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个人简介

薛高鹏,工学博士,哈尔滨工业大学(深圳)机电工程与自动化学院助理教授,硕士生导师,深圳市海外高层次C类人才。2017年3月博士毕业于日本东北大学(Tohoku University)微机电系统(MEMS)专业;2017年4月至2019年3月入职歌尔声学日本芯片研究院,在MEMS Foundry负责晶圆级器件研发;2019年4月至2022年3月在清华大学深圳国际研究生院从事博士后研究工作;2022年4月加入哈尔滨工业大学(深圳)机电工程与自动化学院。相关研究成果已发表论文30余篇,其中以第一或通讯作者发表论文包括Microsystems & Nanoengineering(Nature Group Publishing)、IEEE/ASME Journal MEMS、IEEE Sensors Journal、Optics Express、Optics and Lasers in Engineering等高水平期刊论文,以及IEEE MEMS(Oral)、Transducers、IEEE NEMS(Oral)、IEEE Nano(Oral)等知名国际会议论文,获得IEEE NEMS 2021国际会议Best Conference Paper Award、日本电气学会(2014)优秀发表奖、日本东北大学校长奖(Tohoku University President’s Award)等。 工作经历 2019.04-2022.03,清华大学深圳国际研究生院,博士后 2017.04-2019.03,歌尔声学日本芯片研究院,工程师 教育经历 2014.04-2017.03,日本东北大学(Tohoku University),微机电系统,博士 2012.04-2014.03,日本东北大学(Tohoku University),微机电系统,硕士 2006.09-2011.07,大连交通大学,机械工程及自动化+软件工程,学士 科研项目 2021-2022 主持 国家自然科学基金-青年基金项目 已结题 2020-2021 主持 广东省基础与应用基础研究基金-青年基金项目 已结题 2021-2023 主持 深圳市优秀科技创新人才培养项目 在研 2022-2024 主持 哈尔滨工业大学(深圳)教师科研启动项目 在研 2022-2024 主持 深圳市海外高层次人才科研启动经费C类 在研 2022-2023 主持 机械工业仪器仪表综合技术经济研究所(横向) 在研 2023-2025 主持 出站博士后留(来)深科研资助经费 在研

研究领域

MEMS多维定位平台 MEMS气体传感器 MEMS振镜模组开发及应用 磁共振力显微成像技术(MRFM)

近期论文

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Gaopeng Xue, Liyu Lin, Qihang Zhai, Chuang Zeng, Xiaohao Wang, Xinghui Li*, “Development of dielectric-film-based polarization modulation scheme for patterning highly uniform 2D array structures with periodic tunability”, Optics and Lasers in Engineering, vol. 167, 107627, 2023. (JCR Q1, IF: 5.666, SCI) Gaopeng Xue*, Masaya Toda, Xinghui Li, Xiaohao Wang, and Takahito Ono, “Assembled Comb-drive XYZ-microstage with Large Displacements and Low Crosstalk for Scanning Force Microscopy”,IEEE/ASME Journal of Microelectromechanical Systems, vol. 31, no. 1, pp. 54-62, Feb. 2022. (MEMS领域顶级期刊,JCR Q2, IF: 2.829, SCI) Gaopeng Xue*, Masaya Toda, Xinghui Li, Bing Li, and Takahito Ono, “Demonstration of heterogeneous structure for fabricating a comb-drive actuator for cryogenic applications”, Micromachines, vol. 13, no. 8, pp. 1287, Aug. 2022. (JCR Q2, IF: 3.523, SCI) Ruiming Chen, Yiming Li, Gaopeng Xue*, Yihao Tao, and Xinghui Li*, “Laser triangulation measurement system with Scheimpflug calibration based on the Monte Carlo optimization strategy”, Optics Express, vol. 30, no. 14, pp. 25290–25307, Jul. 2022. (JCR Q2, IF: 3.833, SCI) Masaya Toda, Gaopeng Xue, Takahito Ono, Review of magnetic resonance force sensors based on nanomechanical cantilever, IEEJ Transactions on Sensors and Micromachines, 2022, 142(9): 224–229. Gaopeng Xue, Qihang Zhai, Haiou Lu, Qian Zhou, Kai Ni, Liyu Lin, Xiaohao Wang, and Xinghui Li, “Polarized holographic lithography system for high-uniformity microscale patterning with periodic tunability”, Microsystems & Nanoengineering, vol. 7, no. 1, pp. 1-10, Apr. 2021. (Nature Group Publishing, 中科院/JCR Q1, IF: 8.006, SCI) Gaopeng Xue*, Masaya Toda, and Takahito Ono, “Comb-Drive