系,双博士学位 2009.09-2013.12 大连理工大学,等离子体物理专业,博士(直接攻博) 2005.09-2009.07 大连理工大学,光信息科学与技术专业,学士

研究领域

面向半导体芯片制造业中的工业等离子源的仿真模拟研究 流体模型、流体/蒙卡混合模型、鞘层模型、整体模型、COMSOl软件等 感性耦合等离子体特性的模拟研究 容性耦合等离子体特性的模拟研究 射频负氢离子源特性的模拟研究 感性/容性耦合混合放电的模拟研究 脉冲调制射频放电特性的模拟研究 等离子体多场耦合快速仿真算法

近期论文

查看导师新发文章 (温馨提示:请注意重名现象,建议点开原文通过作者单位确认)

[1]Li, Hong.Nonlocal electron kinetics and spatial transport in radio-frequency two-chamber inductively couple[J],JOURNAL OF APPLIED PHYSICS,2022,121(23) [2]张钰如.Numerical investigation of low pressure inductively coupled plasma sources: A review[J],ACTA PHYSICA SINICA,2022,70(9) [3]王应杰.Numerical investigation of radio-frequency negative hydrogen ion sources by a three-dimensional flui[J],CHINESE PHYSICS B,2022,30(9) [4]徐翔.Phase-shift effect in capacitively coupled plasmas with two radio frequency or very high frequency[J],JOURNAL OF APPLIED PHYSICS,2022,108(4) [5]张钰如.Plasma characteristics in an electrically asymmetric capacitive discharge sustained by multiple ha[J],PLASMA SOURCES SCIENCE TECHNOLOGY,2022,27(5) [6]Wen, Ying-Ying.Secondary electron effect on sustaining capacitively coupled discharges: A hybrid modeling investi[J],AIP Advances,2022,9(5) [7]Liu, Jian-Kai.Simulations of electromagnetic effects in large-area high-frequency capacitively coupled plasmas w[J],PHYSICS OF PLASMAS,2022,27(2) [8]Liu, Jiankai.Simulations of standing wave effect, stop band effect, and skin effect in large-area very high frequ[J],PLASMA SCIENCE & TECHNOLOGY,2022,23(3) [9]高飞.Spatial distributions of plasma parameters in inductively coupled hydrogen discharges with an expa[J],PHYSICS OF PLASMAS,2022,24(7) [10]赵凯.Suppression of nonlinear standing wave excitation via the electrical asymmetry effect[J],PLASMA SOURCES SCIENCE TECHNOLOGY,2022,29(12) [11]赵书霞.Equivalent circuit effects on mode transitions in H2 inductively coupled plasmas[J],Physcis of Plasmas,2015,22(4):43508-43508 [12]张钰如.Effect of phase angle on plasma characteristics in electrically asymmetric capacitive discharge[J],物理学报,2018,67(22):225203- [13]张钰如.Experimental and numerical investigations on time-resolved characteristics of pulsed inductively cou[J],JOURNAL OF VACUUM SCIENCE TECHNOLOGY A,2017,35(2):21301-21301 [14]徐雨.常压等离子体对柔性多孔材料表面处理均匀性的研究进展[J],物理学报,2022,70(09):116-127 [15]孙晓艳.Modulation of the plasma uniformity by coil and dielectric window structures in an inductively coupl[J],Plasma Sci. Technol.,2021,23:95404- [16]赵凯.Suppression of nonlinear standing wave excitation via the electrical asymmetry effect[J],Plasma Sources Sci. Technol,2021,29:124001- [17]王英杰.Numerical investigation of radio-frequency negative hydrogen ion sources by a three-dimensional flui[J],Chin. Phys. B,2021,30:95205- [18]刘建凯.Simulations of standing wave effect, stop band effect, and skin effect in large-area very high frequ[J],Plasma Sci. Technol.,2021,23:35401- [19]佟磊.Hybrid simulation of radio frequency biased inductively coupled Cl2 plasmas[J],Phys. Plasmas,2021,28:53512- [20]张钰如.