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个人简介

學歷 密西根大學 美國 電機工程 博士 2004年 ~ 2007年 美國密西根大學 美國 電機工程 碩士 2001年 ~ 2004年 國立台灣大學 台灣 機械工程 碩士 1996年07月 ~ 1998年07月 國立台灣大學 台灣 機械工程 學士 1992年07月 ~ 1996年07月 經歷 國立清華大學 教授 奈微所 教授 2015年08月 ~ 國立清華大學 副教授 奈微所 副教授 2012年08月 ~ 2015年07月 國立清華大學 助理教授 奈微所 助理教授 2008年08月 ~ 2012年07月 榮譽 2013 102年度國科會吳大猷先生紀念獎 科技部 2013 國立清華大學第16屆新進人員研究獎 國立清華大學 2015 第12屆『上銀機械碩士論文獎』佳作獎 上銀科技 2011 國立清華大學工學院第十屆傑出教學獎 國立清華大學工學院 2012 國立清華大學工學院第二屆新進人員研究獎 國立清華大學工學院 2011 2011 Joint Conference of the IEEE International Frequency Control Symposium & European Frequency and Time Forum最佳論文獎 IEEE IFCS 2012 IEEE Sensors Conference最佳學生論文獎第一名 IEEE Sensors Conference 2016 國家晶片中心(CIC)特優設計獎 國家晶片中心 2015 國家晶片中心(CIC)特優設計獎 國家晶片中心 2014 國家晶片中心(CIC)特優設計獎 國家晶片中心 2013 國家晶片中心(CIC)特優設計獎 國家晶片中心 2012 國家晶片中心(CIC)特優設計獎 國家晶片中心 2011 國家晶片中心(CIC)特優設計獎 國家晶片中心 2010 國家晶片中心(CIC)特優設計獎 國家晶片中心 2016 第20屆奈米工程暨微系統技術研討會最佳論文獎 奈米工程暨微系統技術研討會 2015 第19屆奈米工程暨微系統技術研討會最佳論文獎 奈米工程暨微系統技術研討會 2014 第18屆奈米工程暨微系統技術研討會最佳論文獎 奈米工程暨微系統技術研討會 2011 第15屆奈米工程暨微系統技術研討會最佳論文獎 奈米工程暨微系統技術研討會 2013 第20屆「奈米元件技術研討會」的學生論文競賽頭等獎 國家奈米元件實驗室 教師_李昇憲_科技部計劃 2015 應用於無線通訊之全整合式CMOS-MEMS窄頻帶通濾波器 李昇憲 主持人 2015年08月 ~ 2016年07月 科技部 / 2015 微機電感測器與致動器產學聯盟(3/3) 李昇憲 共同主持人 2015年08月 ~ 2016年07月 國科會 / 2014 微機電感測器與致動器產學聯盟(2/3) 李昇憲 主持人 2014年08月 ~ 2015年07月 國科會 / 2014 應用於無線通訊之全整合式CMOS-MEMS窄頻帶通濾波器 李昇憲 主持人 2014年08月 ~ 2015年07月 國科會 / 2014 應用於氣體感測之熱致動式微機電振盪器技術研發(1/3) 李昇憲 主持人 2014年08月 ~ 2015年07月 國科會 / 2013 微機電感測器與致動器產學聯盟(1/3) 李昇憲 共同主持人 2013年08月 ~ 2014年07月 國科會 / 2013 利用CMOS-MEMS平台探討神經細胞之交互作用與行為 李昇憲 共同主持人 2013年08月 ~ 2014年07月 國科會 / 2012 可攜式細胞培養系統之開發--子計畫二:活細胞偵測與篩選系統研發 李昇憲 主持人 2012年08月 ~ 2013年07月 國科會 / 2012 應用於射頻與感測之熱致動式奈微機械共振器研究 李昇憲 主持人 2012年08月 ~ 2013年07月 國科會 / 2011 應用於時脈與射頻之進階式CMOS-MEMS共振器平台 李昇憲 主持人 2011年08月 ~ 2012年07月 國科會 / 2010 異質整合Mixed-signal/MEMS CMOS無線射頻收發機設計研發--子計畫三:可重組式Mixed-signal/MEMS .9G~10GHz頻率合成器設計(2/2) 李昇憲 主持人 2010年08月 ~ 2011年07月 國科會 / 2010 異質整合Mixed-signal/MEMS CMOS無線射頻收發機設計研發--總計畫(2/2) 李昇憲 共同主持人 2010年08月 ~ 2011年07月 國科會 / 2009 異質整合Mixed-signal/MEMS CMOS無線射頻收發機設計研發--總計畫(1/2) 李昇憲 共同主持人 2009年08月 ~ 2010年07月 國科會 / 2009 異質整合Mixed-signal/MEMS CMOS無線射頻收發機設計研發--子計畫三:可重組式Mixed-signal/MEMS .9G~10GHz頻率合成器設計(1/2) 李昇憲 主持人 2009年08月 ~ 2010年07月 國科會 / 2008 應用於射頻無線收發器之超低功率奈微機械共振器 李昇憲 主持人 2008年08月 ~ 2009年07月 國科會

研究领域

1. 射頻微機電(RF MEMS) 2. 微機電製程(Micromachining Technology) 3. 微機電共振器、振盪器、濾波器、混頻濾波器、開關 4. 微機械電路 5. 無線通訊技術與架構 6. CMOS-MEMS整合技術 7. 類比電路與介面電路設計 8. 微型感測器與致動器

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研討會論文 1.S.-S. Li, “A key more-than-Moore technology: CMOS-MEMS resonant transducers,” Proceedings, 16th International Conference on Nanotechnology (IEEE Nano 2016), Sendai, Japan, Aug. 22-25, 2016, pp. 456-459. 2.M.-H. Li, C.-Y. Liu, C.-Y. Chen, and S.-S. Li, “An 8V 50W 1.2MHz CMOS-MEMS oscillator,” Proceedings, 2016 IEEE Int. Frequency Control Symp., New Orleans, LA, May 9-12, 2016. 3.G. Pillai, A. Zope, J. M.-L. Tsai, and S.-S. Li, “3-GHz BAW composite resonators integrated with CMOS in a single-chip configuration,” Proceedings, 2016 IEEE Int. Frequency Control Symp., New Orleans, LA, May 9-12, 2016. 4.W.-C. Chiu, M.-H. Li, C.-Y. Chou, and S.-S. Li, “A ring-down technique implemented in CMOS-MEMS resonator circuits for wide-range pressure sensing applications,” Proceedings, 2016 IEEE Int. Frequency Control Symp., New Orleans, LA, May 9-12, 2016. 5.C.-Y. Liu, M.-H. Li, C.-Y. Chen, and S.-S. Li, “An ovenized CMOS-MEMS oscillator with isothermal resonator and sub-mW heating power,” Proceedings, 2016 IEEE Int. Frequency Control Symp., New Orleans, LA, May 9-12, 2016. 6.W.-S. Tan, W. G. Fang, G. Pillai, C.-C. Chen, C.-Y. Chen, C.-H. Chin, and S.-S. Li, “Fabrication and characterization of lithium-niobate thin film MEMS piezoelectric resonators,” Proceedings, 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), Matsushima Bay and Sendai MEMS City, Japan, 17-20 April, pp. 1249 (4 pages). 7.G. Pillai, W.-S. Tan, C.-C. Chen, and S.