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个人简介

教育背景 1989.09-1993.07哈尔滨工业大学光学仪器学士 1993.09-1996.03哈尔滨工业大学光学仪器硕士 2000.09-2005.07清华大学光学工程博士 工作简历 1996.04-1998.01航天部北京空间机电研究所,助理工程师 2005.12–2009.11Singapore-MITAlliance,Singapore,ResearchFellow 2010.03–2011.05theUniversityofNorthCarolina,USA,Postdoctor 2011.10–今中国科学院微电子研究所副研究员、研究员,其中: 2016.02-2019.01外派至中科晶源微电子技术(北京)有限公司做项目经理和项目总监

研究领域

光刻技术,光电技术,光学工程,光学检测

近期论文

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[1]ZhongZJ,LiCY,LiSG,LiPH,MaQC,ZhaoHY,ZhangJ,andWeiYY,“Highspeed,highaccuracydisplacementextractionfromsinusoidallikeMoiréfringesinanovelopticalencodingtechnology”,Proc.SPIEAdvancedLithography2020,accepted. [2]郭杰,李世光,赵焱,宗明成,“电子束硅片图形检测系统中的纳米级对焦控制技术”,中国光学,2019,12(63):242-255 [3]LiSG,XieDD,WuZP,YangYH,ZhangJ,GuoCX,PiYQ,XiaoSX,andZhaoY,”AutomaticcontrolofLEDlightsourceforwaferheightlevelinginelectronbeamimagingsystems”,Proc.SPIE10819,2018:108190O [4]孙裕文,李世光,宗明成,“基于空间分光的纳米级调焦调平测量技术”,光学学报,2016,36(5):0512002 [5]孙裕文,李世光,叶甜春,宗明成,“纳米光刻中调焦调平测量系统的工艺相关性”,光学学报,2016,36(8):0812001 [6]LiSGandOldenburgA,“Measuringsofttissueelasticitybymonitoringsurfaceacousticwavesusingimageplanedigitalholography”,Proc.SPIE7965,2011:79652M-7962M-7 [7]LiSG,XuZG,YoonSFandFangZP,“Feasibilitystudyonbondingqualityinspectionofmicrofluidicdevicesbyopticscoherencetomography”,J.ofBiomedicalOpt.,2011,16(6):066011 [8]LiSG,MohanKD,SandersWWandOldenburgAL,"Towardsoft-tissueelastographyusingdigitalholographytomonitorsurfaceacousticwaves”,J.ofBiomedicalOptics,2011,16(11):116005 [9]LiSG,LiuJ,NguyenNT,FangZP,andYoonSF,“Measurementofburiedundercutstructuresinmicrofluidicdevicesbylaserfluorescentconfocalmicroscopy”,AppliedOptics,2009,48(33):6432-6441 [10]LiSG,ThorsenT,XuZG,FangZP,andYoonSF,“MicrovalveThicknessandTopographyMeasurementsinMicrofluidicDevicesbyWhiteLightConfocalMicroscopy”,AppliedOptics,2009,48(27):5088-94 [11]VijayS*,BrunsDJ*,LiSG*,XuZG*,HaydenTK,KamalY,FangZP,IvanR,andYoonSF,“FusionofMetrologyDataforHigh-VolumeLarge-ScaleManufacturingofPolymer-BasedMicro?uidicDevices”,Int.JofNanomanufacturing,2009,3(4):312-336 [12]XuZG,LiSG,ShilpiekandulaV,TaylorHK,YoonSF,Youcef-ToumiK,ReadingI,FangZP,ZhaoJH,andBoningDS,“Three-DimensionalProfileStitchingBasedontheFiducialMarkersforMicrofluidicDevices”,OpticsCommunications,2009,282,p493–499 [13]LiSG,XuZG,ReadingI,YoonSF,FangZPandZhaoJH,“Threedimensionalsidewallmeasurementsbylaserfluorescentconfocalmicroscopy”,Opt.Express,2008,16:4001-4014 [14]LiSG,Xu,ZG,MazzeoA,BurnsDJ,FuG,DirckxM,ShilpiekandulaV,ChenX,NayakNC,WongE,YoonSF,FangZP,Youcef-ToumiK,HardtD,TorSB,YueCYandChunJH,“Reviewofproductionofmicrofluidicdevices:material,manufacturingandmetrology”,SPIE6993,2008:69930F-1-12 [15]TaylorHK,XuZG,LiSG,Youcef-ToumiK,YoonSF,andBoningDS,“Moirefringemethodforthemeasurementofdistortionsofhot-embossedpolymericsubstrates”,SPIE7155,2008:715528-715528-9 [16]LiSG,FuGang,ReadingIvan,TorSB,LohNH,ChaturvediP,YoonSF,andYoucef-ToumiK,“Dimensionalvariationinproductionofhigh-aspect-ratiomicro-pillarsarraybymicropowderinjectionmolding”,AppliedPhysicsA,2007,89:721-728 [17]ZhangY,Yang,CX,andLiSG,“Impactofpolarizationdependentlossondegreeofpolarizationasfeedbacksignalofpolarizationmodedispersion”,ChineseOpticsLetters2006,4(1):1-3 [18]ZhangY,YangCX,LiSG,YanH,YinJC,GuC,andJinGF,“Completepolarizationcontrollerbasedonmagneto-opticcrystalsandfixedquarterwaveplates”,Opt.Express,2006,14:3484-3490 [19]YangCX,ZhangY,andLiSG,“Experimentalmitigationofpulsedistortionduetohigherorderpolarizationmodedispersion”,Proc.SPIE6025,2006:222-227 [20]ZhangY,LiSG,andYangCX,“Polarizationmodedispersioncompensationexperimentsin10Gb/sand40Gb/sopticalcommunicationsystems”,Proc.SPIE6021,2005:602122 [21]LiSG,YangCX,andJinGF,“Simpleall-orderpolarizationmodedispersionemulatorinDWDMsystems”,Proc.SPIE5625,2005:820-827 [22]ZhangY,LiSGandYangCX,“Compactfirstandsecondorderpolarizationmodedispersionemulator”,ChineseOpticsLetters,2005,3(8):444-447 [23]LiSG,YangCX,MiaoHX,ZhangY,ZhangEY,andJinGF,“Frequencydependenceofpolarizationmodedispersionofcrystal-basedpolarizationmodedispersioncompensator”,Chin.Phys.Lett.,2005,22(2):376-379 [24]LiSG,YangCX,ZhangEY,andJinGF,“Dynamicperformanceofmagneto-opticalBi-substitutedrare-earthirongarnet”,Chin.Opt.Lett.,2005,3(1):38-41 [25]LiSG,YangCX,ZhangEY,andJinGF,“Compactopticalrollanglesensorwithlargemeasurementrangeandhighsensitivity”,Opt.Lett.,2005,30(3):242-244 [26]MiaoHX,YangCX,LiSG,andYanYB,“Feed-forwardpolarizationmodedispersioncompensationwithastepcontrolalgorithm”,Opt.Commun.,2003,222:179-189 [27]范志刚,张伟,李世光,金海,“角锥棱镜不同方位反射光束的能量分布”,航空计测技术,1995,5(4):8-12

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