朱煜 - 清华大学 - 机械工程系

个人简介

教育背景 1998/09-2001/7,中国矿业大学，博士 1990/09-1993/007,中国矿业大学，硕士 1979/09-1983/7,北京师范大学，学士工作履历 2007.12-2012.12/-至今，清华大学精仪系制造所/机械系机电所，长聘教授，博导 2004.04-2007.11，清华大学精仪系，副教授 2001.09-2004.03，清华大学制造工程研究所，博士后 1999.09-2001.07，清华大学制造工程研究所，访问学者 1997.01-2004.03，中国矿业大学，副教授 1983.08-1996.12，中国矿业大学，讲师奖励与荣誉获2018年度北京市科学技术一等奖、中国专利银奖 2015获年度中国专利优秀奖 2012年入选科技部“重点领域创新团队”带头人

研究领域

主要从事超精密机械与测控方向研究，包括精密测量与控制理论、超精密机械设计与制造、电子制造装备及其系统等，研制出国内首个光刻机双工件台系统样机，关键技术指标已达到国际同类光刻机双工件台的先进水平

近期论文

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代表著作陈霸东，朱煜，胡金春，《系统参数辨识的信息准则及算法》. 2011. 陈霸东，朱煜，胡金春，Jose C.Principe. System Parameter Identification Information Criteria & Algorithms，Elsevier(英文版). 2013. 代表论文 Sen Lu; Kaiming Yang; Yu Zhu; Leijie Wang; Ming Zhang, Real-time correction of periodic nonlinearity in homodyne detection for Scanning Beam Interference Lithography.Optical Engineering, 2018.57(10),SCI: GZ4CJ EI:20184406010970. Jiaqi Zhao; Ming Zhang; Yu Zhu; Xin Li,et al.A novel optimization design method of additive manufacturing oriented porous structures and experimental validation. Materials and design, 2018.107550, SCI: 10.1016/j.matdes. Ding Yuan; Ming Zhang; Yu Zhu; Xin Li;et al.Performance Evaluation of the Wrench Models of Ironless Permanent Magnet Planar Motor With Different Simplifications.IEEE TRANSACTIONS ON MAGNETICS,2018.2875101,SCI:10.1109/TMAG. Min Li; Yu Zhu;Kaiming Yang;Chuxiong Hu; Haihua Mu,An Integrated Model-Data Based Zero Phase Error Tracking Feedforward Control Strategy with Application to An Ultra-Precision Wafer Stage.IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS,2017.64(5):4139-4149. Min Li; Kaiming Yang; Yu Zhu; Haihua Mu; Chuxiong Hu,State/Model-Free Variable-Gain Discrete Sliding Mode Control for An Ultra-Precision Wafer Stage.IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS,2017.64(8):6695-6705. Yu Zhu; Ding Yuan; Ming Zhang; Feng Liu; Chuxiong Hu, Unified wrench model of an ironless permanent magnet planar motor with 2D periodic magnetic field. IET Electric Power Applications, SCI10.1049/iet-epa.2017.0605. Yu Zhu; Jiang Yi; Kaiming Yang; et al.Convergence performance oriented data-driven tuning method for parameterized controller design with cases investigation. IET Control Theory and Applications,2016.10(2):1322-1330. Yu Zhu; Leijie Wang; Ming Zhang; et al. Novel homodyne frequency-shifting interference pattern locking system. Chinese Optics Letters,2016.14(6):061201-061206. Yu Zhu; Chuxiong Hu; et al. Accuracy- and Simplicity-Oriented Self-Calibration Approach for Two-Dimensional Precision Stages. IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS. 60(1): 2264-2272, 2013. Yu Zhu; Shengguo Zhang; et al. Augmentation of Propulsion Based on Coil Array Commutation for Magnetically Levitated Stage. IEEE Transactions on Magnetics，48(1):31-37, 2012.