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Gao, Fei,Lv, Xiang-Yun,Zhang, Yu-Ru,Wang, You-Nian.Complex transients of input power and electron density in pulsed inductively coupled discharges[J],JOURNAL OF APPLIED PHYSICS,2019,126(9)
Wang, Guiqiu,Zhao, Yongtao,Wang, Younian,Yi, He,Li, Yujiao,Wang, Yaochuan,Liu, Dajun,Gao, Fei,Liu, Wei,Ren, Jieru,Wang, Xing.Review of stopping power and Coulomb explosion for molecular ion in plasmas[J],MATTER AND RADIATION AT EXTREMES,2018,3(2):67-77
Zhang, Yu-Ru,Zhao, Zhuan-Zhuan,Xue, Chan,Gao, Fei,Wang, You-Nian.Ion energy and angular distributions in planar Ar/O-2 inductively coupled plasmas: hybrid simulati[J],JOURNAL OF PHYSICS D-APPLIED PHYSICS,2019,52(29)
Li, Hong,Gao, Fei,Wen, De-Qi,Yang, Wei,Du, Peng-Cheng,Wang, You-Nian.Investigation of the power transfer efficiency in a radio-frequency driven negative hydrogen ion s[J],JOURNAL OF APPLIED PHYSICS,2019,125(17)
高飞,王友年.Experimental investigation of the electron impact excitation behavior in pulse-modulated radio frequ[J],J. Appl. Phys.,2019,125:23303-23303
左春彦,高飞,戴忠玲,王友年.高功率微波输出窗内侧击穿动力学的PIC/MCC模拟研究[J],物理学报,2018,22:340-350
Li, Jian-quan,Lu, Wen-qi,Xu, Jun,Gao, Fei,Wang, You-nian.A comparative study of emissive probe techniques for vacuum space potential measurements[J],VACUUM,2018,155:566-571
Yang, Wei,Li, Hong,Gao, Fei,Wang, You-Nian.A global model study of the population dynamics of molecular hydrogen and the generation of negati[J],PLASMA SOURCES SCIENCE & TECHNOLOGY,2018,27(7)
Han, Dao-Man,Liu, Yong-Xin,Gao, Fei,Wang, Xiang-Yu,Li, Ang,Xu, Jun,Jing, Zhen-Guo,Wang, You-Nian.Observation of the standing wave effect in large-area, very-high-frequency capacitively coupled pl[J],JOURNAL OF APPLIED PHYSICS,2018,123(22)
Han, Dao-Man,Liu, Yong-Xin,Gao, Fei,Xu, Jun,Wang, You-Nian,Liu, Wen-Yao.Measurements of argon metastable density using the tunable diode laser absorption spectroscopy in [J],CHINESE PHYSICS B,2018,27(6)
Zhang, Yu-Ru,Hu, Yan-Ting,Gao, Fei,Song, Yuan-Hong,Wang, You-Nian.Plasma characteristics in an electrically asymmetric capacitive discharge sustained by multiple ha[J],PLASMA SOURCES SCIENCE & TECHNOLOGY,2018,27(5)
Xue, Chan,Gao, Fei,Liu, Yong-Xin,Liu, Jia,Wang, You-Nian.Phase shift effects of radio-frequency bias on ion energy distribution in continuous wave and puls[J],CHINESE PHYSICS B,2018,27(4)
Li, Jianquan,Lu, Wenqi,Xu, Jun,Gao, Fei,Wang, Younian.Automatic emissive probe apparatus for accurate plasma and vacuum space potential measurements[J],PLASMA SCIENCE & TECHNOLOGY,2018,20(2)
高飞,王友年.Experimental investigation of the electron impact excitation behavior in pulse-modulated radio frequ[J],J. Appl. Phys.,2018,125:23303-23303
左春彦,高飞,戴忠玲,王友年.高功率微波输出窗内侧击穿动力学的PIC/MCC 模拟研究[J],物理学报,2018,67(22):267-278
Gao, Fei,Li, Hong,Yang, Wei,Liu, Jia,Zhang, Yu-Ru,Wang, You-Nian.Experimental and numerical investigations of electron characteristics in 2 MHz and 13.56 MHz induc[J],PHYSICS OF PLASMAS,2018,25(1)