-S. Li, “Modeling of zero TCF and maximum bandwidth orientation for lithium tantalate RF MEMS resonators,” Proceedings, 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), Matsushima Bay and Sendai MEMS City, Japan, 17-20 April, pp. 1252 (5 pages). 8.E.-C. Chang, C.-C. Chen, and S.-S. Li, “Real-time mass sensing and dynamic impact monitoring of printed pico-liter droplets realized by a thermal-piezoresistive self-sustained oscillator,” Proceedings, 29th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’16), Shanghai, China, Jan. 24-28, 2016, pp. 1078-1081. 9.F.-Y. Lee, K.-C. Liang, E. Cheng, S.-S. Li, and W. Fang, “Acceleration-insensitive fully-decoupled tuning fork (FDTF) MEMS vibratory gyroscope with 1/hr bias instability,” Proceedings, 29th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’16), Shanghai, China, Jan. 24-28, 2016, pp. 946-949. 10.M.-H. Li, C.-Y. Chen, and S.-S. Li, “A reliable CMOS-MEMS platform for titanium nitride composite (TiN-C) resonant transducers with enhanced electrostatic transduction and frequency stability,” Technical Digest, 2015 IEEE International Electron Devices Meeting (IEDM’15), Washington, DC, Dec. 7-9, 2015, pp. 487-490. 11.H.-C. Su, M.-H. Li, and S.-S. Li, “A single-chip oscillator based on a deep-submicron gap CMOS-MEMS resonator array with high-stiffness driving scheme,” Tech. Dig., 18th Int. Conf. on Solid-State Sensors & Actuators (Transducers’15), Anchorage, Alaska, June 21-25, 2015, pp. 133-136. 12.C.-Y. Chen, M.-H. Li, and S.-S. Li, “Transduction comparison of a resonant transducer realized in a commercially available CMOS-MEMS platform,” Tech. Dig., 18th Int. Conf. on Solid-State Sensors & Actuators (Transducers’15), Anchorage, Alaska, June 21-25, 2015, pp. 145-148. 13.J. Ren, C.-Y. Liu, and S.-S. Li, “A mode-matching 130-kHz ring-coupled gyroscope with 225 ppm initial driving/sensing mode frequency splitting,” Tech. Dig., 18th Int. Conf. on Solid-State Sensors & Actuators (Transducers’15), Anchorage, Alaska, June 21-25, 2015, pp. 1057-1060. 14.C.-Y. Chen, M.-H. Li, and S.-S. Li, “Statistical characterization of a CMOS-MEMS resonator for monolithic ovenized oscillator applications,” Tech. Dig., 18th Int. Conf. on Solid-State Sensors & Actuators (Transducers’15), Anchorage, Alaska, June 21-25, 2015, pp. 1965-1968. 15.J.-H. Chang, C.-S. Li, C.-C. Chen, and S.-S. Li, “Performance evaluation of CMOS-MEMS thermal-piezoresistive resonators in ambient pressure for sensor applications,” Proceedings, the 2015 Joint Conference of the IEEE International Frequency Control Symposium & European Frequency and Time Forum, Denver, Colorado, April 12-16, 2015, pp. 202-204. 16.W.-C. Chiu, M.-H. Li, C.-Y. Chen, and S.-S. Li, “Effects of pressure and bias voltage on the phase noise of CMOS-MEMS oscillators,” Proceedings, 2015 Joint Conference of the IEEE International Frequency Control Symposium & European Frequency and Time Forum, Denver, Colorado, April 12-16, 2015, pp. 155-157. 17.C.-H. Chin, C.-S. Li, M.-H. Li, and S.-S. Li, “A CMOS-MEMS arrayed RGFET oscillator using a band-to-band tunneling bias scheme,” Proceedings, 28th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’15), Estoril, Portugal, Jan. 18-22, 2015, pp. 988-991. 18.M.-H. Li, C.-S. Li, and S.-S. Li, “Exploring the Q-factor limit of temperature compensated CMOS-MEMS resonators,” Proceedings, 28th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’15), Estoril, Portugal, Jan. 18-22, 2015, pp. 853-856. 19.M.-H. Li, C.-Y. Chen, C.-H. Chin, C.-S. Li, and S.-S. Li, “Optimizing the close-to-carrier phase noise of monolithic CMOS-MEMS oscillators using bias-dependent nonlinearity,” Technical Digest, 2014 IEEE International Electron Devices Meeting (IEDM’14), San Francisco, CA, Dec. 15-17, 2014, pp. 558-561. 20.K.-H. Li, C.-C. Chen, M.-H. Li, and S.-S. Li, “A self-sustained nanomechanical thermal-piezoresistive oscillator with ultra-low power consumption,” Technical Digest, 2014 IEEE International Electron Devices Meeting (IEDM’14), San Francisco, CA, Dec. 15-17, 2014, pp. 554-557. 