当前位置: X-MOL首页全球导师 国内导师 › 宋远红

个人简介

教育经历 1999.92004.7大连理工大学等离子体物理博士 1990.91993.4大连理工大学理论物理硕士 1986.91990.7大连理工大学应用物理学学士 1983.91986.7大连二十四中学无 工作经历 2009.12至今大连理工大学教授 2001.42009.12大连理工大学副教授 1995.82001.4大连理工大学讲师 1993.41995.8大连理工大学助教

研究领域

低温等离子体物理基础 非对称射频容性耦合放电电子动力学及加热机理研究 射频容性耦合反应性等离子体刻蚀仿真研究 甚高频等离子体增强化学气相沉积仿真研究 电负性等离子体不稳定性研究 微重力复杂等离子体放电特性

近期论文

查看导师新发文章 (温馨提示:请注意重名现象,建议点开原文通过作者单位确认)

Wen, Ying-Ying,Zhang, Yu-Ru,Jiang, Ge,Song, Yuan-Hong,Wang, You-Nian.Secondary electron effect on sustaining capacitively coupled discharges: A hybrid modeling investigation of the ionization rate[J],AIP ADVANCES,2019,9(5) 胡艳婷,张钰如,宋远红,王友年.相位角对容性耦合电非对称放电特性的影响[J],物理学报,2018,67(22):288-300 Zhang, Yu-Ru,Hu, Yan-Ting,Gao, Fei,Song, Yuan-Hong,Wang, You-Nian.Plasma characteristics in an electrically asymmetric capacitive discharge sustained by multiple harmonics: operating in the very high frequency regime[J],PLASMA SOURCES SCIENCE & TECHNOLOGY,2018,27(5) Liu, Xiang-Mei,Song, Yuan-Hong,Jiang, Wei,Jia, Wen-Zhu.Effect of Parallel-Plate Geometry on Mode Transition Behavior in Argon Microplasmas: Two-Dimensional Simulation[J],CHINESE PHYSICS LETTERS,2018,35(4) 戴忠玲,董婉,宋远红,王友年. Effect of ion bombardment time on the profile of atomic layer etching[A],2nd Asia-Pacific Conference on Plasma Physics,2018 董婉,王喜凤,宋远红,戴忠玲,王友年.Effect of plasma uniformity on etching profiles[A],The 71st Annual Gaseous Electronics Conference,2018 张钰如,宋远红,王友年.Effect of phase angle on plasma characteristics in electrically asymmetric capacitive discharge[J],Acta Phys. Sin.,2018,67(22):225203- 董婉,戴忠玲,宋远红,王友年.ALE of SiO2 by alternating CF4 plasma with energetic Ar+ plasma beams[A],7th international conference on microelectronics and plasma technology,2018 Zhang, Ying-Ying,Song, Yuan-Hong,Radovic, Ivan,Miskovic, Zoran L.,Wang, You-Nian.Interactions of moving charged particles with triple-walled carbon nanotubes[J],EUROPEAN PHYSICAL JOURNAL D,2017,71(8) 刘永新,赵凯,温德奇,刘刚虎,李宏,高飞,张钰如,宋远红,王友年.低气压射频等离子体研究进展[A],第十八届全国等离子体科学技术会议,2017,1 王喜凤,宋远红,戴忠玲,王友年.射频容性耦合SiH4/Ar放电中反转电场及电子能量分布的模拟[A],第十八届全国等离子体科学技术会议,2017,1 Radovic, Ivan,Song, Yuan-Hong,Zhang, Ying-Ying,Borka, Dusko,Miskovic, Zoran L..Excitation of plasmon wakes in two-dimensional electron systems by moving external charged particles[J],RADIATION EFFECTS AND DEFECTS IN SOLIDS,2017,172(1-2):90-99 Wang Xifeng,Song Yuanhong,Zhao Shuxia,Dai Zhongling,Wang Younian.Hybrid Simulation of Duty Cycle Influences on Pulse Modulated RF SiH4/Ar Discharge[J],PLASMA SCIENCE & TECHNOLOGY,2016,18(4):394-399 Lyon, Keenan,Zhang, Ying-Ying,Miskovic, Z. L.,Song, Yuan-Hong,Wang, You-Nian.Interaction of fast charges with a rough metal surface[J],SURFACE SCIENCE,2015,639:32-38 