Li, Jian-Quan,Xu, Jun,Gao, Fei,Wang, You-Nian,Lu, Wen-Qi.Automatic emissive probe apparatus for efficient plasma potential measurements[J],REVIEW OF SCIENTIFIC INSTRUMENTS,2017,88(11):115106
高飞,王友年,张钰如,杨唯,刘阳,李宏.大功率低气压射频感性耦合负氢离子源中电子特性的研究[A],2017,1
左春彦,温德奇,高飞,王友年.高功率微波输出窗内等离子体产生过程PIC/MC模拟研究[A],2017,1
薛婵,高飞,张钰如,王友年.感性耦合等离子体中射频偏压相位对离子能量分布的影响[A],2017,1
刘刚虎,刘永新,高飞,王友年.容性耦合CF4等离子体中二次电子对电子加热模式的影响[A],2017,1
韩道满,高飞,刘永新,徐军,王友年.甚高频大面积容性放电中电磁效应的实验研究[A],2017,1
李宏,张钰如,高飞,王友年.射频负氢离子源放电特性的Langmuir探针诊断研究[A],2017,1
刘永新,赵凯,温德奇,刘刚虎,李宏,高飞,张钰如,宋远红,王友年.低气压射频等离子体研究进展[A],2017,1
Gao, Fei,Zhang, Yu-Ru,Wang, You-Nian,Li, Hong,Liu, Yang.Spatial distributions of plasma parameters in inductively coupled hydrogen discharges with an expa[J],PHYSICS OF PLASMAS,2017,24(7)
Li, Hong,Liu, Yang,Zhang, Yu-Ru,Gao, Fei,Wang, You-Nian.Nonlocal electron kinetics and spatial transport in radio-frequency two-chamber inductively couple[J],JOURNAL OF APPLIED PHYSICS,2017,121(23)
Xue, Chan,Wen, De-Qi,Liu, Wei,Zhang, Yu-Ru,Gao, Fei,Wang, You-Nian.Experimental and numerical investigations on time-resolved characteristics of pulsed inductively c[J],JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,2017,35(2)
张钰如,高飞,王友年.Experimental and numerical investigations on time-resolved characteristics of pulsed inductively cou[J],Journal of Vacuum Science & Technology A,2017,35(2):21301-21301
Yang, Wei,Li, Hong,Gao, Fei,Wang, You-Nian.Hybrid simulations of solenoidal radio-frequency inductively coupled hydrogen discharges at low pr[J],PHYSICS OF PLASMAS,2016,23(12)
Zhao, Kai,Liu, Yong-Xin,Gao, Fei,Liu, Gang-Hu,Han, Dao-Man,Wang, You-Nian.Experimental investigations of the plasma radial uniformity in single and dual frequency capacitiv[J],PHYSICS OF PLASMAS,2016,23(12)
Wen, De-Qi,Liu, Wei,Gao, Fei,Lieberman, M. A.,Wang, You-Nian.A hybrid model of radio frequency biased inductively coupled plasma discharges: description of mod[J],PLASMA SOURCES SCIENCE & TECHNOLOGY,2016,25(4)
Han, Dao-Man,Liu, Zi-Geng,Liu, Yong-Xin,Zhang, Xin-Pu,Gao, Fei,Peng, Wei,Wang, You-Nian.Determination of neutral temperature using fiber Bragg grating sensor in capacitively coupled argo[J],JOURNAL OF APPLIED PHYSICS,2016,119(11)
刘永新,高飞,王友年.Experimental investigations of the plasma radial uniformity in single and dualfrequency capacitively[J],Phys. Plasmas,2016,23(12):123512-123512
Xu Hui-Jing,Zhao Shu-Xia,Gao Fei,Zhang Yu-Ru,Li Xue-Chun,Wang You-Nian.Discontinuity of mode transition and hysteresis in hydrogen inductively coupled plasma via a fluid[J],CHINESE PHYSICS B,2015,24(11)
Zhang, Yu-Ru,Gao, Fei,Li, Xue-Chun,Bogaerts, Annemie,Wang, You-Nian.Fluid simulation of the bias effect in inductive/capacitive discharges[J],JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,2015,33(6)