21.Y.-J. Liao, T.-W. Kuo, and S.-S. Li, “Design and characterization of CMOS-MEMS capacitive micromachined ultrasonic transducers,” Proceedings, 8th International Conference on Nano/Molecular Medicine and Engineering (IEEE-NanoMed), Kaohsiung, Taiwan, Nov. 9-12, 2014, pp. 103-104. 22.C.-H. Chin and S.-S. Li, “A CMOS-MEMS arrayed RGFET,” Proceedings, 2014 IEEE Int. Frequency Control Symp., Taipei, Taiwan, May 19-22, 2014, pp. 325-326. 23.M.-H. Li, C.-Y. Chen, and S.-S. Li, “An experimental investigation on the Q-boosted CMOS-MEMS flexural-mode resonator circuits,” Proceedings, 2014 IEEE Int. Frequency Control Symp., Taipei, Taiwan, May 19-22, 2014, pp. 327-328. 24.C.-S. Li, J. Lee, Z. Wang, M.-H. Li, C.-H. Chin, S.-S. Li, P. X.-L. Feng, “Multimode characteristics of high-frequency CMOS-MEMS resonators,” Proceedings, 2014 IEEE Int. Frequency Control Symp., Taipei, Taiwan, May 19-22, 2014, pp. 478-480. 25.C.-S. Li, J. Lee, Z. Wang, M.-H. Li, C.-H. Chin, S.-S. Li, P. X.-L. Feng, “Exploring parametric resonance effects in bulk-mode CMOS-MEMS resonators,” Proceedings, 2014 IEEE Int. Frequency Control Symp., Taipei, Taiwan, May 19-22, 2014, pp. 329-331. 26.C.-Y. Chen, M.-H. Li, C.-H. Chin, C.-S. Li, and S.-S. Li, “Combined electrical and mechanical coupling for mode-reconfigurable CMOS-MEMS filters,” Proceedings, 27th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’14), San Francisco, CA, Jan. 26-30, 2014, pp. 1249-1252. 27.M.-H. Li, C.-Y. Chen, C.-S. Li, C.-H. Chin, C.-C. Chen, and S.-S. Li, “Foundry-CMOS integrated oscillator circuits based on ultra-low power ovenized CMOS-MEMS resonators,” Technical Digest, 2013 IEEE International Electron Devices Meeting (IEDM’13), Washington, DC, Dec. 9-11, 2013, pp. 475-478. 28.S.-S. Li, “CMOS-MEMS resonators and their applications,” Proceedings, the 2013 IEEE UFFC Joint Symposia, Prague, Czech Republic, July 21-25, 2013, pp. 915-921. (Invited) 29.M.-H. Li, C.-Y. Chen, C.-S. Li, C.-H. Chin, and S.-S. Li, “Enhanced temperature sensitivity of a single CMOS-MEMS resonator via resonant modes in orthogonal axes,” Proceedings, the 2013 IEEE UFFC Joint Symposia, Prague, Czech Republic, July 21-25, 2013, pp. 539-542. 30.C.-S. Li, M.-H. Li, C.-H. Chin, C.-Y. Chen, P. X.-L. Feng, and S.-S. Li, “A piezoresistive CMOS-MEMS resonator with high Q and low TCf,” Proceedings, the 2013 IEEE UFFC Joint Symposia, Prague, Czech Republic, July 21-25, 2013, pp. 425-428. 31.W. Fang, S.-S. Li, C.-L. Cheng, C.-I. Chang, W.-C. Chen, Y.-C. Liu, M.-H. Tsai, and C. Sun, “CMOS MEMS: A key technology towards the “More than Moore” era,” Dig. of Tech. Papers, the 17th Int. Conf. on Solid-State Sensors & Actuators (Transducers’13), Barcelona, Spain, June 16-20, 2013, pp. 2513-2518. 32.C.-H. Chin, M.-H. Li, and S.-S. Li, “A CMOS-MEMS resonant-gate transistor,” Dig. of Tech. Papers, the 17th Int. Conf. on Solid-State Sensors & Actuators (Transducers’13), Barcelona, Spain, June 16-20, 2013, pp. 2284-2287. 33.C.-Y. Chen, M.-H. Li, C.-S. Li, and S.-S. Li, “Design and characterization of mechanically-coupled CMOS-MEMS filters,” Dig. of Tech. Papers, the 17th Int. Conf. on Solid-State Sensors & Actuators (Transducers’13), Barcelona, Spain, June 16-20, 2013, pp. 2288-2291. 34.H. Zhu, C.-H. Chuang, C.-S. Li, M.-H. Li, J. E.-Y. Lee, and S.-S. Li, “The effects of tight capacitive coupling on phase noise performance: A LAMÉ-mode MEMS oscillator study,” Dig. of Tech. Papers, the 17th Int. Conf. on Solid-State Sensors & Actuators (Transducers’13), Barcelona, Spain, June 16-20, 2013, pp. 2304-2307. 35.W.-C. Chen, M.-H. Li, Y.-C. Liu, D. Weinstein, W. Fang, and S.-S. Li, “Fully differential CMOS-MEMS square-plate oxide resonators with embedded poly-silicon electrodes,” Dig. of Tech. Papers, the 17th Int. Conf. on Solid-State Sensors & Actuators (Transducers’13), Barcelona, Spain, June 16-20, 2013, pp. 2292-2295. 