杨振川 - 北京大学 - 信息科学技术研究所

个人简介

2004年于北京大学信息科学技术学院获得理学博士学位。同年，赴香港科技大学计算机与电子工程系做博士后（Research associate）。2006年加入北京大学信息科学技术学院微纳电子学系工作。现为北京大学集成电路学院教授，微米/纳米加工技术国家级重点实验室副主任。研究成果概况长期从事微机电系统（MEMS）研究工作，在惯性器件、声矢量传感器、微纳加工技术等方面取得了比较重要的研究成果。主持和参加了重点研发计划课题、自然科学基金、实验室基金等多项国家级、省部级研究项目。以第一作者和合作作者在国际著名学术期刊、国内核心学术期刊、国内外重要学术会议等上发表研究论文100 余篇，授权中国发明专利20项。

研究领域

物理量MEMS传感器（声学、流量、压力等），微纳加工技术

近期论文

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Zhezheng Zhu, Lingmeng Yang, Wenhan Chang, Chengchen Gao, Yilong Hao, Zhenchuan Yang, " An L-shaped 2-Dimentional particle velocity sensor," 21th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2021), June 20-24, 2021, pp.1255-1258. Lingmeng Yang, Zhezheng Zhu, Wenhan Chang, Fanrui Meng, Chengchen Gao, Yilong Hao, Zhenchuan Yang, " A compact acoustic particle velocity gradient sensor based on MEMS hot-wire sensor chips," 21th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2021), June 20-24, 2021, pp.50-53. Qi Cheng, Maojun Wang, Ming Tao, Ruiyuan Yin, Yue Li, Nana Yang, Wenhua Xu, Chengchen Gao, Yilong Hao, and Zhenchuan Yang, "Planar Dual Gate GaN HEMT Cascode Amplifier as a Voltage Readout pH Sensor with High and Tunable Sensitivities" IEEE Electron Device Letters, Vol.41, No.3, pp.485 - 488. Bojie Zhang, Qi Cheng, Zesen Bai, Qiancheng Zhao, Zhenchuan Yang, "An Integrated Miniature Conductivity and Temperature Sensor Chip with Open-Cell Annular Electrode," The 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019. Zesen Bai, Jian Cui, Qiancheng Zhao, Zhenchuan Yang, Guizhen Yan, "Initial frequency split reduction of MEMS ring gyroscope based on cascaded springs geometrical compensation," Electronics Letters, Vol. 55, No. 14, 2019.