Zhang, Ya,Jiang, Wei,Song, Yuan-Hong,Wang, You-Nian.Two-dimensional electromagnetic quantum-hydrodynamic simulations of isochoric heating of a solid target by proton beams[J],PHYSICS OF PLASMAS,2015,22(2) 宋远红,王友年.Multi-physics analysis and experimental verifications for RF plasma sources[A],1st China-Korea Joint Workshop on Plasma Science, Technology and Application,2015 宋远红,王友年.Hybrid Modeling of SiH4/Ar Discharge in a Pulse Modulated RF Capacitively Coupled Plasma[A],2015 宋远红,王友年.脉冲调制射频容性耦合SiH4/Ar放电混合模拟研究[A],第十七届全国等离子体科学技术会议,2015 Zhao, Tian-Liang,Liu, Jing-Lin,Li, Xiao-Song,Liu, Jin-Bao,Song, Yuan-Hong,Xu, Yong,Zhu, Ai-Min.Dynamic Evolution of 50-Hz Rotating Gliding Arc Discharge in a Vortex Air Flow[J],IEEE TRANSACTIONS ON PLASMA SCIENCE,2014,42(10,SI):2704-2705 Zhang, Ying-Ying,An, Sheng-Bai,Song, Yuan-Hong,Kang, Naijing,Miskovic, Z. L.,Wang, You-Nian.Plasmon excitation in metal slab by fast point charge: The role of additional boundary conditions in quantum hydrodynamic model[J],PHYSICS OF PLASMAS,2014,21(10) Wen, De-Qi,Zhang, Quan-Zhi,Jiang, Wei,Song, Yuan-Hong,Bogaerts, Annemie,Wang, You-Nian.Phase modulation in pulsed dual-frequency capacitively coupled plasmas[J],JOURNAL OF APPLIED PHYSICS,2014,115(23) Zhao, Tian-Liang,Liu, Jing-Lin,Li, Xiao-Song,Liu, Jin-Bao,Song, Yuan-Hong,Xu, Yong,Zhu, Ai-Min.Temporal evolution characteristics of an annular-mode gliding arc discharge in a vortex flow[J],PHYSICS OF PLASMAS,2014,21(5) Zhang, Ying-Ying,Sun, Ji-Zhong,Song, Yuan-Hong,Miskovic, Z. L.,Wang, You-Nian.Channeling of protons in single-walled carbon nanotubes based on kinetic and molecular-dynamics treatment[J],CARBON,2014,71:196-205 Li, Chun-Zhi,Wang, You-Nian,Song, Yuan-Hong,Miskovic, Zoran L..Interactions of charged particle beams with double-layered two-dimensional quantum electron gases[J],PHYSICS LETTERS A,2014,378(22-23):1626-1631 宋远红,王友年.Analyzing nonlocal effects in the plasmon spectra of a metal slab by the Greens function technique for hydrodynamic model[J],Nanoscale Syst.: Math. Model. Theory Appl.,2014,3(3):44-54 高飞,张钰如,赵书霞,宋远红,王友年.Experimental and Numerical Studies of Pulse-Modulated ICP Discharges[A],2014,36-36 Zhang, Sai-Qian,Dai, Zhong-Ling,Song, Yuan-Hong,Wang, You-Nian.Effect of reactant transport on the trench profile evolution for silicon etching in chlorine plasmas[J],VACUUM,2014,99:180-188 Zhang, Ya,Song, Yuan-Hong,Wang, You-Nian.Study of stopping power for a proton moving in a plasma with arbitrary degeneracy[J],PHYSICS OF PLASMAS,2013,20(10) Zhang Ying-Ying,Zhao Dan,You Shu-Yan,Song Yuan-Hong,Wang You-Nian.Wake Effects in Ion Transport through Carbon Nanotubes[J],CHINESE PHYSICS LETTERS,2013,30(9) Zhao, Tian-Liang,Xu, Yong,Song, Yuan-Hong,Li, Xiao-Song,Liu, Jing-Lin,Liu, Jin-Bao,Zhu, Ai-Min.Determination of vibrational and rotational temperatures in a gliding arc discharge by using overlapped molecular emission spectra[J],JOURNAL OF PHYSICS D-APPLIED PHYSICS,2013,46(34) 张赛谦,戴忠玲,宋远红,王友年.