近期论文
查看导师最新文章
（温馨提示：请注意重名现象，建议点开原文通过作者单位确认）
刘艳红.Effects of W/ WO3-x junction on synaptic characteristics of W/WO3-x/ ITO memristor[J],Physica E: Low-dimensional Systems and Nanostructures 127 (2021) 114515,2021,127:114515-
Zhang, Yu,Xu, Jun,Zhou, Da-Yu,Wang, Hang-Hang,Lu, Wen-Qi,Choi, Chi-Kyu.Effects of Hf buffer layer at the Y-doped HfO2/Si interface on ferroelectric characteristics of...[J],CERAMICS INTERNATIONAL,2018,44(11):12841-12846
Zhang, Yu,Xu, Jun,Zhou, Da-Yu,Wang, Hang-Hang,Lu, Wen-Qi,Choi, Chi-Kyu.Structural and electrical properties of reactive magnetron sputtered yttrium-doped HfO2 films[J],CHINESE PHYSICS B,2018,27(4)
Li, Jianquan,Lu, Wenqi,Xu, Jun,Gao, Fei,Wang, Younian.Automatic emissive probe apparatus for accurate plasma and vacuum space potential measurements[J],PLASMA SCIENCE & TECHNOLOGY,2018,20(2)
徐军,周大雨,陆文琪.Structrual and Electrical Properties of Reactive Magnetron Sputtered Yttrium-doped HfO2 Films[J],Chinese Physics B,2018,27(4):481031-481036
Li, Jian-Quan,Lu, Wen-Qi,Xu, Jun,Gao, Fei,Wang, You-Nian.Automatic emissive probe apparatus for efficient plasma potential measurements[J],REVIEW OF SCIENTIFIC INSTRUMENTS,2017,88(11):115106
李建泉,陆文琪,徐军.基于虚拟仪器的自动发射探针诊断装置[A],2017,1
Li, S. L.,Ma, C. Y.,Zhang, Q. Y.,Ren, C. S.,Lu, W. Q..Ion nitriding of pure iron using high-density plasma beam generated by a tubular plasma source[J],SURFACE & COATINGS TECHNOLOGY,2017,309(309):47-53
Li, Jian-quan,Xu, Jun,Bai, Yu-jing,Lu, Wen-qi,Wang, You-nian.Improved inflection point method of emissive probe for accurate measurement of plasma potential[J],JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,2016,34(6)
谭伟,陆文琪,徐军,王行行.射频反应磁控溅射制备AlN多晶薄膜及其择优取向研究[J],真空科学与技术学报,2016,36(10):1092-1098
Bai, Yu-jing,Lu, Wen-qi,Li, Jian-quan,Xu, Jun,Wang, You-nian.Influence of the bias signal amplitude and frequency on the harmonic probe measurements in plas...[J],PHYSICS OF PLASMAS,2016,23(8)
Shi, D. Q.,Xu, W.,Miao, C. Y.,Ma, C. Y.,Ren, C. S.,Lu, W. Q.,Zhang, Q. Y..A high-activity nitrogen plasma flow source for deposition of silicon nitride films[J],SURFACE & COATINGS TECHNOLOGY,2016,294:194-200
Bai Yujing,Li Jianquan,Xu Jun,Lu Wenqi,Wang Younian,Ding Wanyu.Improvement of the Harmonic Technique of Probe for Measurements of Electron Temperature and Ion...[J],PLASMA SCIENCE & TECHNOLOGY,2016,18(1):58-61
Miao, Chunyu,Shi, Dequan,Ma, Chunyu,Ren, Chunsheng,Lu, Wenqi,Zhang, Qingyu,Zhang, Chao,Yi, Zhong.Mode Transition and Related Discharge Phenomena of a Tube Plasma Source Operating in Low-Pressu...[J],IEEE TRANSACTIONS ON PLASMA SCIENCE,2015,43(2):544-551
李慧,吴爱民,张文兰,陆文琪,秦福文,董闯.线形同轴耦合微波等离子体诊断及硅薄膜制备[J],哈尔滨工程大学学报,2015,36(3):423-426
陆文琪,董闯.Effects of deposition temperature on the structure and hardness of BN films prepared by a gradien...[J],Rare Metal Materials and Engineering,2015,44(5):1018-1111
Liu, Jia,Wen, De-Qi,Liu, Yong-Xin,Gao, Fei,Lu, Wen-Qi,Wang, You-Nian.Experimental and numerical investigations of electron density in low-pressure dual-frequency ca...[J],JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,2013,31(6)
Liu Wenyao,Li Xiaosong,Zhao Guoli,Lu Wenqi,Xu Yong,Wang Younian,Zhu Aimin.Determination of Plasma Parameters in a Dual-Frequency Capacitively Coupled CF4 Plasma Using Op...[J],PLASMA SCIENCE & TECHNOLOGY,2013,15(9):885-890
张文兰,陆文琪.脉冲放电等离子体参数的高时间分辨静电探针诊断技术[A],2013,186-186
刘永新,陆文琪,王友年,张权治,刘佳.双频容性耦合氧气放电中电子反弹共振加热[A],2013,322-322
王行行,陆文琪.离子能量分析器的ANSYS模拟及优化[A],2013,315-315
Xu Zhenfeng,Lu Wenqi.Iterative Calculation of Plasma Density from a Cylindrical Probe Characteristic[J],PLASMA SCIENCE & TECHNOLOGY,2013,15(8):764-767