低气压感性耦合等离子体源模拟研究进展[J],物理学报,2021,70:95206- [21]王英杰.Influence of magnetic filter field on the radiofrequency negative hydrogen ion source of neutral bea[J],Plasma Sci. Technol.,2021,23:115602- [22]张钰如.How to balance computational cost and accuracy of the model for negative hydrogen ion sources? A lev[J],Plasma Sources Sci. Technol,2021,30:75028- [23]梁英爽.Investigation of active species in lowpressure capacitively coupled N2/Ar plasmas[J],Phys. Plasmas,2021,28:13510- [24]孙晓艳.Fluid simulation of the superimposed dual-frequency source effect in inductively coupled discharges[J],Phys. Plasmas,2021,28:113504- [25]梁英爽.Investigation of voltage effect on reaction mechanisms in capacitively coupled N2 discharges[J],Journal of Applied Physics,2021,127:133301- [26]Sun, Xiao-Yan.Effect of radio frequency bias on plasma characteristics of inductively coupled argon discharge ba[J],CHINESE PHYSICS B,2021,29(9) [27]张钰如.Influence of the Material Dielectric Constant on Plasma Generation inside Catalyst Pores[J],JOURNAL OF PHYSICAL CHEMISTRY C,2021,120(45):25923-25934 [28]张钰如.How to address the issue of uniformity in large area capacitively coupled plasmas? A modeling inve[J],PLASMA SOURCES SCIENCE & TECHNOLOGY,2021,29(8) [29]Liu, Jian-Kai,Zhang, Yu-Ru,Zhao, Kai,Wen, De-Qi,Wang, You-Nian.Simulations of electromagnetic effects in large-area high-frequency capacitively coupled plasmas w[J],PHYSICS OF PLASMAS,2020,27(2) [30]Liang, Ying-Shuang,Liu, Yong-Xin,Zhang, Yu-Ru,Wang, You-Nian.Investigation of voltage effect on reaction mechanisms in capacitively coupled N-2 discharges[J],JOURNAL OF APPLIED PHYSICS,2020,127(13) [31]Zhang, Yu-Ru,Zhao, Zhuan-Zhuan,Xue, Chan,Gao, Fei,Wang, You-Nian.Ion energy and angular distributions in planar Ar/O-2 inductively coupled plasmas: hybrid simulati[J],JOURNAL OF PHYSICS D-APPLIED PHYSICS,2019,52(29) [32]Wen, Ying-Ying,Song, Yuan-Hong,Wang, You-Nian,Zhang, Yu-Ru,Jiang, Ge.Secondary electron effect on sustaining capacitively coupled discharges: A hybrid modeling investi[J],AIP ADVANCES,2019,9(5) [33]Gao, Fei,Lv, Xiang-Yun,Zhang, Yu-Ru,Wang, You-Nian.Complex transients of input power and electron density in pulsed inductively coupled discharges[J],JOURNAL OF APPLIED PHYSICS,2019,126(9) [34]Bogaerts, Annemie,Wang, Weizong,Zhang, Quan-Zhi,Zhang, Yu-Ru,Van Laer, Koen.Burning questions of plasma catalysis: Answers by modeling[J],CATALYSIS TODAY,2019,337(,SI):3-14 [35]Sun, Xiao-Yan,Zhang, Yu-Ru,Chai, Sen,Wang, You-Nian,He, Jian-Xin.Fluid simulation of the plasma uniformity in pulsed dual frequency inductively coupled plasma[J],PHYSICS OF PLASMAS,2019,26(4) [36]Zhang, Yu-Ru,Hu, Yan-Ting,Gao, Fei,Song, Yuan-Hong,Wang, You-Nian.Plasma characteristics in an electrically asymmetric capacitive discharge sustained by multiple ha[J],PLASMA SOURCES SCIENCE & TECHNOLOGY,2018,27(5) [37]Zhang, Yu-Ru,Neyts, Erik C.,Bogaerts, Annemie.Enhancement of plasma generation in catalyst pores with different shapes[J],PLASMA SOURCES SCIENCE & TECHNOLOGY,2018,27(5) [38]Gao, Fei,Zhang, Yu-Ru,Li, Hong,Liu, Yang,Wang, You-Nian.Spatial distributions of plasma parameters in inductively coupled hydrogen discharges with an expa[J],PHYSICS OF PLASMAS,2017,24(7) [39]Li, Hong,Liu, Yang,Zhang, Yu-Ru,Gao, Fei,Wang, You-Nian.Nonlocal electron kinetics and spatial transport in radio-frequency two-chamber inductively couple[J],JOURNAL OF APPLIED PHYSICS,2017,121(23) [40]Wen, De-Qi,Zhang, Yu-Ru,Lieberman, Michael A.,Wang, You-Nian.Ion Energy and Angular Distribution in Biased Inductively Coupled Ar/O-2 Discharges by Using a Hyb[J],PLASMA PROCESSES AND POLYMERS,2017,14(4-5,SI)

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