个人简介
招生专业
080903-微电子学与固体电子学
080902-电路与系统
085208-电子与通信工程
招生方向
新型纳米存储器件与集成技术
阻变存储器集成与应用
神经元网络计算
教育背景
2004-09--2009-01 复旦大学 博士
2000-09--2004-07 山东大学 学士
工作简历
2016-01~现在, 中国科学院微电子研究所, 研究员
2012-10~2016-01,中国科学院微电子研究所, 副研究员
2010-03~2012-10,中国科学院微电子研究所, 助理研究员
教授课程
半导体存储器技术
奖励信息
(1) 阻变存储器及集成的基础研究, 二等奖, 省级, 2014
专利成果
( 1 ) Metal oxide resistive switching memory and method for manufacturing same, 发明, 2014, 第 1 作者, 专利号: US 8,735,245
( 2 ) 一种具有自整流特性的阻变存储器及其制备方法, 发明, 2012, 第 1 作者, 专利号: ZL201210311109.8
( 3 ) 集成标准CMOS工艺的金属氧化物电阻存储器及其制备方法, 发明, 2012, 第 1 作者, 专利号: ZL201110066086.4
( 4 ) 集成标准CMOS工艺的电阻存储器及其制备方法, 发明, 2012, 第 1 作者, 专利号: ZL201110066088.3
( 5 ) 一种Cu基阻变存储器的制备方法及存储器, 发明, 2018, 第 1 作者, 专利号: 201610258335.2
( 6 ) 一种自选通阻变存储器件及其制备方法, 发明, 2018, 第 1 作者, 专利号: 201610282626.5
发表著作
(1) 纳米半导体器件与技术, Nano Semiconductor Device and Technology, 国防工业出版社, 2013-08, 第 2 作者
科研项目
( 1 ) 阻变存储器集成与可靠性, 主持, 国家级, 2016-01--2018-12
( 2 ) 基于氧化物薄膜晶体管的不挥发性DRAM技术研究, 主持, 国家级, 2014-01--2017-12
( 3 ) 面向三维集成的阻变存储器纳米尺度效应研究, 主持, 国家级, 2016-06--2021-05
( 4 ) 新型存储器预研, 主持, 国家级, 2018-01--2020-12
( 5 ) 28nm嵌入式阻变电阻器工艺开发, 主持, 国家级, 2018-01--2020-12
( 6 ) 神经形态器件与芯片关键集成技术研究, 主持, 国家级, 2019-01--2023-12
参与会议
(1)Cu BEOL Compatible Selector with High Selective (>107), Extremely Low Offcurrent (~pA) and High Endurance (>1010) 国际电子器件大会 2015-12-09
近期论文
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(1) Hybrid 1T e-DRAM and e-NVM Realized in One 10 nm node Ferro FinFET device with Charge Trapping and Domain Switching Effects, Electron Devices Meeting (IEDM), IEEE International, 2018, 通讯作者
(2) 40× times Retention Improvement by Eliminating Resistance Relaxation with High Temperature Forming in 28 nm RRAM Chip, Electron Devices Meeting (IEDM), IEEE International, 2018, 通讯作者
(3) Analysis of tail bits generation of multilevel storage in resistive switching memory, Chin. Phys. B, 2018, 通讯作者
(4) Unveiling the Switching Mechanism of a TaOx/HfO2 Self-selective Cell by Probing the Trap Profiles with RTN Measurements, IEEE Electron Device Letters, 2018, 通讯作者
(5) Switching and Failure Mechanism of Self-Selective Cell in 3D VRRAM by RTN-Based Defect Tracking Technique, IEEE International Memory Workshop, 2018, 通讯作者
(6) Self-Rectifying and Forming-Free Resistive-Switching Device for Embedded Memory Application, IEEE Electron Device Letters, 2018, 通讯作者
(7) The Impact of RTN Signal on Array Level Resistance Fluctuation of Resistive Random Access Memory, IEEE Electron Device Letters, 2018, 通讯作者
(8) Stable Complementary Switching with Multilevel Operation in 3D Vertically Stacked Novel HfO2/Al2O3/TiOx (HAT) RRAM, Advanced Electronic Materials, 2018, 通讯作者
(9) Classification of Three-Level Random Telegraph Noise and Its Application in Accurate Extraction of Trap Profiles in Oxide-Based Resistive Switching Memory, IEEE Electron Device Letters, 2018, 通讯作者
(10) Complementary Switching in 3D Resistive Memory Array, Advanced Electronic Materials, 2017, 通讯作者
(11) Uniformity and Retention Improvement of TaOx-Based Conductive Bridge Random Access Memory by CuSiN Interfacial Layer Engineering, IEEE Electron Device Letters, 2017, 通讯作者
(12) Highly uniform and nonlinear selection device based on trapezoidal band structure for high density nanocrossbar memory array, Nano Research, 2017, 通讯作者
(13) 8-layers 3D Vertical RRAM with Excellent Scalability towards Storage Class Memory Applications, Electron Devices Meeting (IEDM), IEEE International, 2017, 通讯作者
(14) BEOL Based RRAM with One Extra-mask for Low Cost, Highly Reliable Embedded Application in 28 nm Node and Beyond, Electron Devices Meeting (IEDM), IEEE International, 2017, 第 1 作者
(15) Fully CMOS Compatible 3D Vertical RRAM with Self-aligned Self-selective Cell Enabling Sub-5nm Scaling, VLSI Symp. Tech. Dig., 2016, 通讯作者
(16) Demonstration of 3D Vertical RRAM with Ultra Low-leakage, High-selectivity and Self-compliance Memory Cells, Tech. Dig.-Int. Electron Devices Meet (IEDM), 2015, 通讯作者
(17) Cu BEOL Compatible Selector with High Selective (>107), Extremely Low Off-current (~pA) and High Endurance (>1010), Tech. Dig.-Int. Electron Devices Meet (IEDM), 2015, 通讯作者
(18) Evolution of conductive filament and its impact on the reliability issues in oxide-electrolyte based resistive random access memory, Scientific Reports, 2015, 第 1 作者
(19) Degradation of Gate Voltage Controlled MLC Storage in 1T1R Electrochemical Metallization Cell, IEEE, Electron Device Letters, 2015, 通讯作者
(20) Superior Retention of Low Resistance State in Conductive Bridge Random Access Memory with Single Filament Formation, IEEE, Electron Device Lett., 2015, 通讯作者
(21) Uniformity Improvement in 1T1R RRAM with Gate Voltage Ramp Programming, IEEE, Electron Device Lett., 2014, 通讯作者
(22) Overcoming the Dilemma Between RESET Current and Data Retention of RRAM by Lateral Dissolution of Conducting Filament, IEEE Electron Device Letters, 2013, 通讯作者
(23) Self-Rectifying Resistive-Switching Device With a-Si/WO3 Bilayer,, IEEE Electron Device Letters, 2013, 第 1 作者
学术兼职
2017-10-01-2021-10-01,国际存储器技术会议, 技术委员会成员