双频容性耦合Ar/CF4等离子体中双频源参数对刻蚀微观不均匀性影响的研究[A],第十六届全国等离子体科学技术会议暨第一届全国等离子体医学研讨会,2013,252-252 张雅,宋远红,王友年.强流质子束与固体靶相互作用过程的模拟研究[A],第十六届全国等离子体科学技术会议暨第一届全国等离子体医学研讨会论文集中国力学学会;中国物理学会;中国核学会,2013,334-334 张赛谦,戴忠玲,宋远红,王友年.双频容性耦合Ar/CF_4等离子体中双频源参数对刻蚀微观不均匀性影响的研究[A],第十六届全国等离子体科学技术会议暨第一届全国等离子体医学研讨会,2013,1 贾文柱,王喜凤,宋远红,王友年.脉冲调制射频容性耦合SiH4/N2/O2放电的二维流体力学模拟[A],第十六届全国等离子体科学技术会议暨第一届全国等离子体医学研讨会,2013,277-277 贾文柱,王喜凤,宋远红,王友年.脉冲调制射频容性耦合SiH_4/N_2/O_2放电的二维流体力学模拟[A],第十六届全国等离子体科学技术会议暨第一届全国等离子体医学研讨会,2013,1 Zhang, Ya,Song, Yuan-Hong,Wang, You-Nian.Simulations of interactions of high-energy proton beam with high dense matter based on two-dimensional quantum hydrodynamic model[J],LASER AND PARTICLE BEAMS,2013,31(2):345-351 Liu Xiang-Mei,Song Yuan-Hong,Jiang Wei,Yi Lin.The effects of process conditions on the plasma characteristic in radio-frequency capacitively coupled SiH4/NH3/N-2 plasmas: Two-dimensional simulations[J],CHINESE PHYSICS B,2013,22(4) Liu, Yong-Xin,Zhang, Quan-Zhi,Liu, Jia,Song, Yuan-Hong,Bogaerts, Annemie,Wang, You-Nian.Electron bounce resonance heating in dual-frequency capacitively coupled oxygen discharges[J],PLASMA SOURCES SCIENCE & TECHNOLOGY,2013,22(2) Hu, Zhang-Hu,Song, Yuan-Hong,Zhao, Yong-Tao,Wang, You-Nian.Modulation of continuous ion beams with low drift velocity by induced wakefield in background plasmas[J],LASER AND PARTICLE BEAMS,2013,31(1):135-140 Jiajia, Li,Zhanghu, Hu,Yuanhong, Song,Younian, Wang,Li, Jiajia,Hu, Zhanghu,Song, Yuanhong,Wang, Younian.Effects of Fast-Ion Injection on a Magnetized Sheath near a Floating Wall[J],PLASMA SCIENCE & TECHNOLOGY,2013,15(1):1-6 宋远红,王友年.Study of stopping power for a proton moving in a plasma with arbitrary[J],Phys. Plasmas,2013,20(10):102121-102121 Jiajia, Li,Zhanghu, Hu,Yuanhong, Song,Younian, Wang,Li, Jiajia,Hu, Zhanghu,Song, Yuanhong,Wang, Younian.Effects of Fast-Ion Injection on a Magnetized Sheath near a Floating Wall[J],PLASMA SCIENCE & TECHNOLOGY,2013,15(1):1-6 Zhang, Ya,Song, Yuan-Hong,Zhao, Yong-Tao,Wang, You-Nian.Two-dimensional quantum hydrodynamic model for the heating of a solid target using a Gaussian cluster[J],LASER AND PARTICLE BEAMS,2012,30(4):671-677 Liu, Yong-Xin,Zhang, Quan-Zhi,Liu, Jia,Song, Yuan-Hong,Bogaerts, Annemie,Wang, You-Nian.Effect of bulk electric field reversal on the bounce resonance heating in dual-frequency capacitively coupled electronegative