李敏 - 中国地质大学(武汉) - 机械与电子信息学院

个人简介

教授，湖北省人才计划入选者，“地大学者”青年拔尖人才，IEEE Member 出生年月：1990年7月地址：中国地质大学机械与电子信息学院（教二楼）345室主要经历 2021.04-至今，中国地质大学（武汉），机电学院，机械工程系，教授 2017.07-2021.04：中国地质大学（武汉），机电学院，机械工程系，副教授 2012.09-2017.06：清华大学，机械工程专业，获工学博士学位 2008.09-2012.06：华中科技大学，机械设计制造及其自动化专业，获工学学士学位相关研究成果已成功应用于国家02重大专项“极大规模集成电路制造装备及成套工艺”研发的光刻机运动台，助力解决我国“缺芯”之痛。主持国家、湖北省自然科学基金青年项目各1项，主持其他省部级/横向科研项目4项，累计科研经费近200万元；近年来，发表高水平学术论文10余篇，包括IEEE TIE (Web of Science期刊排名：自动化与控制系统领域4/63) 4篇、IEEE TII (Web of Science期刊排名：自动化与控制系统领域3/63) 2篇；授权发明专利3项。招生要求本课题组欢迎热爱科学研究，对机器视觉、先进控制感兴趣，具有良好编程能力与实践动手能力的机械类、控制类、计算机类及相关专业学生加入课题组。招收硕士生和博士生。本课题组研究生有机会前往清华大学集成电路制造装备研究室学习与锻炼。科研项目国家自然科学基金青年项目，基于数据驱动的大行程超精密工作台多变量控制研究（51805496），2019.01-2021.12，27万，主持。湖北省自然科学基金青年项目，光刻机超精密运动台数据驱动多变量控制（2019CFB206），2019.01-2020.12，5万，主持。高校合作项目，数据驱动非线性控制技术及其应用系统开发，2018.08-2021.06，100万，主持。横向课题，三坐标扫描实验台研制，2020.11-2021.11，14万，主持。航天科学技术基金项目，基于动态线性化无模型自适应控制的高超声速飞行器制导控制一体化研究，2018.06-2019.06，8万，主持。中央高校基本科研业务费专项资金资助项目，光刻机超精密工件台运动控制研究（CUG170667），2017.07-2020.07，35万，主持。国家科技重大专项02专项课题，光刻机双扫描硅片台掩模台样机研发与集成（2009ZX02208-001），2012.09-2016.04，参与。国家科技重大专项02专项课题，磁悬浮工件台关键技术研究（2012ZX02702-006），2012.09-2017.07，参与。

研究领域

在精密机电测控领域，围绕集成电路制造装备、数控机床、机器人等中的精密/超精密运动系统，开展机器视觉、精密控制、智能控制、智能制造等方面的研究工作

近期论文

查看导师新发文章（温馨提示：请注意重名现象，建议点开原文通过作者单位确认）

M. Li, C. Mao, Y. Zhu, K. Yang, and X. Li. Data-Based Iterative Dynamic Decoupling Control for Precision MIMO Motion Systems. IEEE Transactions on Industrial Informatics, 2020, 16(3): 1668-1676. (T1, IF: 9.11) M. Li, Y. Zhu, K. Yang, L. Yang, and C. Hu. Data-Based Switching Feedforward Control for Repeating and Varying Tasks: With Application to an Ultraprecision Wafer Stage. IEEE Transactions on Industrial Electronics, 2019, 66(11): 8670-8680. (T1, IF: 7.52) M. Li, Y. Zhu, K. Yang, L. Yang, C. Hu, and H. Mu. Convergence Rate Oriented Iterative Feedback Tuning with Application to an Ultraprecision Wafer Stage. IEEE Transactions on Industrial Electronics, 2019, 66(3): 1993-2003. (T1, IF: 7.52) M. Li, K. Yang, Y. Zhu, H. Mu, and C. Hu. State/Model-Free Variable-Gain Discrete Sliding Mode Control for an Ultraprecision Wafer Stage. IEEE Transactions on Industrial Electronics, 2017, 64(8): 6695-6705. (T1, IF: 7.52) M. Li, Y. Zhu, K. Yang, C. Hu, and H. Mu. An Integrated Model-Data-Based Zero-Phase Error Tracking Feedforward Control Strategy with Application to an Ultraprecision Wafer Stage. IEEE Transactions on Industrial Electronics, 2017, 64(5): 4139-4149. (T1, IF: 7.52) M. Li, Y. Zhu, K. Yang, and C. Hu. A Data-Driven Variable-Gain Control Strategy for an Ultra-Precision Wafer Stage with Accelerated Iterative Parameter Tuning. IEEE Transactions on Industrial Informatics, 2015, 11(5):1179-1189. (T1, IF: 9.11) M. Li, C. Mao, M.-F. Ge, and J. Gan. Data-Driven Iterative Feedforward Control with Rational Parametrization: Achieving Optimality for Varying Tasks. Journal of the Franklin Institute, 2019, 365(12): 6352-6372. (T2, IF: 4.04) M. Li, T. Yan, C. Mao, L. Wen, X. Zhang, and T. Huang. Performance-enhanced iterative learning control using a model‐free disturbance observer. IET Control Theory and Applications, 2021, DOI: 10.1049/cth2.12096. (T2, IF: 3.34) M. Li, S. Tan, J. Xiong, J. Gan, and X. Zhang. Model-free output feedback discrete sliding mode control with disturbance compensation for precision motion systems. IET Control Theory and Applications, 2020, 14(14), 1867-1876. (T2, IF: 3.34) X. Zhang, M. Li, H. Ding, and X. Yao. Data-driven tuning of feedforward controller structured with infinite impulse response filter via iterative learning control. IET Control Theory and Applications, 2019, 13(8): 1062-1070. (T2, IF: 3.34) W. Huang, K. Yang, Y. Zhu, X. Li, H. Mu, and M. Li. Data-driven rational feedforward tuning: With application to an ultraprecision wafer stage. Proceedings of the Institution of Mechanical Engineers, Part I: Journal of Systems and Control Engineering, 2020, 234(6): 748-758. T. Huang, K. Yang, C. Hu, Y. Zhu, and M. Li. Integrated robust tracking controller design for a developed precision planar motor with equivalent disturbances. IET Control Theory and Applications, 2016, 10(9):1009-1017. W. Huang, K. Yang, Y. Zhu, X. Li, H. Mu, and M. Li. Data-driven rational feedforward tuning: With application to an ultraprecision wafer stage. Proceedings of the Institution of Mechanical Engineers, Part I: Journal of Systems and Control Engineering, 2020, 234(6): 748-758. Q. Tang, F. Guo, T. Huang, K. Yang, Y. Zhu, and M. Li. Modal-Decomposition-Dependent State-Space Modeling and Modal Analysis of a Rigid-Flexible, Coupled, Multifreedom Motion System: Theory and Experiment. Shock and Vibration, 2020: 8859222. D. Yu, Y. Zhu, K. Yang, C. Hu, and M. Li. A time-varying Q-filter design for iterative learning control with application to an ultra-precision dual-stage actuated wafer stage. Proceedings of the Institution of Mechanical Engineers, Part I: Journal of Systems and Control Engineering, 2014, 228(9):658-667. M. Li, Y. Zhu, K. Yang, C. Hu, and H. Mu. A Variable-Gain Discrete Sliding Mode Control Strategy with PID-Type Sliding Surface for an Ultra-Precision Wafer Stage. Proceedings of the ASME 2016 International Mechanical Engineering Congress & Exposition, Phoenix, USA, 2016: V04BT05A037.