36.Y.-C. Liu, M.-H. Tsai, S.-S. Li, and W. Fang, “A fully-differential, multiplex-sensing interface circuit monolithically integrated with tri-axis pure oxide capacitive CMOS-MEMS accelerometers,” Dig. of Tech. Papers, the 17th Int. Conf. on Solid-State Sensors & Actuators (Transducers’13), Barcelona, Spain, June 16-20, 2013, pp. 610-613. 37.S.-S. Li, “Advances of CMOS-MEMS technology for resonator applications,” Proceedings, 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS’13), Suzhou, China, April 7-10, 2013, pp. 520-523. (Invited) 38.C.-C. Chen, H.-T. Yu, K.-H. Lee, and S.-S. Li, “Enhancement of temperature stability via constant structural-resistance control for MEMS resonators,” Proceedings, 26th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’13), Taipei, Taiwan, Jan. 20-24, 2013, pp. 765-768. 39.M.-H. Li, C.-S. Li, C.-H. Chin, C.-Y. Chen, and S.-S. Li, “An ultra-low power ovenized CMOS-MEMS resonator monolithically integrated with interface circuits,” Proceedings, 26th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’13), Taipei, Taiwan, Jan. 20-24, 2013, pp. 753-756. 40.T.-T. Chen, J.-C. Huang, Y.-C. Peng, C.-H. Chu, C.-H. Lin, E. Cheng, and S.-S. Li, “A 17.6-MHz 2.5V ultra-low polarization voltage MEMS oscillator using an innovative high gain-bandwidth fully differential transimpedance voltage amplifier,” Proceedings, 26th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’13), Taipei, Taiwan, Jan. 20-24, 2013, pp. 741-744. 41.V. Pachkawade, C.-S. Li, and S.-S. Li, “A fully-differential CMOS-MEMS resonator integrated with an on-chip amplifier,” Proceedings, IEEE Sensors Conference, Taipei, Taiwan, Oct. 28-31, 2012, pp. 1-4. 42.H.-H. Lai, W.-C. Chen, and S.-S. Li, “A low-actuation voltage design for RF CMOS-MEMS switches,” Proceedings, IEEE Sensors Conference, Taipei, Taiwan, Oct. 28-31, 2012, pp. 1-4. 43.C.-S. Li, M.-H. Li, and S.-S. Li, “Differential measurement of piezoresistive transduction for silicon-based MEMS resonators,” Proceedings, 2012 IEEE Int. Frequency Control Symp. (IFCS’12), Baltimore, Maryland, May 21-24, 2012, pp. 593-596. 44.C.-C. Chen, M.-H. Li, W.-C. Chen, H.-T. Yu, and S.-S. Li, “Thermally-actuated and piezoresistively-sensed CMOS-MEMS resonator array using differential-mode operation,” Proceedings, 2012 IEEE Int. Frequency Control Symp. (IFCS’12), Baltimore, Maryland, May 21-24, 2012, pp. 443-446. 45.W.-C. Chen, W. Fang, and S.-S. Li, “VHF CMOS-MEMS oxide resonators with Q > 10,000,” Proceedings, 2012 IEEE Int. Frequency Control Symp. (IFCS’12), Baltimore, Maryland, May 21-24, 2012, pp. 581-584. 46.M.-H. Li, C.-S. Li, L.-J. Hou, Y.-C. Liu, and S.-S. Li, “A 1.57mW 99dB CMOS transimpedance amplifier for VHF micromechanical reference oscillators,” Proceedings, 2012 IEEE International Symposium on Circuits and Systems (ISCAS’12), Seoul, Korea, May 20-23, pp. 209-212. 47.L.-J. Hou, C.-S. Li, and S.-S. Li, “High-stiffness-driven micromechanical resonator oscillator with enhanced phase noise performance,” Proceedings, 25th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’12), Paris, France, Jan. 29-Feb. 2, 2012, pp. 700-703. 48.C.-S. Li, C.-H. Chin, and S.-S. Li, “Capacitively-driven and piezoresistively-sensed CMOS-MEMS resonators,” Proceedings, 25th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’12), Paris, France, Jan. 29-Feb. 2, 2012, pp. 539-542. 49.C.-C. Chen, H.-T. Yu, and S.-S. Li, “A balanced measurement and characterization technique for thermal-piezoresistive micromechanical resonators,” Proceedings, 25th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’12), Paris, France, Jan. 29-Feb. 2, 2012, pp. 377-380. 50.T.-H. Yen, M.-H. Tsai, C.-I Chang, Y.-C. Liu, S.-S. Li, R. Chen, and W. Fang, “Improvement of CMOS-MEMS accelerometer using the symmetric layers stacking design,” Proceedings, IEEE Sensors Conference, Limerick, Ireland, Oct. 28-31, 2011, pp. 145-148. 51.N. Bhalla, S.-S. Li, and D. W.