温德奇,刘巍,高飞,王友年.偏压感性耦合等离子体的混合模型:模型介绍及实验验证[A],2015,1-19
刘永新,高飞,王友年.低气压射频容性耦合等离子体中的电子加热机制[A],2015,1-35
Zhao, Shu-Xia,Bogaerts, Annemie,Wang, You-Nian,Wang, Ya-Ping,Gao, Fei.Effects of feedstock availability on the negative ion behavior in a C4F8 inductively coupled plasm[J],JOURNAL OF APPLIED PHYSICS,2015,118(3)
Zhao, Shu-Xia,Zhang, Yu-Ru,Gao, Fei,Wang, You-Nian,Bogaerts, Annemie.Bulk plasma fragmentation in a C4F8 inductively coupled plasma: A hybrid modeling study[J],JOURNAL OF APPLIED PHYSICS,2015,117(24)
Liu, Jia,Wang, You-Nian,Gao, Fei,Liu, Gang-Hu,Liu, Yong-Xin.Experimental investigations of driving frequency effect in low-pressure capacitively coupled oxyge[J],JOURNAL OF APPLIED PHYSICS,2015,117(14)
Xu, Hui-Jing,Zhao, Shu-Xia,Zhang, Yu-Ru,Gao, Fei,Li, Xue-Chun,Wang, You-Nian.Equivalent circuit effects on mode transitions in H-2 inductively coupled plasmas[J],PHYSICS OF PLASMAS,2015,22(4)
Liu, Wei,Wen, De-Qi,Zhao, Shu-Xia,Gao, Fei,Wang, You-Nian.Characterization of O-2/Ar inductively coupled plasma studied by using a Langmuir probe and global[J],PLASMA SOURCES SCIENCE & TECHNOLOGY,2015,24(2)
赵书霞,张钰如,高飞,李雪春,王友年.Equivalent circuit effects on mode transitions in H2 inductively coupled plasmas[J],Physcis of Plasmas,2015,22(4):43508-43508
赵书霞,高飞,王友年.Characterization of O2/Ar inductively coupled plasma studied by using a Langmuir probe and global mo[J],Plasma Sources Sci. Technol.,2015,24(2):25035-25035
刘永新,高飞,王友年.Experimental investigations of electron density and ion energy distributions in dual-frequency capac[J],J. Appl. Phys.,2015,117(14):143301-143301
Fei, G.,Wang, Y.-N.,Yu-Ru, Z.,Shu-Xia, Z.,Xue-Chun, L.,You-Nian, W.,Gao, F.,Zhang, Y.-R.,Zhao, S.-X.,Li, X.-C..Electronic dynamic behavior in inductively coupled plasmas with radio-frequency bias[J],CHINESE PHYSICS B,2014,23(11)
Gao, Fei,Zhang, Yu-Ru,Zhao, Shu-Xia,Wang, You-Nian.Experimental and numerical investigations of the phase-shift effect in capacitively coupled discha[J],PHYSICS OF PLASMAS,2014,21(8)
Liu, Yong-Xin,Gao, Fei,Liu, Jia,Wang, You-Nian.Experimental observation of standing wave effect in low-pressure very-high-frequency capacitive di[J],JOURNAL OF APPLIED PHYSICS,2014,116(4)
Liu Y.-X.,Gao F.,Liu J.,Wang Y.-N..Experimental observation of standing wave effect in low-pressure 200 MHz capacitive discharges[A],2014
Liu, Jia,Bi, Zhen-Hua,Gao, Fei,Wang, You-Nian,Liu, Yong-Xin.Experimental investigations of electron density and ion energy distributions in dual-frequency cap[J],JOURNAL OF APPLIED PHYSICS,2014,115(1)
高飞,张钰如,赵书霞,宋远红,王友年.Experimental and Numerical Studies of Pulse-Modulated ICP Discharges[A],2014,36-36
刘永新,高飞,王友年.Experimental investigations of electron density and ion energy distributions in dual-frequency capac[J],J. Appl. Phys.,2014,115(1):13301-13301
Liu, Wei,Gao, Fei,Zhao, Shu-Xia,Li, Xue-Chun,Wang, You-Nian.Mode transition in CF4 + Ar inductively coupled plasma[J],PHYSICS OF PLASMAS,2013,20(12)
