毛旭 - 中国科学院半导体研究所 -

个人简介

1996和1999年分别在云南大学物理系获得学士和硕士，2006年获中国电子科技集团电子科学研究院物理电子学专业博士学位，2006年至2009年，北京大学微电子研究院微电子学与固体电子学专业博士后，2009年至今在中国科学院半导体研究所工作。

研究领域

（1）微惯性器件研究（2）微纳光机电研究（3）射频微机电器件研究（4）MEMS/NEMS封装技术的研究

近期论文

查看导师最新文章（温馨提示：请注意重名现象，建议点开原文通过作者单位确认）

Recent Progress of Surface Plasmon–Enhanced Light Trapping in GaAs Thin-Film Solar Cells.Bo Wei, Xu Mao, Wen Liu, Chunxue Ji, Guiqiang Yang, Yidi Bao, Xiaoling Chen, Fuhua Yang, Xiaodong Wang. Plasmonics ( IF 3 ) Pub Date : 2023-06-29 , DOI: 10.1007/s11468-023-01902-0 Coupling of Photonic and Plasmonic Modes for Double Nanowire Cavities.Xuanran Peng, Jing Liu, Yaru Kang, Xu Mao, Wei Yan, Xiaohui Wang, Kong Liu, Rui Xu, Fuhua Yang, Zhaofeng Li. Photonics (IF 2.14) Pub Date : 2023-04-06 ,DOI:10.3390/photonics10040415 Mao Xu, Wei Wei-Wei,Yang Jin-Ling,Yang Fu-Hua,“A Wafer-Level Sn-Rich Au–Sn Bonding Technique and Its Application in Surface Plasmon Resonance Sensors”,CHIN. PHYS. LETT., 31, 056803 (2014) SCI Xu Mao，Jinling Yang, An Ji, and Fuhua Yang，“Two new methods to improve the lithography precision for SU-8 photoresist on glass substrate”, J. Microelectromech. Syst., 22, 124-130 （2013）SCI Zhiqiang. Fang, Xu Mao, Jinling Yang, and Fuhua Yang “A Wafer-Level Sn-Rich Au-Sn Intermediate Bonding Technique with High Strength”, J. Micromech. Microeng. 23,095008 (2013) SCI Zhenchuan Yang，yumin Wei, Xu Mao, Guizhen Yan, A single-mask dry-release process for fabrication of high aspect ratio SOI MEMS devices, Science China-Technological Sciences, 56, 387-391 (2013) SCI Xu Mao, Zhiqiang. Fang, Zhe Zhang, Jinling Yang, Zhimei Qi, and Fuhua Yang，“Sn-Rich Au-Sn Hermetic Packaging at Wafer Level and Its Application in SPR Sensor”, IEEE-NMEM 2013, 244-247 (2013) EI Xu Mao，Jinling Yang, An Ji, and Fuhua Yang，“Two new methods to improve the lithography precision for SU-8 photoresist on glass substrate”, IEEE MEMS 2012, Paris, France, Jan. 29 – Feb. 2, 337-340 （2012）EI Xu Mao, Zhenchuan Yang, Zhihong Li, Guizhen Yan, “A SOI MEMS Accelerometer Fabricated with Anti-Footing Technique”, Nanotechnology and Precision Engineering, 8, 330-333 （2010） EI Xu Mao, Yumin Wei, Zhenchuan Yang, Guizhen Yan, “Fabrication of SOI MEMS Inertial Sensors with Dry Releasing Process”, IEEE SENSORS 2009 Conference, 479-482 (2009) EI Xu Mao, Zhenchuan Yang, Zhihong Li, Guizhen Yan , “The Method of Prevent Footing Effect in Making SOI Micro-mechanical accelerometer”, IEEE-NEMS 2009, 501-504 (2009) EI yumin Wei, Xu Mao, Zhenchuan Yang， Guizhen Yan, “A single mask dry releasing process for making high aspect ratio SOI mems devices”, IEEE-NEMS 2010, Xiamen, China, （2010） EI Xingdong Lv, Weiwei Wei, Xu Mao, Jinling Yang, and Fuhua Yang, “A novel MEMS actuator with large lateral stroke driven by Lorentz force”,Journal of Micromechanics and Microengineering,accept,（2014） SCI Xingdong Lv, Weiwei Wei, Xu Mao, Yu Chen, Jinling Yang, and Fuhua Yang, “A novel MEMS electromagnetic actuator with large displacement”, Sensors and Actuators A: Physical, accept,（2014） SCI