-Y. Chung, “Finite element analysis of MEMS square piezoresistive accelerometer designs with low crosstalk,” Proceedings, 2011 International Semiconductor Conference (CAS’11), Sinaia, Romania, Oct.17-19, 2011, pp. 353-356. 52.C.-S. Li and S.-S. Li, “Capacitive gap-aspect-ratio enhancement using advanced CMOS process for CMOS-MEMS resonators,” Proceedings, 9th International Workshop on High Aspect Ratio Micro Structure Technology (HARMST’11), Hsinchu, Taiwan, June 12-18, 2011, pp. 47-48. 53.Y.-C. Liu, M.-H. Tsai, W.-C. Chen, S.-S. Li, and W. Fang, “High-Q, large-stopband-rejection integrated CMOS-MEMS oxide resonators with embedded metal electrodes,” Dig. of Tech. Papers, the 16th Int. Conf. on Solid-State Sensors & Actuators (Transducers’11), Beijing, China, June 5-9, 2011, pp. 934-937. 54.M.-H. Li, W.-C. Chen, and S.-S. Li, “CMOS-MEMS transverse-mode square plate resonator with high Q and low motional impedance,” Dig. of Tech. Papers, the 16th Int. Conf. on Solid-State Sensors & Actuators (Transducers’11), Beijing, China, June 5-9, 2011, pp. 1500-1503. 55.M.-H. Li, W.-C. Chen, and S.-S. Li, “Mechanically-coupled CMOS-MEMS free-free beam resonator arrays with two-port configuration,” Proceedings, 2011 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum (IFCS’11), San Francisco, May 2-5, 2011, pp. 1-4. 56.W.-C. Chen, W. Fang, and S.-S. Li, “Quasi-linear frequency tuning for CMOS-MEMS resonators,” Proceedings, 24th IEEE Int. IEEE Micro Electro Mechanical Systems Conf. (MEMS’11), Cancun, Mexico, January 23-27, 2011, pp.340-343. 57.W.-C. Chen, M.-H. Li, W. Fang, and S.-S. Li, “High-Q integrated CMOS-MEMS resonators with deep-submicron gaps,” Proceedings, 2010 IEEE Int. Frequency Control Symp. (IFCS’10), Newport Beach, California, June 2-4, 2010, pp. 340-343. 58.W.-C. Chen, C.-S. Chen, K.-A. Wen, L.-S Fan, W. Fang, and S.-S. Li, “A generalized foundry CMOS platform for capacitively-transduced resonators monolithically integrated with amplifiers,” Proceedings, 23rd Int. IEEE Micro Electro Mechanical Systems Conf. (MEMS’10), Hong Kong, Jan. 24-28, 2010, pp. 204-207. 59.W.-C. Chen, M.-H. Li, W. Fang, and S.-S. Li, “Realizing deep-submicron gap spacing for CMOS-MEMS resonators with frequency tuning capability via modulated boundary conditions,” Proceedings, 23rd Int. IEEE Micro Electro Mechanical Systems Conf. (MEMS’10), Hong Kong, Jan. 24-28, 2010, pp. 735-738. 60.Y. Lin, W.-C. Li, I. Gurin, S.-S. Li, Y.-W. Lin, Z. Ren, B. Kim, and C. T.-C. Nguyen, “Digitally-Specified Micromechanical Displacement Amplifiers,” Dig. of Tech. Papers, the 15th Int. Conf. on Solid-State Sensors & Actuators (Transducers’09), Denver, Colorado, June 21-25, 2009, pp. 781-784. 61.S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, “An MSI micromechanical differential disk-array filter,” Dig. of Tech. Papers, the 14th Int. Conf. on Solid-State Sensors & Actuators (Transducers’07), Lyon, France, June 10-14, 2007, pp. 307-311. 62.W.-L. Huang, S.-S. Li, Z. Ren, and C. T.-C. Nguyen, “UHF nickel micromechanical spoke-supported ring resonators,” Dig. of Tech. Papers, the 14th Int. Conf. on Solid-State Sensors & Actuators (Transducers’07), Lyon, France, June 10-14, 2007, pp. 323-326. 63.Y.-W. Lin, Y. Lin, S.-S. Li, Z. Ren, and C. T.-C. Nguyen, “Quality factor boosting via mechanically-coupled arraying,” Dig. of Tech. Papers, the 14th Int. Conf. on Solid-State Sensors & Actuators (Transducers’07), Lyon, France, June 10-14, 2007, pp. 2453-2456. 64.S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, “A micromechanical parallel-class disk-array filter,” Proceedings, 2007 IEEE Int. Frequency Control Symp. (IFCS’07), Geneva, Switzerland, May 29-June 1, 2007, pp. 1356-1361. 65.L.-W. Hung, C. T.-C. Nguyen, Y. Xie, Y.-W. Lin, S.-S. Li, and Z. Ren, “UHF micromechanical compound-(2,4) mode ring resonators with solid-gap transducers,” Proceedings, 2007 IEEE Int. Frequency Control Symp. (IFCS’07), Geneva, Switzerland, May 29-June 1, 2007, pp. 1370-1375. 