近期论文
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期刊论文
X. Wang, Y. Deng, P. Jiang, Y.Cheung, Z. Liu, H. Xie, and H. Yu, A Flexible Thin-film Pressure Sensor based on Thermal Conduction Mechanism for Pressure, Orientation, and Mapping Signal Acquisition, IEEE SENSORS Journal, 2022.
Chen, X., Li, Y., Wang, X.* and Yu, H.*, Origami Paper-Based Stretchable Humidity Sensor for Textile-Attachable Wearable Electronics. ACS Applied Materials & Interfaces. (2022) (Co-Corresponding author)
Wang, X., Fang, Z., Song, X. and Xu, W., A nanoscale hot-wire flow sensor based on CMOS-MEMS technology. Frontiers in Mechanical Engineering, p.26. (2022)
X. Wang, Z. Ke, G. Liao, Y. Yang, X. Pan, and W. Xu, Human Respiratory Monitoring Platform with A Fast Response Micro Thermal Flow Sensor, IEEE Sensors Journal. (2022)
X. Wang, Y. Deng, P. Jiang, H.Y. Yu, Low Hysteresis, Pressure-Insensitive, and Transparent Capacitive Strain Sensor for Human Activity Monitoring, Microsystems and Nanoengineering. (2022)
X. Wang, Y.Lee, and W. Xu, Sensitivity and Frequency Response Improvement of the Micro Thermal Convective Accelerometer with Structure Optimization, Journal of Microelectromechanical Systems. (2022)
X. Wang, Y. Deng, P. Jiang, H.Y. Yu, An Ultrafast-Response and Flexible Humidity Sensor for Human Respiration Monitoring and Non-Contact Safety Warning, Microsystems and Nanoengineering. (2021)
X. Wang, Y. Deng, X.R. Chen, W. Xu, H.Y. Yu, A Vertically Aligned Multi-Wall Carbon Nanotube based Humidity Sensor with Fast Response, Low Hysteresis, and High Repeatability, IEEE Sensors Letters. (2021)
W. Xu, X. Wang*, X. Pan, A. Bermak, YK Lee, Y. Yang, A Wafer-Level Packaged CMOS MEMS Pirani Vacuum Gauge, Transactions on Electron Devices. (2021) (Corresponding author)
Wang X., Lee YK, Xu W. A Reliable Liquid-Based CMOS MEMS Micro Thermal Convective Accelerometer with Enhanced Sensitivity and Limit of Detection. Journal of Microelectromechanical Systems. (2021)
Wang, X., Lee YK, Xu W. A Fast Response and CMOS Compatible Micro Gas Flow Sensor with Thermal Feedback. IEEE Sensors Letters. (2020)
X. Wang, Wei Xu, Izhar, and Y. Lee, "Theoretical and Experimental Study and Compensation for Temperature Drifts of Micro Thermal Convective Accelerometer," Journal of Microelectromechanical Systems. (2020)
X. Wang, W. Xu, H. Luo, and Y. Lee, "Theoretical Modeling, Numerical Simulations and Experimental Study of Micro Thermal Convective Accelerometers," Journal of Microelectromechanical Systems. (2019)
W. Xu, X. Wang, Ke, Z. and Lee, Y.K., Bidirectional CMOS-MEMS Airflow Sensor with sub-mW Power Consumption and High Sensitivity. IEEE Transactions on Industrial Electronics. (2021)
W. Xu, X. Wang, X. Zhao, Y., Yang and Y. K. Lee, "Determination of Thermal Conductivities for Thin Film Materials in CMOS MEMS", in IEEE Transactions on Industrial Electronics. (2020)
W. Xu, X. Wang, R. Wang, Izhar, J. Xu and Y. K. Lee, "CMOS MEMS Thermal Flow Sensor with Enhanced Sensitivity for HVAC Application," in IEEE Transactions on Instrumentation and Measurement. (2020)
W. Xu, X. Wang, X. Zhao, Izhar, and Y. Lee, "Two-Dimensional CMOS MEMS Thermal Flow Sensor With High Sensitivity and Improved Accuracy," Journal of Microelectromechanical Systems. (2020)
X. Le, X. Wang, Jintao Pang, Y. Liu, B. Fang, Z. Xu, C. Gao, Y. Xu, J. Xie, "A high performance humidity sensor based on surface acoustic wave and graphene oxide on AlN/Si layered structure," Sensors and Actuators B: Chemical. (2018)
学术会议论文(遴选)
R. Jiao, G. Yang, R. Wang, Y. Tang, Z. Liu, H. Xie, H. Yu *, and X. Wang*, "A CMOS Compatible Micro Pirani Gauge with Structure Optimization for Performance Enhancement", in 2023 IEEE 36nd International Conference on Micro Electro Mechanical Systems (MEMS). (顶会, Poster)
