个人简介
招生专业
080903-微电子学与固体电子学
085209-集成电路工程
招生方向
新型纳米存储器件与集成技术
衍射光学器件
工作简历
2006-03~现在, 中国科学院微电子研究所, 研究员
奖励信息
(1) 高精度微纳结构掩模制造核心技术, 二等奖, 国家级, 2013
(2) 某某技术, 二等奖, 国家级, 2013
(3) 微纳结构“自上而下”制备核心技术与集成应用, 一等奖, 省级, 2010
(4) 中高频声表面波关键材料和器件研究, 一等奖, 省级, 2006
(5) 先进的深亚微米工艺技术及新型器件, 一等奖, 省级, 2003
发表著作
(1) 微细加工技术, Microfabrication Technology, 化学工业出版社, 2004-07, 第 2 作者
科研项目
( 1 ) 纳米尺度X射线光学元件设计、制作及应用, 主持, 国家级, 2007-07--2012-03
( 2 ) 极紫外光刻掩模关键技术研究, 主持, 国家级, 2009-01--2013-11
( 3 ) 亚光波长微分干涉相衬光子筛偏振成像特性研究, 主持, 国家级, 2013-01--2016-12
( 4 ) 微分干涉相衬-数字同轴全息3D形貌检测新型系统, 主持, 国家级, 2015-01--2016-12
( 5 ) X射线衍射光谱与成像纳米器件及集成基础研究, 参与, 国家级, 2017-06--2021-12
近期论文
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(1) High order diffraction suppression by quasiperiodic two-dimensional gratings, Opt. Mater. Express, 2017, 通讯作者
(2) Two-dimensional gratings of hexagonal holes for high order diffraction suppression, Opt. Express, 2017, 通讯作者
(3) Higher-order diffraction suppression of free-standing quasiperiodic nanohole arrays in the x-ray region, Appl.Phys.Lett., 2017, 通讯作者
(4) Fabrication of ultra-high aspect ratio (>160:1) silicon nanostructures by using Au metal assisted chemical etching, J.Micromech. Microeng., 2017, 通讯作者
(5) Single-focus spiral zone plates, Optics letters, 2017, 通讯作者
(6) Nanofabrication and characterization of high-line-density x-ray transmission gratings0, J. of Micro/Nanolithography, MEMS, and MOEMS, 2017, 通讯作者
(7) Effect of Near-Field Diffraction in Photolithography of Hexagonal Arrays for Dichroic Filters, IEEE Photonics Journal, 2016, 通讯作者
(8) Depth-of-Focus Determination for Talbot Lithography of Large-Scale Free-Standing Periodic Features, IEEE Photonics Technology Letters, 2016, 通讯作者
(9) A MEMS thermal shear stress sensor produced by a combination of substrate-free structures with anodic bonding technology, Appl.Phys.Lett., 2016, 通讯作者
(10) Improving stress stability in low-pressure chemical vapor deposited silicon dioxide films by ion implantation, Thin Solid Films, 2016, 通讯作者
(11) Free space self-similar beams, Optics Letters , 2015, 通讯作者
(12) High Q Plasmonic Lasing of Band Edge Modes in an Asymmetry Environment, Plasmonics, 2015, 通讯作者
(13) Differential-interference-contrast digital in-line holography microscopy based on a single-optical-element, Optics letters, 2015, 通讯作者
(14) Omnidirectional diffraction control with rotational topological defects, Optics express, 2015, 通讯作者
(15) Quasi suppression of higher-order diffractions with inclined rectangular apertures gratings, Scientific Reports, 2015, 通讯作者
(16) Large-area SiC membrane produced by plasma enhanced chemical vapor deposition at relatively high temperature, Journal of Vacuum Science & Technology A,, 2015, 通讯作者
(17) Parabolic scaling beams, Optics Letters , 2014, 通讯作者
(18) Hybrid lithography for x-ray diffractive optical elements, SPIE Newsroom, 2014, 第 1 作者
(19) Fabrication of x-ray diffractive optical elements for laser fusion applications., Opt. Eng, 2013, 第 1 作者
(20) Controlled interaction of the optical vortices generated by off-center spiral zone plates, Opt.Commun., 2013, 通讯作者