66.S.-S. Li, Y.-W. Lin, Z. Ren, and Clark T.-C. Nguyen, “Disk-array design for suppression of unwanted modes in micromechanical composite-array filters,” Proceedings, 19th Int. IEEE Micro Electro Mechanical Systems Conf. (MEMS’06), Istanbul, Turkey, Jan. 22-26, 2006, pp. 866-869. 67.Y.-W. Lin, S.-S. Li, Z. Ren, and Clark T.-C. Nguyen, “Low phase noise array-composite micromechanical wine-glass disk oscillator,” Technical Digest, 2005 IEEE International Electron Devices Meeting (IEDM’05), Washington, DC, Dec. 5-7, 2005, pp. 287-290. 68.S.-S. Li, Y.-W. Lin, Y. Xie, Z. Ren, and Clark T.-C. Nguyen, “Small % bandwidth design of a 431-MHz notched-coupled micromechanical hollow-disk ring mixer-filter,” Proceedings, IEEE International Ultrasonics Symposium (IUS’05), Rotterdam, the Netherlands, Sept. 18-21, 2005, pp. 1295-1298. 69.S.-S. Li, Y.-W. Lin, Y. Xie, Z. Ren, and Clark T.-C. Nguyen, “Charge-based vibrating micromechanical resonators,” Proceedings, IEEE International Ultrasonics Symposium (IUS’05), Rotterdam, the Netherlands, Sept. 18-21, 2005, 1596-1599. 70.Y.-W. Lin, S.-S. Li, Y. Xie, Z. Ren, and Clark T.-C. Nguyen, “Third-order intermodulation distortion in capacitively-driven VHF micromechanical resonators,” Proceedings, IEEE International Ultrasonics Symposium (IUS’05), Rotterdam, the Netherlands, Sept. 18-21, 2005, pp. 1592-1595. 71.S.-S. Li, Y.-W. Lin, Z. Ren, and Clark T.-C. Nguyen, “Self-switching vibrating micromechanical filter bank,” Proceedings, Joint IEEE International Frequency Control /Precise Time and Time Interval Symposium (IFCS’05), Vancouver, Canada, Aug. 29-31, 2005, pp. 135-141. 72.Y.-W. Lin, S.-S. Li, Z. Ren, and Clark T.-C. Nguyen, “Vibrating micromechanical resonators with solid dielectric capacitive-transducer gaps,” Proceedings, Joint IEEE International Frequency Control /Precise Time and Time Interval Symposium (IFCS’05), Vancouver, Canada, Aug. 29-31, 2005, pp. 128-134. 73.Y. Xie, S.-S. Li, Y.-W. Lin, Z. Ren, and Clark T.-C. Nguyen, “Spurious mode suppression in UHF micromechanical extensional wine-glass ring resonators,” Proceedings, 18th Int. IEEE Micro Electro Mechanical Systems Conf. (MEMS’05), Miami Beach, Florida, Jan. 30-Feb. 3, 2005, pp. 219-222. 74.M. A. Abdelmoneum, M. U. Demirci, S.-S. Li, and C. T.-C. Nguyen, “Post-fabrication laser trimming of micromechanical filters,” Technical Digest, IEEE Int. Electron Devices Mtg. (IEDM’04), San Francisco, California, Dec. 13-15, 2004, pp. 32-49. 75.S.-S. Li, M. U. Demirci, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, “Bridged micromechanical filters,” Proceedings, IEEE Int. Ultrasonics, Ferroelectrics, and Frequency Control 50th Anniv. Joint Conf. (IFCS’04), Montreal, Canada, Aug. 24-27, 2004, pp. 280-286. 76.Y.-W. Lin, S. Lee, S.-S. Li, Y. Xie, Z. Ren, and C. T.-C. Nguyen, “60-MHz wine glass micromechanical disk reference oscillator,” Digest of Technical Papers, 2004 IEEE International Solid-State Circuits Conference (ISSCC’04), San Francisco, California, Feb. 15-19, 2004, pp. 322-323. 77.S.-S. Li, Y.-W. Lin, Y. Xie, Z. Ren, and Clark T.-C. Nguyen, “Micromechanical hollow-disk ring resonators,” Proceedings, 17th Int. IEEE Micro Electro Mechanical Systems Conf. (MEMS’04), Maastricht, The Netherlands, Jan. 25-29, 2004 , pp. 821-824. 78.Y. Xie, S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, “UHF micromechanical extensional wine-glass mode ring resonators,” Technical Digest, 2003 IEEE International Electron Devices Meeting (IEDM’03), Washington, DC, Dec. 8-10, 2003, pp. 953-956. SCI期刊論文 1.M.-H. Li, C.-Y. Chen, C.-Y. Liu, and S.-S. Li, “A sub-150W BEOL-embedded CMOS-MEMS oscillator with a 138dB ultra-low-noise TIA,” IEEE Electron Device Letters (EDL), vol. 37, no. 5, pp. 648-651, May 2016. 2.C.-Y. Chen, M.-H. Li, C.-H. Chin, and S.-S. Li, “Implementation of a CMOS-MEMS filter through a mixed electrical and mechanical coupling scheme,” IEEE/ASME J. Microelectromech. Syst. (JMEMS), vol. 25, no. 2, pp. 262-274, April 2016. 