plasmas[J],APPLIED PHYSICS LETTERS,2012,101(11) Wang Yan,Liu Xiangmei,Song Yuanhong,Wang Younian.One-Dimensional Fluid Model of Pulse Modulated Radio-Frequency SiH4/N-2/O-2 Discharge[J],PLASMA SCIENCE & TECHNOLOGY,2012,14(2):107-110 An, Sheng-Bai,Wang, Yan-Xia,Song, Yuan-Hong,Wang, You-Nian.Wake potential and stopping power for a charged particle moving outside a nanosphere[J],PHYSICS LETTERS A,2012,376(5):763-767 Hu, Zhang-Hu,Song, Yuan-Hong,Wang, You-Nian.Time evolution and energy deposition for ion clusters injected into magnetized two-component plasmas[J],PHYSICAL REVIEW E,2012,85(1):016402 宋远红,王友年.Two-dimensional quantum hydrodynamic model for heating of a solid target using a Gaussian cluster[J],Laser Partarticles and Beams,2012,30(4):1069-1072 宋远红,王友年.Quantum hdydrodynamic model for plasmon excitations in nanowire induced by external charged particle[A],2012,122-122 宋远红,王友年.INTERACTIONS OF ION BEAMS WITH DENSE PLASMAS USING HYBRID SIMULATIONS[A],2012,51-51 宋远红,王友年.Time evolution and energy deposition for ion clusters injected into magnetized[J],Physical Review E,2012,85(1):16402-16402 Zhang, Ya,Song, Yuan-Hong,Wang, You-Nian.Nonlinear wake potential and stopping power for charged particles interacting with a one-dimensional electron gas[J],PHYSICS OF PLASMAS,2011,18(11) Hu, Zhang-Hu,Song, Yuan-Hong,Miskovic, Z. L.,Wang, You-Nian.Energy dissipation of ion beam in two-component plasma in the presence of laser irradiation[J],LASER AND PARTICLE BEAMS,2011,29(3):299-304 宋远红,徐翔,王友年.低气压射频及甚高频容性耦和等离子体源的发展趋势及相关物理问题[A],第十五届全国等离子体科学技术会议,2011,7-7 宋远红,徐翔,王友年.低气压射频及甚高频容性耦合等离子体源的发展趋势及相关物理问题[A],第十五届全国等离子体科学技术会议,2011,1 胡章虎,宋远红,王友年.离子束与磁化等离子体相互作用的离子模拟[A],第十五届全国等离子体科学技术会议论文集中国力学学会;中国核学会;中国物理学会,2011,188-188 Liu, Xiang-Mei,Song, Yuan-Hong,Xu, Xiang,Wang, You-Nian.Phase-shift effects on growth and transport of dust particles in VHF capacitively coupled silane discharges: Two dimensional fluid simulation[J],PHYSICS OF PLASMAS,2011,18(8) Liu, Xiang-Mei,Wang, Yan,Song, Yuan-Hong,Wang, You-Nian.Effect of pulse duration on characteristics of modulated radio-frequency SiH4/N-2/NH3 discharges[J],Joint Meeting of the 10th Asia-Pacific Conference on Plasma Science and Technology (APCPST 2010)/153rd Symposium on Plasma Science for Materials (SPSM 2010),2011,519(20,SI):6951-6954 Zhang, Ya,Song, Yuan-Hong,Wang, You-Nian.Stopping power for a charged particle moving through three-dimensional nonideal finite-temperature electron gases[J],PHYSICS OF PLASMAS,2011,18(7) Liu Xiang-Mei,Song Yuan-Hong,Wang You-Nian.Driving frequency effects on the mode transition in capacitively coupled argon discharges[J],CHINESE PHYSICS B,2011,20(6)

推荐链接
down
wechat
bug