张权治 - 大连理工大学

个人简介

教育经历 2005.09-2009.07 大连理工大学物理与光电工程学院应用物理学士 2009.09-2014.07 大连理工大学物理与光电工程学院等离子体物理博士工作经历 2019.7至今大连理工大学物理学院副教授 2016.62019.6 比利时.安特卫普大学博士后 2014.82016.5 华为技术有限公司研究工程师

研究领域

主要是针对低温等离子体技术中的关键物理问题及关键技术开展科学研究，如等离子体源电非对称效应问题的研究和等离子体刻蚀多孔材料问题的研究。在低温等离子体物理中的物理建模、PIC/MC的模型（1、2维隐格式）、大规模并行计算、以及相关的数值仿真模拟有着独到的见解和创新

近期论文

查看导师新发文章（温馨提示：请注意重名现象，建议点开原文通过作者单位确认）

Sun, Jing-Yu.Electrical asymmetry effect in inhomogeneously magnetized capacitively coupled plasmas[J],PLASMA SOURCES SCIENCE TECHNOLOGY,2021,29(11) 张权治.H2S Decomposition into？H2 and？S2 by？Plasma Technology: Comparison of？Gliding Arc and？Microw...[J],Plasma Chemistry and Plasma Processing,2021,40:1163-1187 吕翔云.Spatio-temporal measurements of overshoot phenomenon in pulsed inductively coupled discharge[J],Chin. Phys. B,2021,30(4):45202- Sun, Jing-Yu,Zhang, Quan-Zhi,Liu, Yong-Xin,Wang, You-Nian.Realistic treatment for secondary electron emission in hybrid DC/DF capacitively coupled discha...[J],PLASMA SOURCES SCIENCE & TECHNOLOGY,2020,29(2) Schuengel, E.,Czarnetzki, U.,Wang, Y-N,Hou, L-J,Schulze, J.,Iwashita, S.,Zhang, Q-Z.Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymm...[J],JOURNAL OF PHYSICS D-APPLIED PHYSICS,2011,44(28) Liu, Yong-Xin,Zhang, Quan-Zhi,Jiang, Wei,Hou, Lu-Jing,Jiang, Xiang-Zhan,Lu, Wen-Qi,Wang, You-Nian.Collisionless Bounce Resonance Heating in Dual-Frequency Capacitively Coupled Plasmas[J],PHYSICAL REVIEW LETTERS,2011,107(5):055002 Zhang, Quan-Zhi,Jiang, Wei,Hou, Lu-Jing,Wang, You-Nian.Numerical simulations of electrical asymmetry effect on electronegative plasmas in capacitively...[J],JOURNAL OF APPLIED PHYSICS,2011,109(1) Zhang, Quan-Zhi,Jiang, Wei,Zhao, Shu-Xia,Wang, You-Nian.Surface-charging effect of capacitively coupled plasmas driven by combined dc/rf sources[J],JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,2010,28(2):287-292 Zhang, Quan-Zhi,Liu, Yong-Xin,Jiang, Wei,Bogaerts, Annemie,Wang, You-Nian.Heating mechanism in direct current superposed single-frequency and dual-frequency capacitively...[J],PLASMA SOURCES SCIENCE & TECHNOLOGY,2013,22(2) Zhang, Quan-Zhi,Zhao, Shu-Xia,Jiang, Wei,Wang, You-Nian.Separate control between geometrical and electrical asymmetry effects in capacitively coupled p...[J],JOURNAL OF PHYSICS D-APPLIED PHYSICS,2012,45(30) Zhang, Quan-Zhi,Wang, You-Nian,Bogaerts, Annemie.Heating mode transition in a hybrid direct current/dual-frequency capacitively coupled CF4 disc...[J],JOURNAL OF APPLIED PHYSICS,2014,115(22)