XYZ-Microstage with Large Displacements Based on Chip-Level Microassembly”, IEEE/ASME Journal of Microelectromechanical Systems, vol. 25, no. 6, pp. 989-998, Dec. 2016. (MEMS领域顶级期刊, 入选IEEE Xplore popular articles, JCR Q2, IF: 2.829, SCI) Gaopeng Xue*, Masaya Toda, Xinghui Li, Xiaohao Wang, and Takahito Ono, “Magnetic Resonance Force Microscopy With Vacuum-Packaged Magnetic Cantilever Towards Free Radical Detection”, IEEE Sensors Journal, vol. 21, no. 20, pp. 22578-22586, Oct. 2021. (JCR Q1, IF: 4.325, SCI) Gaopeng Xue, Haiou Lu, Xinghui Li, Qian Zhou, Guanhao Wu, Xiaohao Wang, Qihang Zhai, and Kai Ni, “Patterning nanoscale crossed grating with high uniformity by using two-axis Lloyd’s mirrors based interference lithography”, Optics Express, vol. 28, no. 2, pp. 2179-2191, Jan. 2020. (JCR Q2, IF: 3.833, SCI) Guochao Wang#, Gaopeng Xue#, Qihang Zhai, Junhao Zhu, Kangning Yu, Guangyao Huang, Min Wang, Aihua Zhong, Lingxiao Zhu, Shuhua, Yan, and Xinghui Li, “Planar diffractive grating for magneto-optical trap application: fabrication and testing”, Applied Optics, vol. 60, no. 29, pp. 9358-9364, Oct. 2021. (JCR Q3, IF: 1.98, SCI) Gaopeng Xue*, Masaya Toda, and Takahito Ono, “Chip-Level Microassembly of XYZ-Microstage with Large Displacements”, IEEJ Transactions on Sensors and Micromachines, vol. 135, no. 6, pp.236-237, Jun. 2015. (Special Issue on “The Awarded Papers of The 31st Sensor Symposium”, EI) Kangning Yu, Junhao Zhu, Weihan Yuan, Qian Zhou, Gaopeng Xue, Guanhao Wu, Xiaohao Wang, and Xinghui Li*, “Two-channel six degrees of freedom grating-encoder for precision-positioning of sub-components in synthetic-aperture optics”, Optics Express, vol. 29, no. 14, pp. 21113-21128, Jun. 2021. (JCR Q2, IF: 3.833, SCI) Jianhui Sun, Limin An, Gaopeng Xue, and Xinghui Li*, “Wavefunction engineering for effcient photoinduced-electron transfer in CuInS2 quantum dot-sensitized solar cells”, Nanotechnology, vol. 31, no. 21, pp. 1-10, Mar. 2020. (JCR Q2, IF: 3.399, SCI) Nurasyikin Mohd, Gaopeng Xue, Naoki Inomata, Nguyen Van Toan, Masaya Toda, and Takahito Ono,“Vacuum Packaged Micro-Cantilever with a Magnetic Particle”, IEEJ Transactions on Sensors and Micromachines, vol. 137, no. 8, pp.245-246, 2017. (EI) 会议论文 Fuyuan Deng, Tianshi Lu, Qihang Zhai, Linbin Luo, Gaopeng Xue, Qian Zhou, Xiaohao Wang, Xinghui Li, “A four-step laser interference lithography for patterning pixelated micro-polarizer array”, Proceedings of SPIE- Holography, Diffractive Optics, and Applications XII, vol. 12318, 19 December 2022. (EI) Weijian Shi, Shihao Lu, Yihao Tao, Gaopeng Xue, Fengxiao Lei, and Xinghui Li, “FPGA enabled accurate angle-power matching method in MEMS mirrors-based structure light projection system”, Proceedings of SPIE- Optical Metrology and Inspection for Industrial Applications IX, vol. 12319, 19 December 2022. (EI) Gaopeng Xue, Liyu Lin, Qihang Zhai, Qian Zhou, Xiaohao Wang, and Xinghui Li, “Modulation of dielectric film on two-axis Lloyd’s