3.T. L. Naing, T. Rocheleau, Z. Ren, S.-S. Li, and C. T.-C. Nguyen, “High-Q UHF spoke-supported ring resonators,” IEEE/ASME J. Microelectromech. Syst. (JMEMS), vol. 25, no. 1, pp. 11-29, Feb. 2016. 4.C.-H. Chin, M.-H. Li, C.-Y. Chen, Y.-L. Wang, and S.-S. Li, “A CMOS-MEMS arrayed RGFET oscillator,” J. Micromech. Microeng. (JMM), vol. 25, pp. 115025, Oct. 2015. (Highlights of 2015) 5.M.-H. Li, C.-Y. Chen, W.-C. Chen, and S.-S. Li, “A vertically-coupled MEMS resonator pair for oscillator applications,” IEEE/ASME J. Microelectromech. Syst. (JMEMS), vol. 24, no. 3 pp. 528-530, June 2015. 6.S. Wang, B. Bahr, W.-C. Chen, W. Fang, S.-S. Li, and D. Weinstein, “Temperature coefficient of frequency modeling for CMOS-MEMS bulk mode composite resonator,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control (T-UFFC), vol. 62, no. 6, pp. 1166-1178, June 2015. 7.M.-H. Li, C.-Y. Chen, C.-S. Li, C.-H. Chin, and S.-S. Li, “A monolithic CMOS-MEMS oscillator based on an ultra-low-power ovenized micromechanical resonator,” IEEE/ASME J. Microelectromech. Syst. (JMEMS), vol. 24, no. 2 pp. 360-372, April 2015. 8.M.-H. Li, C.-Y. Chen, C.-S. Li, C.-H. Chin, and S.-S. Li, “Design and characterization of a dual-mode CMOS-MEMS resonator for TCF manipulation,” IEEE/ASME J. Microelectromech. Syst. (JMEMS), vol. 24, no. 2, pp. 446-457, April 2015. 9.J.-Y. Fang, C.-H. Chu, I. Sarang, K.-C. Fang, C.-P. Hsu, Y.-F. Huang, C.-H. Hsu, C.-C. Chen, S.-S. Li, J. A. Yeh, D.-J. Yao, Y.-L. Wang, “Electronic hydroxyl radical microsensors based on the conductivity change of polyaniline,” Sensors and Actuators B: Chemical, vol. 208, pp. 99-105, March 2015. 10.C.-S. Li, M.-H. Li, C.-C. Chen, C.-H. Chin, and S.-S. Li, “A low voltage CMOS-MicroElectroMechanical Systems thermal-piezoresistive resonator with Q > 10,000,” IEEE Electron Device Letters (EDL), vol. 36, no. 2, pp. 192-194, Feb. 2015. 11.C.-S. Li, M.-H. Li, and S.-S. Li, “Differentially piezoresistive transduction of high-Q encapsulated SOI-MEMS resonators with sub-100nm gaps,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control (T-UFFC), vol. 62, no. 1, pp. 220-229, Jan. 2015. 12.K.-C. Fang, C.-H. Chu, C.-P. Hsu, Y.-W. Kang, J.-Y. Fang, C.-H. Hsu, Y.-F. Huang, C.-C. Chen, S.-S. Li, J. A. Yeh, D.-J. Yao, and Y.-L. Wang, “Cost-effective and highly sensitive cholesterol microsensors with fast response based on the enzyme-induced conductivity change of polyaniline,” Applied Physics Letters (APL), vol. 105, pp. 113304, Sept. 2014. 13.C.-Y. Chen, M.-H. Li, C.-S. Li, S.-S. Li, “Design and characterization of mechanically-coupled CMOS-MEMS filters for channel-select applications,” Sensors and Actuators A: Physical, vol. 216, pp. 394-404, Sept. 2014. 14.C.-H. Chin, C.-S. Li, M.-H. Li, Y.-L. Wang, and S.-S. Li, “Fabrication and characterization of a charge-biased CMOS-MEMS resonant gate field effect transistor,” J. Micromech. Microeng. (JMM), vol. 24, pp. 095005, July 2014. (Highlights of 2014) 15.K.-C. Fang, C.-P. Hsu, Y.-W. Kang, J.-Y. Fang, C.-C. Huang, C.-H. Hsu, Y.-F. Huang, C.-C. Chen, S.-S. Li, J. A. Yeh, D.-J. Yao, and Y.-L. Wang, “Realization of an ultra-sensitive hydrogen peroxide sensor with conductance change of horseradish peroxidase-immobilized polyaniline and investigation of the sensing mechanism,” Biosensors and Bioelectronics, vol. 55, pp. 294-300, May 2014. 16.Y.-R. Hsu, Y.-W. Kang, J.-Y. Fang, G.-Y. Lee, J.-I. Chyi, C.-k. Chang, C.-C. Huang, C.-P. Hsu, T.-h. Huang, Y.-F. Huang, Y.-C. Sun, C.-H. Hsu, C.-C. Chen, S.-S. Li, J. A. Yeh, D.-J. Yao, F. Ren, and Y.-L. Wang, “Investigation of C-terminal domain of SARS nucleocapsid protein–Duplex DNA interaction using transistors and binding-site models,” Sensors and Actuators B: Chemical, vol. 193, pp. 334- 339, March 2014. 17.C.-S. Li, M.-H. Li, C.-H. Chin, and S.