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个人简介

Doctor of Philosophy Chemistry Massachusetts Institute of Technology 1989 Master of Science Analytical Chemistry University of Texas at Arlington 1984 Master of Science Analytical Chemistry National Taiwan University 1982 Bachelor of Science Chemistry National Chung-Hsing University 1980

研究领域

Analytical Materials

Dr. Chyan’s group explores new electrochemistry and materials chemistry of metals, semiconductors, oxides, and their composites. The improved understanding of fundamental interfacial properties leads to useful functional designs, such as chemical/biochemical sensors, IC metal interconnects, Cu diffusion barriers, fuel cells and renewable energy.

近期论文

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"Bonding Structure of Model Fluorocarbon Polymer Residue Determined by Functional Group Specific Chemical Derivatization " Mukherjee, T.; Rimal, S. ; Koskey, S.; Chyan, O.M.R.; Singh, K.J., Myers, A.M., ECS Solid State Letters, 2013, 2(3), N11-N14 . "Characterization of Boron Doped Amorphous Silicon Films by Multiple Internal Reflection Infrared Spectroscopy", N. Ross, K. Shrestha, O. Chyan, C. L Littler, V. C. Lopes, and A. J. Syllaios, Mater. Res. Soc. Symp. Proc. 2013. " Characterization of Post Etch Residues on Patterned Porous Low-k using Multiple Internal Reflection Infrared Spectroscopy " Rimal, S.; Ross, N.; Pillai, K. S.M.; Singh, K.J., Chyan, O.M.R.; ECS Transactions , 2012, 41, 315-322 "Wafer Fabrication Monitoring/Control System and Method" Chen, J.J.; Chyan, O.M.R.; United State Provisional Patent Application, serial number 61/465,154, 2012 " Enhancement of the energy photoconversion efficiency through crystallographic etching of a c-plane GaN thin film", A. M. Basilio, Y. k. Hsu, W.H. Tu, C.H. Yen, G.M. Hsu, O. Chyan , L.C. Chen and K.H. Chen, Journal of Materials Chemistry, 2010, 20, 8118-8125. "Study of Bimetallic Corrosion in Chemical-Mechanical Planarization using Corrosion Screening Micropattern and Tafel Plots” Yu, K.; K. Pillai; Nalla, P.; Chyan, O., Journal of Applied Electrochemistry, 2010, 40, 14359. "Investigation of Cu Bimetallic Corrosion in CMP Chemical Environments using Micropattern Corrosion Screening", Nalla, P.; K. Pillai; Yu, K.; Venkataraman, S.; Chyan, O M.R.; Proceeding of 2009 Advanced Metallization Conference, 2009, pp 83-91. “A New Class of Thin Film Hydrogels Produced by Plasma Polymerization” Bhattacharyya, D.; Pillai, K.; Chyan, O. ; Tang, L.; Timmons, R. B. Chemistry of Materials 2007, 19(9), 2222-2228. "Method of Making Integrated Circuits Using Ruthenium and Its Oxides as Cu Diffusion Barrier", Chyan, O. Ponnuswamy, T.; U.S. Patent 7247554, 2007. “Arrayed CNx NT-RuO2 nanocomposites directly grown on Ti-buffered Si substrate for supercapacitor applications” Fang, W.C.; Chyan, O.; Sun, C.L.; Wu, C.T.; Chen, C.P.; Chen, K.H.; Chen, L.C.; Huang, J.H.. Electrochemistry Communications 2007, 9(2), 239-244. “Enhanced Electrochemical Properties of Arrayed CNx Nanotubes Directly Grown on Ti-Buffered Silicon Substrates” Fang, W.C.; Sun, C.L.; Huang, J.H.; Chen, L.C.; Chyan, O.; Chen, K.H.; Papakonstantinou, P. Electrochemical and Solid-State Letters 2006, 9(3), A175-A178.

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