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个人简介

教育经历 1997.72001.6威尔大学半导体材料博士 1985.81987.3大连理工大学半导体物理硕士 1978.81982.8大连理工大学物理学士 工作经历 2007.6至今大连理工大学机械工程学院教授 2003.72007.6伦敦帝国学院研究员 1982.62003.7大连理工大学物理系讲师副教授 1973.121978.7大连航务三处工人 1970.91973.12辽宁省盘锦地区知青

研究领域

微/纳机电系统(MEMS),微纳加工技术,半导体材料、器件与集成电路,光学仪器与测试计量技术。 主要研究内容:①跨尺度微纳器件设计理论与制造技术;②微压电喷墨打印技术;③电液动力微纳直写打印技术;④微纳流控生物芯片设计与制造。

近期论文

查看导师新发文章 (温馨提示:请注意重名现象,建议点开原文通过作者单位确认)

Yang, Xue,Jiang, Xinyan,Yin, Zhifu,Chen, Kai,Cheng, E.,Zou, Helin,Wang, Dong F..An economic and concise method to solve nozzle clogging issue during electro hydrodynamic print...[J],INTERNATIONAL JOURNAL OF MODERN PHYSICS B,2019,33(23) Yang, Zheng,Wang, Qiusen,Qi, Liping,Wang, Xing,Li, Kehong,Chen, Da,Li, Chen,Zou, Helin.Double-layer resist method to improve descum result when removing negative photoresist[J],MICRO & NANO LETTERS,2019,14(6):694-697 Sun, Lei,Liu, Lingpeng,Qi, Liping,Zhou, Jiangang,Yin, Zhifu,Wu, Dongjiang,Zou, Helin.A new low-cost fabrication method of SU-8 micro-nano channels and needle tip in electro-hydrody...[J],JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2018,28(11) Wang, Fuan,Zhou, Jiangang,Wang, Xing,Chen, Da,Wang, Qiusen,Dou, Jiao,Li, Qi,Zou, Helin.Effect of Ce doping on crystalline orientation, microstructure, dielectric and ferroelectric pr...[J],JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS,2018,29(21):18668-18673 Xiao, Xiaolei,Wang, Xing,Chen, Da,Dou, Jiao,Wang, Shangfei,Zou, Helin.A waveform design method for piezoelectric inkjet printhead with Doppler vibration test and num...[J],MICROELECTRONIC ENGINEERING,2018,196:13-19 Wang, Xing,Xiao, Xiaolei,Qi, Liping,Wang, Qiusen,Dou, Jiao,Zou, Helin.Effects of the 'spring structure' on the performance of a vibrating plate of the piezoelectric ...[J],MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,2018,24(7):2949-2956 黎晨,王秋森,王兴,王上飞,邹赫麟.利用双层胶方法去除负性光刻胶残胶效果研究[J],机电技术,2018,3:78-82 Yin, Zhifu,Zou, Helin,Cheng, E..Fast Microfluidic Chip Fabrication Technique by Laser Erosion and Sticky Tape Assist Bonding Te...[J],JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,2018,18(6):4082-4086 Li, Qi,Wang, Xing,Wang, Fuan,Chen, Da,Xiao, Xiaolei,Zou, Helin.Effect of neodymium substitution on crystalline orientation, microstructure and electric proper...[J],CERAMICS INTERNATIONAL,2018,44(7):7709-7715 Yin, Zhifu,Zou, Helin,Sun, Lei.Polycarbonate Nanofluidic Chip Fabrication Technique by Hot Embossing and Thermal Bonding[J],JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,2018,18(4):2530-2535 Yin, Zhifu,Zou, Helin.A fast and simple bonding method for low cost microfluidic chip fabrication[J],JOURNAL OF ELECTRICAL ENGINEERING-ELEKTROTECHNICKY CASOPIS,2018,69(1):72-78 邹赫麟. Effect of neodymium substitution on crystalline orientation, microstructure and electric propert...[J],Ceramics International,2018,44(7):7709-7715 Yi, Maocong,Feng, Jianbo,Yin, Zhifu,Zou, Helin.Fabricating method of SU-8 photoresist conical nozzle for inkjet printhead[J],MATERIALS AND MANUFACTURING PROCESSES,2018,33(8):898-904 Gong, Zhenfeng,Chen, Ke,Zhou, Xinlei,Yang, Yang,Zhao, Zhihao,Zou, Helin,Yu, Qingxu.High-Sensitivity Fabry-Perot Interferometric Acoustic Sensor for Low-Frequency Acoustic Pressur...[J],JOURNAL OF LIGHTWAVE TECHNOLOGY,2017,35(24):5276-5279 Li, Q.,Wang, X.,Wang, F.,Dou, J.,Xu, W.,Zou, H..Effect of Nb Doping on Crystalline Orientation, Electric and Fatigue Properties of PZT Thin Fil...[J],JOURNAL OF CERAMIC SCIENCE AND TECHNOLOGY,2017,8(4):519-524 Wei, Hongfang,Xiao, Xiaolei,Yin, Zhifu,Yi, Maocong,Zou, Helin.A waveform design method for high DPI piezoelectric inkjet print-head based on numerical simula...