-S. Li, “Differentially piezoresistive sensing for CMOS-MEMS resonators,” IEEE/ASME J. Microelectromech. Syst. (JMEMS), vol. 22, no. 6, pp. 1361-1372, Dec. 2013. 18.J.-Y. Fang, G.-Y. Lee, J.-I. Chyi, C.-P. Hsu, Y.-W. Kang, K.-C. Fang, W.-L. Kao, D.-J. Yao, C.-H. Hsu, Y.-F. Huang, C.-C. Chen, S.-S. Li, J.-A. Yeh, F. Ren, and Y.-L. Wang, “Viscosity-dependent drain current noise of AlGaN/GaN high electron mobility transistor in polar liquids,” J. Appl. Phys., vol. 114, 204503, Nov. 2013. 19.Y.-C. Liu, M.-H. Tsai, W.-C. Chen, M.-H. Li, S.-S. Li, and W. Fang, “Temperature-compensated CMOS-MEMS oxide resonators,” IEEE/ASME J. Microelectromech. Syst. (JMEMS), vol. 22, no. 5, pp. 1054-1065, Oct. 2013. 20.S.-S. Li and C.-M. Cheng, “Analogy among microfluidics, micromechanics, and microelectronics,” Lab on a Chip, vol. 13, pp. 3782-3788, Oct. 2013. 21.V. Pachkawade, M.-H. Li, C. S. Li, and S.-S. Li, “A CMOS-MEMS resonator integrated system for oscillator application,” IEEE Sensors Journal, vol. 13, no. 8, pp. 2882-2889, Aug. 2013. 22.C.-C. Huang, G.-Y. Lee, J.-I. Chyi, H.-T. Cheng, C.-P. Hsu, Y.-R. Hsu, C.-H. Hsu, Y.-F. Huang, Y.-C. Sun, C.-C. Chen, S.-S. Li, J. A. Yeh, D.-J. Yao, F. Ren, Y.-L. Wang, “AlGaN/GaN high electron mobility transistors for protein–peptide binding affinity study,” Biosensors and Bioelectronics, vol. 41, pp. 717-722, March 2013. 23.M.-H. Li, W.-C. Chen, and S.-S. Li, “Realizing deep-submicron gap spacing for CMOS-MEMS resonators,” IEEE Sensors Journal, vol. 12, no. 12, pp. 3399-3407, Dec. 2012. 24.Y.-C. Lee, M.-H. Li, Y. T. Cheng, W. Hsu, and S.-S. Li, “Electroplated Ni-CNT nanocomposite for micromechanical resonator applications,” IEEE Electron Device Letters (EDL), vol. 33, no. 6, pp. 872-874, June 2012. 25.W.-C. Chen, W. Fang, and S.-S. Li, “High-Q integrated CMOS-MEMS resonators with deep-submicron gaps and quasi-linear frequency tuning,” IEEE/ASME J. Microelectromech. Syst. (JMEMS), vol. 21, no. 3, pp. 688-701, June 2012. 26.W.-C. Chen, M.-H. Li, Y.-C. Liu, W. Fang, and S.-S. Li, “A fully-differential CMOS-MEMS DETF oxide resonator with Q > 4,800 and Positive TCF,” IEEE Electron Device Letters (EDL), vol. 33, no. 5, pp. 721-723, May 2012. 27.L.-J. Hou and S.-S. Li, “High-stiffness driven micromechanical resonators with enhanced power handling,” Applied Physics Letters (APL), vol. 100, no. 13, pp. 131908, March 2012. (Selected for the issue of Virtual Journal of Nanoscale Science & Technology) 28.M.-H. Li, W.-C. Chen, and S.-S. Li, “Mechanically-coupled CMOS-MEMS free-free beam resonator arrays with enhanced power handling capability,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control (T-UFFC), vol. 59, no. 3, pp. 346-357, March 2012. 29.C.-S. Li, L.-J. Hou, and S.-S. Li, “Advanced CMOS-MEMS resonator platform,” IEEE Electron Device Letters (EDL), vol. 33, no. 2, pp. 272-274, Feb. 2012. 30.W.-C. Chen, W. Fang, and S.-S. Li, “A generalized CMOS-MEMS platform for micromechanical resonators monolithically integrated with circuits,” J. Micromech. Microeng. (JMM), vol. 21, no. 6, pp. 065012, May 2011. 31.C.-H. Chin, T.-F. Lu, J.-C. Wang, J.-H. Yang, C.-E. Lue, C.-M. Yang, S.-S. Li, and C.-S. Lai, “Effects of CF4 Plasma Treatment on pH and pNa Sensing Properties of Light-Addressable Potentiometric Sensor with a 2-nm-Thick Sensitive HfO2 Layer Grown by Atomic Layer Deposition,” Japanese Journal of Applied Physics (JJAP), vol. 50, no. 4, pp. 04DL06-1-5, April 2011. 32.Y. Xie, S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, “1.52-GHz micromechanical extensional wine-glass mode ring resonators,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control (T-UFFC), vol. 55, no. 4, pp. 890-907, April 2008. 33.Y.-W. Lin, S. Lee, S.-S. Li, Y. Xie, Z. Ren, and C. T.-C. Nguyen, “Series-resonant VHF micromechanical resonator reference oscillators,” IEEE J. Solid-State Circuits (JSSC), vol. 39, no. 12, pp. 2477-2491, Dec. 2004.

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