杨卓青 - 上海交通大学 - 微纳电子学系

个人简介

2018.12~至今，上海交通大学，电子信息与电气工程学院，研究员 2013.12~2018.11，上海交通大学，电子信息与电气工程学院，副研究员 2011.11~2013.11，日本国立产业技术综合研究所（AIST），JSPS博士后特别研究员（JSPS Postdoctoral Fellow） 2010.06~2013.11，上海交通大学，微纳科学技术研究院，助理研究员 2006.04~2010.03，上海交通大学，微纳科学技术研究院，博士 2003.07~2005.09，哈尔滨工程大学，机电工程学院，硕士 1999.09 ~2003.07，哈尔滨工程大学，机电工程学院，本科 1982年4月生，2003年本科毕业于哈尔滨工程大学机电工程学院，并被保送继续攻读硕士学位，获得材料物理与化学专业硕士学位，2006年入上海交通大学微电子学与固体电子学专业攻读博士学位，2010年3月毕业获得工学博士学位，并留校任教继续从事相关科研工作。目前研究工作主要包括MEMS惯性开关器件、PowerMEMS、封装以及微纳柔性3D集成传感技术。先后主持承担国家自然科学青年基金、面上项目，国家“863”项目子课题，总装瓶颈项目子课题，教育部装备预研联合基金，上海市“浦江人才计划”项目，以及国家级重点实验室开放基金等项目。 2011-2013年期间，受日本学术振兴会（JSPS）资助赴日本国立产业技术综合研究所（AIST）从事博士后（JSPS Postdoctoral Fellow）工作，研究期间利用3D立体曝光技术，成功开发了在微细石英圆管、毛细管、以及柔性纤维表面制作高精度、高分辨率的多层多功能微型传感器技术和柔性单光纤医用内窥镜，同时，结合该研究中心在纳米压印技术上的国际领先优势，完成了能够充分提高信号灵敏度的集成纳米压印的微型MEMS柔性血糖传感器开发，为柔性电子纤维编织提供了重要的技术支撑，申请日本发明专利1项。

研究领域

微机电系统（MEMS）：微纳传感器与执行器 MEMS惯性开关器件、物联网近零功耗振动传感器及其相关应用微纳多元兼容集成制造技术（MECMPs）微纳柔性传感技术（柔性纤维编织、柔性电子皮肤等）