Wenqi, Lu,Lu, Wenqi,Jiang, Xiangzhan,Liu, Yongxin,Yang, Shuo,Zhang, Quanzhi,Li, Xiaosong,Xu, Yong,Zhu, Aimin,Wang, Younian,Xiangzhan, Jiang,Yongxin, Liu,Shuo, Yang,Quanzhi, Zhang,Xiaosong, Li,Yong, Xu,Aimin, Zhu,Younian, Wang.Improved Double-Probe Technique for Spatially Resolved Diagnosis of Dual-Frequency Capacitive P...[J],PLASMA SCIENCE & TECHNOLOGY,2013,15(6):511-515
Wenqi, Lu,Lu, Wenqi,Jiang, Xiangzhan,Liu, Yongxin,Yang, Shuo,Zhang, Quanzhi,Li, Xiaosong,Xu, Yong,Zhu, Aimin,Wang, Younian,Xiangzhan, Jiang,Yongxin, Liu,Shuo, Yang,Quanzhi, Zhang,Xiaosong, Li,Yong, Xu,Aimin, Zhu,Younian, Wang.Improved Double-Probe Technique for Spatially Resolved Diagnosis of Dual-Frequency Capacitive P...[J],PLASMA SCIENCE & TECHNOLOGY,2013,15(6):511-515
刘永新,高飞,陆文琪,王友年.Experimental and numerical investigations of electron density[J],J. Vac. Sci. Technol. A,2013,31(6):61308-61308
Liu, Yong-Xin,Jiang, Wei,Li, Xiao-Song,Lu, Wen-Qi,Wang, You-Nian.An overview of diagnostic methods of low-pressure capacitively coupled plasmas[J],3rd International Conference on Microelectronics and Plasma Technology (ICMAP),2012,521:141-145
Liu, Yong-Xin,Wang, You-Nian,Zhang, Quan-Zhi,Jiang, Wei,Lu, Wen-Qi.Experimental validation and simulation of collisionless bounce-resonance heating in capacitivel...[J],PLASMA SOURCES SCIENCE & TECHNOLOGY,2012,21(3)
Su, Yuanjun,Xu, Jun,Dong, Chuang,Lu, Wenqi.Hydrogen plasma induced crystallization of Si thin films by remote inductively coupled plasma s...[J],SURFACE & COATINGS TECHNOLOGY,2012,206(14):3159-3164
Yu Yiqing,Ning Zhaoyuan,Xin Yu,Lu Wenqi.Abnormal Enhancement of N-2(+) Emission Induced by Lower Frequency in N-2 Dual-Frequency Capaci...[J],PLASMA SCIENCE & TECHNOLOGY,2012,14(3):222-226
Jiang, Xiang-Zhan,Liu, Yong-Xin,Lu, Wen-Qi,Bi, Zhen-Hua,Gao, Fei,Wang, You-Nian.Influence of dual-frequency source powers on ion density and electron temperature in capacitive...[J],18th International Vacuum Congress (IVC)/International Conference on Nanoscience and Technology (ICNT)/14th International Conference on Surfaces Science (ICSS)/Vacuum and Surface Sciences Conference of Asia and Australia (VASSCAA),2012,86(7,SI):881-884
Pang Jianhua,Lu Wenqi,Xin Yu,Wang Hanghang,He Jia,Xu Jun.Plasma Diagnosis for Microwave ECR Plasma Enhanced Sputtering Deposition of DLC Films[J],PLASMA SCIENCE & TECHNOLOGY,2012,14(2):172-176
Jiang Xiang-Zhan,Liu Yong-Xin,Bi Zhen-Hua,Lu Wen-Qi,Wang You-Nian.Radial density uniformity of dual frequency capacitively coupled plasma[J],ACTA PHYSICA SINICA,2012,61(1)
陆文琪,王友年.双频容性耦合等离子体密度的径向均匀性研究[J],物理学报,2012,61(1):15204-15204
蒋相站,毕振华,陆文琪,王友年,刘永新.双频容性耦合等离子体密度径向均匀性研究[J],物理学报,2011,61(1):276-282
Yu Yiqing,Xin Yu,Lu Wenqi,Ning Zhaoyuan.Investigation of Capacitively Coupled Argon Plasma Driven by Dual-Frequency with Different Freq...[J],PLASMA SCIENCE & TECHNOLOGY,2011,13(5):571-574
刘永新,张权治,姜巍,侯璐景,陆文琪,王友年.双频容性耦合等离子体无碰撞电子反弹共振加热研究[A],2011,1-1
Liu, Yong-Xin,Zhang, Quan-Zhi,Jiang, Wei,Hou, Lu-Jing,Jiang, Xiang-Zhan,Lu, Wen-Qi,Wang, You-Nian.Collisionless Bounce Resonance Heating in Dual-Frequency Capacitively Coupled Plasmas[J],PHYSICAL REVIEW LETTERS,2011,107(5):055002
Wang, Jinxue,Liu, Min,Guo, Xinwen,Wu, Hongyu,Xu, Jun,Lu, Wenqi.Gas-phase propene epoxidation over Ag/TS-1 prepared by plasma sputtering[J],REACTION KINETICS MECHANISMS AND CATALYSIS,2011,102(2):447-457
Bi Zhenhua,Xu Xiang,Liu Yongxin,Jiang Xiangzhan,Lu Wenqi,Wang Younian.Comparison of 2D Hybrid Simulational and Experimental Results for Dual-Frequency Capacitively C...[J],PLASMA SCIENCE & TECHNOLOGY,2011,13(2):181-187
陆文琪,李小松,王友年.Spatially resolved measurements of ion density and electron temperature[J],J. Vac. Sci. Technol. A,2011,29(1):11006-11006
京公网安备 11010802027423号