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个人简介

2008年获中科院上海光机所光学工程博士学位,2008年-2017年在上海微电子装备有限公司工作,2017年进入复旦大学工研院,作为负责人成功研制“0.15nm测量分辨率的双频激光干涉仪”产品,年产值三千多万元,成功应用于光刻机、超精密位移检测等领域,具有丰富的产品开发及工程经验。发表论文18篇,申请专利24项,授权专利9项,参与编写《光子学技术与应用》(第十五分篇“激光加工技术”)。

研究领域

主要从事超精密光电检测技术研究及产品开发

近期论文

查看导师新发文章 (温馨提示:请注意重名现象,建议点开原文通过作者单位确认)

张志平,程兆谷,覃兆宇,朱健强. 加速度对激光双频干涉仪测量误差的影响,中国激光,2007, 34(5) Zhiping Zhang, Zhaogu Cheng, Zhaoyu Qin, Jianqiang Zhu. Measuring of the maximum measurable velocity for dual-frequency laser interferometer,Chinese Optics Letters,2007, 5(4) Zhiping Zhang, Zhaogu Cheng, Zhaoyu Qin, Jianqiang Zhu. Modeling and simulating of the second-order Doppler error of laser dual-frequency interferometer,Measurement Science and Technology,2007(18) Zhiping Zhang, Zhaogu Cheng, Zhaoyu Qin, Jianqiang Zhu. The micro-gal absolute gravimeter based on high precision heterodyne interferometer,Chinese Optics Letters,2007, 5(6) Zhiping Zhang, Zhaogu Cheng, Zhaoyu Qin, Jianqiang Zhu. The Second-order Doppler Error of Laser Dual-frequency Interferometer,LPM2007 Zhiping Zhang, Zhaogu Cheng, Zhaoyu Qin, Jianqiang Zhu. A novel optical subdivision method for dual-frequency interferometer, Opt. Int. J. Light Electron. Opt. 2007 Zhaogu Cheng, Zhiping Zhang, Jianqiang Zhu.“Self-adaptive control optical systems for long-distance flying optics” Applied Optics, 2006, 45(18) Zhaogu Cheng, Zhiping Zhang,“Study on hybrid laser welding with novel self-adaptive optical device for shipbuilding applications”. LAMP2006, Invited paper. 2006, Kyoto, Japan

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