mirrors for patterning high-uniformity nanoscale grating”, Proceedings of the 2021 International Conference on Optical Instruments and Technology: Micro/Nano Photonics: Materials and Devices, vol. 12283, Apr. 8–10, 2022. (Poster, EI) Junhao Zhu, Guochao Wang, Gaopeng Xue, Qian Zhou, and Xinghui Li, “Heterodyne three-degree-of-freedom grating interferometer for ultra-precision positioning of lithography machine”, Proceedings of the 2021 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, vol. 12282, Apr. 8–10, 2022. (Best Student Paper Award, EI) Gaopeng Xue*, Masaya Toda, Xinghui Li, and Takahito Ono, “Chip-level-microassembly Comb-drive XYZ-microstage with Large Displacements and Low Crosstalk”, Proceedings of the 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS), pp. 43-46, Xiamen, China, Apr. 25-59, 2021. (Best Conference Paper Award(全场唯一), Oral, EI) Gaopeng Xue*, Masaya Toda, and Takahito Ono, “Vacuum packaged cantilever sensor mounted with a magnetic particle for magnetic force detection”, Proceedings of the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 1096-1099, Kaohsiung, Taiwan, Jun. 2017. (MEMS领域顶级会议,Poster, EI) Gaopeng Xue*, Masaya Toda, and Takahito Ono, “Assembled Comb-Drive XYZ-Microstage with Large Displacements for Low Temperature Measurement Systems”, Proceedings of the 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 14-17, Estoril, PORTUGAL, Jan. 2015. (MEMS领域顶级会议,Oral, EI) Gaopeng Xue*, Masaya Toda, and Takahito Ono, “Assembled comb-drive XYZ-microstage integrated with capacitive displacement sensor for low temperature measurement systems”, The 31th [Sensor · Micromachine and Application System] Symposium, pp.1-6, Oct. 2014. (Outstanding Presentation Award, Oral) Yihao Tao, Gaopeng Xue*, Ning Ding, Qian Zhou, Kai Ni, Xiaohao Wang, and Xinghui Li, “MEMS-mirror-based dynamic structured light projection system for three-dimensional measurement with high precision”, Proceedings of SPIE-Optical Metrology and Inspection for Industrial Applications VIII, vol. 11899, Nantong, China, Oct. 2021.(Poster, EI) Qihang Zhai, Gaopeng Xue*, Liyu Lin, Qian Zhou, Kai Ni, Xiaohao Wang, and Xinghui Li, “A mechanical mosaic method for reflective grating base on diffracted beams orientation”, Proceedings of SPIE-Holography, Diffractive Optics, and Applications XI, vol. 11898, Nantong, China, Oct. 2021. (Oral, EI) Junhao Zhu, Kangning Yu, Gaopeng Xue*, Ningning Shi, Qian Zhou, Xiaohao Wang, and Xinghui Li, “A simplified two-phase differential decoding algorithm for high precision grating encoder”, Proceedings of SPIE-Optical Metrology and Inspection for Industrial Applications VIII, vol. 11899, Nantong, China, Oct. 2021. (Poster, EI) Junhao Zhu, Kangning Yu, Gaopeng Xue*, Qian Zhou, Xiaohao Wang, and Xinghui Li, “An improved signal filtering strategy based on EMD algorithm for ultrahigh precision grating encoder”, Proceedings of SPIE-Real-time Photonic Measurements, Data Management, and