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个人简介

熊诗圣,现任复旦大学信息科学与工程学院研究员,博士生导师,中国光学学会光刻专委会委员,中国感光学会委员,中国机械工程学会极端制造分委会委员。 多年来一直从事亚10纳米光刻工艺方面的工作,推动半导体行业的“摩尔定律”向深纳米尺寸前进。通过与国内外半导体企业长期合作,致力于开发用于先进逻辑及存储芯片的导向自组装光刻工艺。 先后承担各类重大重点项目,总经费超亿元。共发表SCI论文50余篇,申请专利二十余项。多次参加基金委双清论坛,担任科技部2030重大专项评审专家。曾接受中国新闻网,科技日报等媒体专访及重点报道。

研究领域

多年来一直从事亚10纳米光刻工艺方面的工作,推动半导体行业的“摩尔定律”向深纳米尺寸前进。通过与国内外半导体企业长期合作,致力于开发用于先进逻辑及存储芯片的导向自组装光刻工艺

近期论文

查看导师新发文章 (温馨提示:请注意重名现象,建议点开原文通过作者单位确认)

Jacobberger Robert M, Thapar Vikram, et al, Boundary-directed epitaxy of block copolymers. Nature communications, 2020, 4151. Yu Chen, Shisheng Xiong*, Directed self-assembly of block copolymers for sub-10nm fabrication. International Journal of Extreme Manufacturing, 2020, 2(3). Ziying Zhang, Pingping Xu, Ying Weng, Yangyang Zhou, Zaicheng Sun, Shisheng Xiong*, Nanotube network arrays with nickel oxide canopies as flexible high-energy anodes for lithium storage. Journal of Alloys and Compounds, 2020, 847. Yangqiang Zhao, Ziying Zhang, Huizhen Zhang,Yangyang Zhou, Ying Weng, Shisheng Xiong*, Three-Dimensional PrGO-Based Sandwich Composites With MoS2 Flowers as Stuffings for Superior Lithium Storage. Frontiers in Chemistry, 2020, 8(94). Karl Berggren, Qiangfei Xia, et al, Roadmap on emerging hardware and technology for machine learning. Nanotechnology, 2020. Baolin Zhang, Yu Chen, Shisheng Xiong*, Self-assembly of Blended PS-b-P2VP Block Copolymers. Journal of Microelectronic Manufacturing, 2020, 2(4) . Dongxue Li, Chun Zhou, Shisheng Xiong*, Xin-Ping Qu, Gordon S. W. Craig, Paul F. Nealey, Enhanced microphase separation of thin films of low molecular weight block copolymer by the addition of an ionic liquid. Soft Matter, 2019, 15(48). Chun Zhou, Moshe Dolejsi, Shisheng Xiong, Jiaxing Ren, Elizabeth Michiko Ashley, Gordon S W Craig, Paul F Nealey, Combining block copolymer lithography with self-aligned double patterning to achieve 10.5 nm full-pitch line/space patterns. Nanotechnology, 2019, 30(45). Dongxue Li, Liang Chien, Xinnian Wei, Xinping Qu, Tzu-Hsuan Chang, Shisheng Xiong*, Sub-10 nm silicon FinFET devices on SOI substrate made by block copolymer lithography. IEEE ICSICT conference, 2018. Shisheng Xiong*, Dongxue Li, Su-Mi Hur, Gordon S. W. Craig, Christopher G. Arges, Xin-Ping Qu, and Paul F. Nealey, The Solvent Distribution Effect on the Self-Assembly of Symmetric Triblock Copolymers during Solvent Vapor Annealing. Macromolecules, 2018, 51(18). Qi Zhang, Fumiaki Matsuoka, Hyo Seon Suh, Peter A Beaucage, Shisheng Xiong, Detlef-M Smilgies, Kwan Wee Tan, J?rg G Werner, Paul F Nealey, Ulrich B Wiesner, Pathways to Mesoporous Resin/Carbon Thin Films with Alternating Gyroid Morphology. ACS nano, 2017. Tzu-Hsuan Chang#, Shisheng Xiong#, Chi-Chun Liu, Dong Liu, Paul F. Nealey, Zhenqiang Ma, The One-Pot Directed Assembly of Cylinder-Forming Block Copolymer on Adjacent Chemical Patterns for Bimodal Patterning. Macromolecular Rapid Communications, 2017. Guanwen Yang, Guangpeng Wu, Xuanxuan Chen, Shisheng Xiong, Christopher Arges, Shengxiang Ji, Paul Nealey, Xiao-Bing Lu, Donald J. Darensbourg, Zhi-Kang Xu, Directed Self-Assembly of Polystyrene-b -poly(propylene carbonate) on Chemical Patterns via Thermal Annealing for Next Generation Lithography. Nano Letters, 2017, 17(2). Tamar Segal-Peretz, Jiaxing Ren, Shisheng Xiong, Gurdaman Khaira, Alec Bowen, Leonidas E Ocola, Ralu Divan, Manolis Doxastakis, Nicola J Ferrier, Juan de Pablo, Paul F Nealey, Quantitative Three-Dimensional Characterization of Block Copolymer Directed Self-Assembly on Combined Chemical and Topographical Prepatterned Templates. ACS Nano, 2017, 11(2). Hyo Seon Suh, Do Han Kim, Priya Moni, Shisheng Xiong, Leonidas E. Ocola, Nestor J. Zaluzec, Karen K. Gleason, Paul F. Nealey, Sub-10-nm patterning via directed self-assembly of block copolymer films with a vapour-phase deposited topcoat. Nature Nanotechnology, 2017, 12. J Ren, L E Ocola, R Divan, D A Czaplewski, T Segal-Peretz, S Xiong, R J Kline, C G Arges, P F Nealey, Post-directed-self-assembly membrane fabrication for in situ analysis of block copolymer structures. Nanotechnology, 2016, 27(43). Shisheng Xiong, Yves-Andre Chapuis, Lei Wan, He Gao, Xiao Li, Ricardo Ruiz, Paul F Nealey, Directed self-assembly of high-chi block copolymer for nano fabrication of bit patterned media via solvent annealing. Nanotechnology, 2016. Shisheng Xiong, Lei Wan, Yoshihito Ishida, Yves-Andre Chapuis, Gordon S W Craig, Ricardo Ruiz, Paul F Nealey, Directed Self-Assembly of Triblock Copolymer on Chemical Patterns for Sub-10-nm Nanofabrication via Solvent Annealing. ACS Nano, 2016. Tzu-Hsuan Chang#, Shisheng Xiong#, Robert M Jacobberger, Solomon Mikael, Hyo Seon Suh, Chi-Chun Liu, Dalong Geng, Xudong Wang, Michael S Arnold, Zhenqiang Ma*, Paul F Nealey*, Directed self-assembly of block copolymer films on atomically-thin graphene chemical patterns. Scientific reports, 2016, 6.

学术兼职

SPIE member Journal of Microelectronic Manufacturing 微电子制造 期刊编委

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