近期论文

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Zhuoqing Yang*, Jianhao Shi, Jinyuan Yao, Xiaojing Zhang, Guifu Ding and Xiaolin Zhao. “A Laterally Driven MEMS Inertial Switch With Double-Layer Suspended Springs for Improving Single-Axis Sensitivity”, IEEE Trans. Compon., Packag., Manuf. Technol., vol. 8, no. 10, pp. 1845-1854, 2018. Zhuoqing Yang*, Jianhao Shi, Bin Sun, Jinyuan Yao, Guifu Ding, Renshi Sawada, “Fabrication of electromagnetically-driven tilted microcoil on polyimide capillary surface for potential single-fiber endoscope scanner application,” Micromachines, vol. 9, DOI: 10.3390/mi9020061, 2018. Qiu Xu, Bin Sun, Yigui Li, Xiaojian Xiang, Liyan Lai, Jian Li, Guifu Ding, Xiaolin Zhao, Zhuoqing Yang*, “Design and characterization of an inertial microswitch with synchronous follow-up flexible compliant electrodes capable of extending contact duration,” Sensors and Actuators A: Physical, vol. 270, pp.34-45, 2018. Qiu Xu, Zhuoqing Yang*, Yunnan Sun, Liyan Lai, Zhiyu Jin, Guifu Ding, Xiaolin Zhao, Jing Wang. “Shock-resistibility of MEMS-based inertial microswitch under reverse directional ultra-high g acceleration for IoT applications”, Scientific Reports, vol.7, 45512, 2017. Qiu Xu, Zhuoqing Yang*, Bo Fu, Jianhua Li, Hao Wu, Qihuan Zhang, Yunna Sun, Guifu Ding, Xiaolin Zhao. “A surface-micromachining-based inertial micro-switch with compliant cantilever beam as movable electrode for enduring high shock and prolonging contact time”, Applied Surface Sciences, vol. 387, pp. 569-580, 2016. Qihuan Zhang, Zhuoqing Yang*, Qiu Xu, Yang Wang, Guifu Ding, Xiaolin Zhao. “Design and fabrication of a laterally-driven inertial micro-switch with multi-directional constraint structures for lowering off-axis sensitivity”, Journal of Micromechanics and Microengineering, vol. 26, 055008(15pp), 2016. Qiu Xu, Zhuoqing Yang*, Qihuan Zhang, Yunnan Sun, Yang Wang, Hong Wang, Guifu Ding, Xiaolin Zhao. “Simulation and characterization of a thin film Au/Ni micro hot bridge-wire ignition element under capacitor discharging”, International Journal of Thermal Sciences, vol. 102, pp. 100-110, 2016. Wenguo Chen, Zhuoqing Yang*, Yan Wang, Guifu Ding, Hong Wang, Xiaolin Zhao. “Fabrication and characterization of a low-g inertial microswitch with flexible contact point and limit-block constraints”, IEEE/ASME Transactions on Mechatronics, vol. 21, pp. 963-972, 2016. Yang Wang, Zhuoqing Yang*, Qiu Xu, Wenguo Chen, Guifu Ding, Xiaolin Zhao. “Design, simulation and characterization of a MEMS inertia switch with flexible CNTs/Cu composite array layer between electrodes for prolonging contact time”, Journal of Micromechanics and Microengineering, vol. 25, 085012(8pp), 2015. Zhuoqing Yang*, Yi Zhang, Toshihiro Itoh, Ryutaro Maeda. “A novel MEMS compatible lab-on-a-tube technology”, Lab on a Chip, vol. 14, pp. 4604-4608, 2014. Zhuoqing Yang*, Yi Zhang, Toshihiro Itoh, Ryutaro Maeda. “Flexible implantable microtemperature sensor fabricated on polymer capillary by programmable UV lithography with multilayer alignment for biomedical applications”, IEEE/ASME Journal of Microelectromechanical Systems, vol. 23, No. 1, pp. 21-29, July, 2014. Zhuoqing Yang*, Bin Zhu, Wenguo Chen, etc. “Fabrication and characterization of a multidirectional-sensitive contact-enhanced inertial microswitch with an electrophoretic flexible composite fixed electrode”, Journal of Micromechanics and Microengineering, vol. 22, 045006(10pp), 2012. Zhuoqing Yang*, Guifu Ding, Haogang Cai, etc. “A MEMS inertia switch with bridge-type elastic fixed electrode for long duration contact”, IEEE Transactions on Electron Devices, vol. 55, pp. 2492-2497, 2008. Haogang Cai, Zhuoqing Yang*, etc. “Development of a novel MEMS inertial switch with compliant stationary electrode”, IEEE Sensors Journal, vol. 9, pp. 801-808, 2009. Jianhao Shi, Hongfang Li, Bin Sun, Xiaolin Zhao, Guifu Ding and Zhuoqing Yang. “A Flexible Pressure Sensor Based on Low-Cost Electroplated-Ni Film Induced Cracking for Wearable Devices Application,” IEEE NEMS 2018, Apr. 22-26, Singapore. (Oral) Zhuoqing Yang, Jianhao Shi, Bin Sun, Congchun Zhang, Guifu Ding, and Xiaolin Zhao. “Non-Silicon Micro/Nano 3D Integrated Manufacturing Technology for Near-Zero-Power and Flexible MEMS Devices Applications,” 8th IEEE International Nanoelectronics Conference (IEEE INEC), Jan 03-05, 2018, Kuala Lumpur, Malaysia. (Invited Talk) Mengyuan Zhao, Zhuoqing Yang, Bin Sun, Bo Dai, Hua Liu, Jinyuan Yao, Xiaoxue Xu, Guifu Ding, Xiaolin Zhao. “A micro electromagnetically-driven scanner by 2-DOF second-order resonance to extend scanning scale for ultra-thin single-fiber endoscope application,” IEEE MEMS 2018, pp. 575-578, Belfast, UK. Zhuoqing Yang. “MEMS sensors and actuators based on 3D micro-fabrication technologies for wearable devices and IoT applications,” The 4th Int’l Conference on Semiconductor Physics and Devices (ICSPD 2017), Sep. 24-26, Suzhou, China (Keynote Speech) Qiu Xu, Zhuoqing Yang, Yunna Sun, Mengyuan Zhao, Jian Li, Guifu Ding, Xiaolin Zhao. “Shock-resistibility of inertial microswitch under reverse sensitive directional ultra-high G acceleration”, IEEE MEMS 2017, pp. 789-792, Las Vegas, NV, USA.