Processing VI, vol. 11902, Nantong, China, Oct. 2021. (Poster, EI) Ningning Shi, Shengtong Wang, Gaopeng Xue*, Mengfang Liu, Yaodong Han, Junhao Zhu, Kai Ni, Xiaohao Wang, and Xinghui Li, “A real-time processing system for dual-channel six-degree-of-freedom grating ruler based on FPGA”, Proceedings of SPIE-Optical Design and Testing XI, vol. 11895, Nantong, China, Oct. 2021. (Poster, EI) Jiao Bai, Jingwen Li, Gaopeng Xue*, Xiaohao Wang, Qian Zhou, and Xinghui Li, “A modified chromatic confocal system for spectral reflectance measurement”, Proceedings of SPIE-Optical Design and Testing XI, vol. 11895, Nantong, China, Oct. 2021. (Poster, EI) Ruiming Chen, Xinghui Li, Xiaohao Wang, Jianxiong Li, Gaopeng Xue, Qian Zhou, and Kai Ni, “A planar pattern based calibration method for high precision structured laser triangulation measurement”, Proceedings of SPIE-The International Society for Optical Engineering-Optical Metrology and Inspection for Industrial Applications VI, vol. 11189, no. 1118914, Hangzhou, China, Oct. 2019. (EI) Gaopeng Xue*, Masaya Toda, and Takahito Ono, “Assembled Comb-drive XYZ-microstage with DPPH Sample for the 3D Scanning of Magnetic Resonance Force Microscope”, Proceedings of the 16th international conference on nanotechnology, pp. 980-981, Sendai, JAPAN, Aug. 2016. (Oral, EI) Gaopeng Xue*, Masaya Toda, and Takahito Ono, “Assembled comb-drive XYZ-microstage with large displacements for the 3D scanning stage of low temperature measurement systems”, The 6th Japan China Korea Joint Conference on MEMS/NEMS, Xian, CHINA, Sep. 2015. (Poster) Gaopeng Xue*, Masaya Toda, and Takahito Ono, “Comb-drive XYZ-microstage based on assembling technology for low temperature measurement systems”, Proceedings of International Conference on Electronic Packaging and iMAPS All Asia Conference, pp. 83-88, Kyoto, JAPAN, Apr. 2015. (Oral, EI) Gaopeng Xue*, Masaya Toda, and Takahito Ono, “Microstage Driven by Comb-Drive Actuators for Low Temperature Measurement Systems”, The 7th Asia-Pacific Conference on Transducers and Micro-Nano Technology, Daegu, KOREA, Jul. 2014. (Oral) Gaopeng Xue*, Masaya Toda, Nurasyikin Mohd, Zhonglie An, Nguyen Van Toan, and Takahito Ono, “Magnetic field sensor based on vacuum packaged cantilever with a mounted magnet”, The 33th [Sensor · Micromachine and Application System] Symposium, pp.1-4, Oct. 2016. (Poster) Gaopeng Xue*, Masaya Toda, and Takahito Ono, “Assembled comb-drive XYZ-microstage with large displacements for the 3D scanning stage of magnetic resonance force microscopy”, The 32th [Sensor · Micromachine and Application System] Symposium, pp.1-4, Oct. 2015. (Poster) Gaopeng Xue*, Masaya Toda, Liang He, Yusuke Kawai, and Takahito Ono, “An electrostatically driven microstage with capacitive displacement sensor for low temperature operation”, The 30th [Sensor · Micromachine and Application System] Symposium, pp.1-4, Oct. 2013. (Poster)

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