(21) Moiré-based phase imaging for sensing and adjustment of in-plane twist angle, IEEE Photon. Technol. Lett ., 2013, 通讯作者
(22) Quasi-periodic gratings: diffraction orders accelerate along curves, Optics Letters , 2013, 通讯作者
(23) Enhanced optical transmission through asymmetric nanostructured gold films, J.Opt.Soc.Am. B., 2012, 通讯作者
(24) Toward two-dimensional nanometer resolution hard-x-ray differential-interference-contrast imaging using modified photon sieves, Optics Letters, 2012, 第 1 作者
(25) Using Circular Dammann Gratings to produce impulse optic vortex rings, Applied Physics Letters , 2012, 通讯作者
(26) 微纳金属光学结构制备技术及应用, 光学学报, 2011, 第 1 作者
(27) High-order diffraction suppression using modulated groove position gratings, Optics Letters, 2011, 通讯作者
(28) Circular Fibonacci gratings, Applied Optics, 2011, 通讯作者
(29) Square optical vortices generated by binaray spiral zone plates, Applied Physics Letters, 2011, 通讯作者
(30) 近地空间下X/EUV透射光栅的热力学有限元分析, 光电工程, 2010, 通讯作者
(31) 螺旋型波带片成像的空间分辨率研究, 光电子.激光, 2010, 通讯作者
(32) X射线螺旋波带片制备技术, 核技术, 2010, 第 4 作者
(33) A super-resolution Fresnel zone plate and photon sieve, Optics and Lasers in Engineering, 2010, 第 2 作者
(34) 2000 lp /mm X 射线透射变栅距光栅的研究, 光学学报, 2010, 通讯作者
(35) 复合型光子筛及其在大口径成像中的应用, 光电工程 , 2010, 第 2 作者
(36) 多能点X射线透射光栅的制作技术, 微纳电子技术, 2010, 第 2 作者
(37) Feasibility study of hard-x-ray nanofocusing above 20keV using compound photon sieves, Optics Letters, 2010, 第 1 作者
(38) 自支撑透射光栅的设计、制作和测试, 物理学报, 2010, 通讯作者
(39) Spiral photon sieves apodized by digital prolate spheroidal window for the generation of hard-x-ray vortex, Optics Letters , 2010, 第 1 作者
(40) Focusing properties of hard x-ray photon sieves: three-parameter apodization window and waveguide effect, Optics Letters , 2009, 第 1 作者
(41) Phase zone Photon Sieve, Chinese Phys. B, 2009, 第 2 作者
(42) Design, fabrication and test of a soft x-ray even-order transmission grating, Chin. Phys. Lett, 2009, 通讯作者
(43) 硬X射线光子筛波导效应研究, 物理学报, 2009, 第 1 作者
(44) Fabrication of 11-nm-wide silica-like lines using x-ray diffraction exposure, Chin. Phys. Lett, 2009, 第 2 作者
(45) High-rate reactive ion etching of barium hexaferrite films using optimal CHF3/SF6 gas mixtures, Applied Physics Letters, 2009, 第 3 作者
(46) 3333 lp /mm X 射线透射光栅的研制, 光学学报, 2008, 通讯作者
(47) Asymmetric electrical bistable behavior of an eicosanoic acid/zirconium oxide bilayer system with rectifying effect, Applied Physics Letters, 2008, 通讯作者
(48) Photon sieve for reduction of the far-field diffraction spot size in the laser free-space communication system, Optics Communications, 2008, 第 3 作者
(49) 微聚焦菲涅耳波带板聚焦特性研究, 物理学报, 2008, 第 4 作者
(50) 高线密度X射线透射光栅的制作工艺, 半导体学报, 2007, 通讯作者
(51) Analysis by using X-ray photoelectron spectroscopy for polymethyl methacrylate and polytetrafluoroethylene etched by KrF excimer laser, Applied Surface Science , 2007, 第 4 作者
(52) 侧墙铬衰减型新结构移相掩模的应用, 半导体学报, 2006, 第 1 作者
(53) 第二代接近式X射线光刻技术, 微细加工技术, 2006, 第 1 作者
(54) Micro Zone Plates with High Aspect Ratio Fabricated by E-Beam and X-ray Lithography, Journal of Microlithography, Microfabrication, and Microsystem, 2006, 第 3 作者