Z. Liu, R. Wang, G. Yang, X. Zhang, R. Jiao, X. Li, J. Qi, H. Yu, H. Xie*, and Xiaoyi Wang*, " A Performance Enhanced Thermal Flow Sensor with Novel Dual-Heater Structure Using CMOS Compatible Fabrication Process", in 2023 IEEE 36nd International Conference on Micro Electro Mechanical Systems (MEMS). (顶会, oral)
王晓毅，刘钟一，谢会开, "基于薄膜打薄工艺的CMOS-MEMS微热式传感器", in 2022年中国微纳电子技术交流与学术研讨会. (邀请报告)
X. WANG*, Z. Liu, Y.K. Lee, and H. Xie, "A CMOS-MEMS Thermal Convective Accelerometer for Performance Enhancement using Film Thinning Method", in 2022 MicroTAS. (Poster)
X. Wang, X. Chen, Y. Den, H. Yu, "A highly sensitive flexible flow sensor with quadruple heaters and suspended structure for respiration application", in 2022 IEEE 35nd International Conference on Micro Electro Mechanical Systems (MEMS). (顶会, Poster)
X. Wang, Y. Guo, X. Zhao, W. Xu, " A Bidirectional CMOS MEMS Thermal Wall Shear Stress Sensor with Improved Sensitivity and Low Power Consumption ", in 2021 IEEE 34nd International Conference on Micro Electro Mechanical Systems (MEMS). (顶会, oral)
Z. Ma, X. Wang*, L. Zhang*, "Vertically Aligned Carbon Nanotubes for Fast Humidity Sensing", The 15th IEEE International Conference on Nano/Micro Engineered & Molecular Systems, 2020 (NEMS). (oral).
X. Wang, W. Xu, G. Lim, Y.K. Lee, "A reliable liquid-based highly sensitive micro thermoresistive convective accelerometer by using 0.35μm cmos mems technology," in 2020 IEEE 33nd International Conference on Micro Electro Mechanical Systems (MEMS), 2020, pp. 745-748. (顶会, poster)
X. Wang, X. Zhao, H. Luo, W. Xu, Y.K. Lee, "A coriolis force compensated micro thermal convective accelerometer with low crossing effect," in 2020 IEEE 33nd International Conference on Micro Electro Mechanical Systems (MEMS), 2020, pp. 255-258. (顶会, oral)
W. Xu, X. Wang, X. Zhao, Z. Ke, Y.K. Lee, "an integrated cmos mems gas flow sensor with detection limit towards micrometer per second," in 2020 IEEE 33nd International Conference on Micro Electro Mechanical Systems (MEMS), 2020, pp. 200-203. (顶会, 优秀学生论文奖获得者)
X. Wang, G. Lim, W. Xu, and Y. Lee, "Sensitivity Improvement of Micro Thermal Convective Accelerometer with Structure Optimization: Theoretical and Experimental Studies," in 2019 IEEE SENSORS, 2019, pp. 1-4. (poster)12. X. Wang, W. Xu, H. Luo, X. Zhao, and Y. Lee, "Theoretical and Experimental Study of z-axis Acceleration Detection of the Micro Thermal Convective Accelerometer," in 2019 IEEE SENSORS, 2019, pp. 1-4. (oral)
X. Wang, W. Xu, Izhar, and Y. Lee, "An Ambient Temperature Compensated Microthermal Convective Accelerometer with High Sensitivity Stability," in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII, 2019, pp. 1827-1830. (poster)
X. Wang, Li, Jinbeiqi, Ahmed, Moaaz, Bermak Amine, Yi-kuen Lee, "Scaling Analysis and Efficient Optimization of Micro Thermal Convective Accelerometers with Excellent Sensitivity using a Validated 1-D Model," presented at the The 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Grand Hyatt Singapore, Singapore, 22 - 26 April 2018, Singapore, 2018. (oral)
W. Xu, X. Wang, B. Mousa, M. Paszkiewicz, and Y. Lee, "Self-Heated Thermoresistive Flow Sensor Coated with Parylene-C for Reliability Enhancement by Using 0.35μM CMOS MEMS Technology," in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019, pp. 1913-1916. (顶会, poster)
W. Xu, X. Wang et al., "A wireless dual-mode micro thermal flow sensor system with extended flow range by using CMOS-MEMS process," in Micro Electro Mechanical Systems (EI, MEMS), 2018 IEEE, 2018, pp. 824-827: IEEE. (顶会，poster)
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