[J],MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,2017,23(12):5365-5373 Yin, Zhifu,Lu, Bolin,Cheng, E.,Sun, Lei,Zou, Helin.Fabrication of Bottom Fillet Nano-Mold to Increase the Mold Lifetime[J],JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,2017,17(12):8975-8980 Yin, Zhifu,Lu, Bolin,Zou, Helin.A novel SU-8 nanofluidic chip fabrication technique based on traditional UV photolithography[J],MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,2017,23(12):5613-5619 Yin, Zhifu,Zou, Helin.Multilayer patterning technique for micro- and nanofluidic chip fabrication[J],MICROFLUIDICS AND NANOFLUIDICS,2017,21(12) Yin, Zhifu,Cheng, E.,Zou, Helin.Numerical study on the shrinkage behavior of SU-8 patterns[J],MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,2017,23(10):4957-4964 Xu, Wencai,Li, Qi,Yin, Zhifu,Wang, Xing,Zou, Helin.Effect of La doping on crystalline orientation, microstructure and dielectric properties of PZT...[J],MATERIALS TESTING,2017,59(10):885-889 Xu, Wencai,Li, Qi,Yin, Zhifu,Wang, Wenqiang,Chu, Shichao,Zou, Helin.Effect of Gd doping on crystalline orientation, structural and electric properties of PZT thin ...[J],INTEGRATED FERROELECTRICS,2017,183(1):100-109 Li, Qi,Wang, Xing,Li, Chen,Wang, Fuan,Xu, Wencai,Zou, Helin.Preparation and characterization of PZT thin films deposited on PZT buffer layer with different...[J],INTEGRATED FERROELECTRICS,2017,183(1):182-192 许文才,李奇,王富安,邹赫麟.镧掺杂PZT薄膜的制备和表征[J],机电技术,2017,4:76-79,85 冯建波,伊茂聪,杨正,邹赫麟.压电喷墨打印头聚合物喷孔制作工艺研究[J],机电技术,2017,4:80-85 Wang, Wenqiang,Li, Chen,Xu, Wencai,Zou, Helin.Process for fabricating microactuator membranes of piezoelectric inkjet print head using multi-...[J],MICRO & NANO LETTERS,2017,12(7):482-485 Chen, Li,Yin, Zhifu,Zou, Helin,Liu, Junshan,Liu, Chong,Li, Kehong.A thermal bonding method based on O-2 plasma and water treatment for fabrication of PET planar ...[J],3rd International Conference of Smart Systems Engineering (SmaSys),2017,23(5,SI):1327-1333 Yin, Zhifu,Sun, Lei,Zou, Helin.Numerical analysis on PET demolding stage in thermal nanoimprinting lithography[J],MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,2017,23(4):899-905 陈莉,邹赫麟,刘军山,刘冲,李克洪.A thermal bonding method based on O2 plasma and water treatment for fabrication of PET planar nan...[J],Microsystem Technologies,2017,0(0):3-13 Yin, Zhifu,Zou, Helin.EXPERIMENTAL AND NUMERICAL STUDY ON PDMS COLLAPSE FOR FABRICATION OF MICRO/NANOCHANNELS[J],Journal of Electrical Engineering-Elektrotechnicky Casopis,2016,67(6):414-420 Yin, Zhifu,Sun, Lei,Zou, Helin.An Innovative Low-Cost Photomask Fabrication Technique[J],JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,2016,16(9):9751-9755 Yin, Zhifu,Sun, Lei,Zou, Helin,Xu, Shenbo.Bonding of 1D PMMA Nanofluidic Chip with Low Dimension Loss and High Bonding Strength[J],JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,2016,16(8):8439-8444 Zhou, Siyu,Ma, Guangyi,Chai, Dongsheng,Niu, Fangyong,Dong, Jinfei,Wu, Dongjiang,Zou, Helin.Nickel-based alloy/austenitic stainless steel dissimilar weld properties prediction on asymmetr...[J],OPTICS AND LASER TECHNOLOGY,2016,81:33-39 智利莎,冯建波,伊茂聪,邹赫麟.SU-8干膜喷墨腔室的制作工艺研究[J],机电技术,2016,3:117-121 Han, Jingning,Yin, Zhifu,Zou, Helin,Wang, Wenqiang,Feng, Jianbo.A NEW DRY ETCHING METHOD WITH THE HIGH ETCHING RATE FOR PATTERNING CROSS-LINKED SU-8 THICK FILM...[J],JOURNAL OF ELECTRICAL ENGINEERING-ELEKTROTECHNICKY CASOPIS,2016,67(3):212-216 Yin, Zhifu,Sun, Lei,Zou, Helin,Xu, Shenbo.Optimization of the profile of the nano-mold and the imprinting conditions by numerical simulat...[J],2nd International Conference on Surfaces, Coatings and Nanostructured Materials - Asia (NANOSMAT-Asia),2016,22(5):1105-1113 Sun, Lei,Yin, Zhifu,Qi, Liping,Wu, Dongjiang,Zou, Helin.A low-cost method of fabricating hybrid micro-nano fluidic chip by double-layer PDMS mold and U...[J],MICROFLUIDICS AND NANOFLUIDICS,2016,20(4) Yin, Zhifu,Qi, Liping,Zou, Helin,Sun, Lei,Xu, Shenbo.Low auto-fluorescence fabrication methods for plastic nanoslits[J],IET NANOBIOTECHNOLOGY,2016,10(2):75-80 He, Jingzhi,Yin, Zhifu,Li, Chao,Wang, Wenqiang,Zou, Helin.Fabrication of chamber for piezo inkjet printhead by SU-8 photolithography technology and bondi...[J],MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,2016,22(4):721-726 Sun, Yanming,Wang, Chenwei,Pan, Lujun,Fu, Xin,Yin, Penghe,Zou, Helin.Electrical conductivity of single polycrystalline-amorphous carbon nanocoils[J],CARBON,2016,98:285-290

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