Gao Fei,Liu Wei,Zhao Shu-Xia,Zhang Yu-Ru,Sun Chang-Sen,Wang You-Nian.Changes of the electron dynamics in hydrogen inductively coupled plasma[J],CHINESE PHYSICS B,2013,22(11)
Liu, Jia,Wen, De-Qi,Liu, Yong-Xin,Gao, Fei,Lu, Wen-Qi,Wang, You-Nian.Experimental and numerical investigations of electron density in low-pressure dual-frequency capac[J],JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,2013,31(6)
杜永权,赵天亮,刘永新,高飞,徐勇,王友年,刘文耀,朱爱民,李小松.双频容性耦合等离子体相分辨发射光谱诊断[J],物理学报,2013,62(20):1-7
刘巍,高飞,赵书霞,王友年.射频感应耦合CF_4/Ar等离子体中模式转换的实验研究[A],2013,1
刘巍,高飞,赵书霞,王友年.射频感应耦合CF4/Ar等离子体中模式转换的实验研究[A],2013,286-286
高飞,刘巍,张钰如,赵书霞,李雪春,王友年.射频感应耦合等离子体的模式跳变及偏压效应的实验研究[A],2013,290-290
刘佳,张权治,刘永新,高飞,王友年.低气压双频容性耦合氩氧混合放电离子能量分布[A],2013,285-285
Liu, Jia,Liu, Yong-Xin,Gao, Fei,Wang, You-Nian,Zhang, Quan-Zhi.Measurements of ion energy distributions in a dual-frequency capacitively coupled plasma for Ar/O-[J],JOURNAL OF PHYSICS D-APPLIED PHYSICS,2013,46(23)
Zhao, Shu-Xia,Gao, Fei,Wang, You-Nian,Bogaerts, Annemie.Gas ratio effects on the Si etch rate and profile uniformity in an inductively coupled Ar/CF4 plas[J],PLASMA SOURCES SCIENCE & TECHNOLOGY,2013,22(1)
刘永新,高飞,陆文琪,王友年.Experimental and numerical investigations of electron density[J],J. Vac. Sci. Technol. A,2013,31(6):61308-61308
高飞,赵书霞,李雪春,王友年.Mode transition in CF41 Ar inductively coupled plasma[J],PHYSICS OF PLASMAS,2013,20(12):123513-123513
Gao, Fei,Li, Xue-Chun,Zhao, Shu-Xia,Wang, You-Nian.Spatial variation behaviors of argon inductively coupled plasma during discharge mode transition[J],CHINESE PHYSICS B,2012,21(7)
Zhao, Shu-Xia,Gao, Fei,Wang, You-Nian,Bogaerts, Annemie.The effect of F-2 attachment by low-energy electrons on the electron behaviour in an Ar/CF4 induct[J],PLASMA SOURCES SCIENCE & TECHNOLOGY,2012,21(2)
Jiang, Xiang-Zhan,Liu, Yong-Xin,Lu, Wen-Qi,Bi, Zhen-Hua,Gao, Fei,Wang, You-Nian.Influence of dual-frequency source powers on ion density and electron temperature in capacitively-[J],18th International Vacuum Congress (IVC)/International Conference on Nanoscience and Technology (ICNT)/14th International Conference on Surfaces Science (ICSS)/Vacuum and Surface Sciences Conference of Asia and Australia (VASSCAA),2012,86(7,SI):881-884
高飞,赵书霞,王友年.射频感性耦合等离子体放电模式跳变及回滞的实验研究[A],2011,186-186
Gao, Fei,Zhao, Shu-Xia,Li, Xiao-Song,Wang, You-Nian.Effects of matching network on the hysteresis during E and H mode transitions in argon inductively[J],PHYSICS OF PLASMAS,2010,17(10)
Gao, Fei,Zhao, Shu-Xia,Li, Xiao-Song,Wang, You-Nian.Comparison between experiment and simulation for argon inductively coupled plasma[J],PHYSICS OF PLASMAS,2009,16(11):113502
高飞,王友年.射频感应耦合Ar-CF_4等离子体物理特性的Langmuir探针测量[A],2009,1
Gao Fei,毛明,Ding Zhen-Feng,王友年.射频感应耦合Ar-N2等离子体物理特性的Langmuir探针测量及理论研究[J],物理学报,2008,57(8):5123-5129
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