个人简介
招生专业
080903-微电子学与固体电子学
080920-生物电子学
085208-电子与通信工程
招生方向
1. 基于微纳米技术的传感器、执行器与系统
2. MEMS加工技术与封装
3. 微流控芯片系统
4. 信号检测与仪表技术
教育背景
1998-03--2002-11 清华大学 博士
1995-09--1998-03 吉林大学 硕士
1991-09--1995-07 吉林大学 学士
出国学习工作
2006年在英国皇家学会资助下,赴英国卢瑟福国家实验室和牛津大学工程系开展有关微流体芯片的合作研究;
2009年在院高级访问学者的资助下,赴美国加州大学伯克利(Berkeley)分校传感器与执行器中心(BSAC)从事有关纳米发电机的合作研究。
教授课程
科研实践Ⅰ
微流控芯片系统
射频集成电路设计与分析
CMOS模拟集成电路设计与分析
MEMS接口电路
传感器网络与模式识别系列讲座
传感器网络系列讲座
物联网系列讲座
专利成果
( 1 ) 一种基于微电子机械技术的硅谐振式气压传感器, 发明, 2010, 第 2 作者, 专利号: 201010251499.5
( 2 ) 基于微机械的电磁激励谐振式压力传感器, 发明, 2010, 第 3 作者, 专利号: 201010218423.2
( 3 ) 一种电磁驱动谐振式微结构压力传感器封装方法, 发明, 2010, 第 3 作者, 专利号: 201010247579.3
( 4 ) 基于电磁激励检测方式的谐振式微机械加速度传感器, 发明, 2012, 第 1 作者, 专利号: 201219917209.x
( 5 ) 一种无线无源胃肠压力检测系统, 发明, 2012, 第 1 作者, 专利号: 2012121300413530
( 6 ) 一种基于SOI工艺的高精度硅微谐振式气压传感器, 发明, 2017, 第 3 作者, 专利号: 201210587264.2
( 7 ) 无线无源LC谐振传感器检测电路及相应的信息获取方法, 发明, 2013, 第 1 作者, 专利号: 201310449935.3
( 8 ) 谐振式微机械压力传感器及传感器芯片的低应力组装方法, 发明, 2013, 第 1 作者, 专利号: 201310092955.x
( 9 ) 基于机械密封的电化学地震检波器及其封装方法, 发明, 2013, 第 1 作者, 专利号: 201310188648.1
( 10 ) 电化学敏感元件、其制备方法、应用其的地震检波器, 发明, 2013, 第 1 作者, 专利号: 201310432017.x
( 11 ) 基于微流控技术的浓度梯度产生器及其制备方法, 发明, 2013, 第 5 作者, 专利号: 201310298353.X
( 12 ) 平面电感与电容串联的无线连接眼压传感器, 发明, 2016, 第 3 作者, 专利号: CN201510067329
( 13 ) 无线无源非侵入式MEMS眼压传感器及其制作方法, 发明, 2017, 第 1 作者, 专利号: CN201510065578
( 14 ) 双谐振器压力传感器的温度自补偿方法和测量方式, 发明, 2015, 第 1 作者, 专利号: CN201510014644
( 15 ) SOI片过孔内金属焊盘的制作方法, 发明, 2015, 第 1 作者, 专利号: CN201410617616
( 16 ) 一种基于力平衡反馈的电化学地震检波器, 发明, 2015, 第 1 作者, 专利号: CN201510764438.1
( 17 ) 电化学加速度及、将热敏电阻集成在电极中的方法, 发明, 2015, 第 1 作者, 专利号: CN201510772377.3
( 18 ) 谐振式压力传感器, 发明, 2018, 第 1 作者, 专利号: CN20151059539.8
( 19 ) 集成式复合敏感电极及其制造方法, 发明, 2015, 第 3 作者, 专利号: CN105158493A
( 20 ) 双谐振器压力传感器的温度自补偿方法和测量方式, 发明, 2015, 第 1 作者, 专利号: CN201510014644.0.
( 21 ) 悬臂件及应用其的谐振式加速度传感器, 发明, 2014, 第 1 作者, 专利号: CN201210444160.6.
( 22 ) MEMS电化学地震检波器敏感电极芯片及其制造方法, 发明, 2016, 第 3 作者, 专利号: 201610079519.2
( 23 ) 二维细胞划痕芯片及其制备方法、应用, 发明, 2016, 第 5 作者, 专利号: CN201610649492.6
( 24 ) 一种三维细胞划痕微芯片及其制备方法与应用, 发明, 2016, 第 5 作者, 专利号: CN201610649461.0
( 25 ) 一种基于毛细管进样技术和微流控技术的单细胞电学特性检测芯片, 发明, 2016, 第 4 作者, 专利号: CN201610407657.9
( 26 ) 一种单细胞蛋白检测系统及其应用, 发明, 2016, 第 5 作者, 专利号: CN201610647857.1
( 27 ) 一种硅谐振压力传感器的补偿方法, 发明, 2017, 第 1 作者, 专利号: CN201710098516.8
( 28 ) 电化学微震检波器, 发明, 2017, 第 1 作者, 专利号: CN201710091426.6
( 29 ) LC谐振式传感器的检测电路及检测方法, 发明, 2016, 第 1 作者, 专利号: CN201610959765.7
( 30 ) 一种植入式无线无源颅内压监测系统, 发明, 2016, 第 1 作者, 专利号: CN201610307939
( 31 ) 自适应周期的频率测量系统与方法, 发明, 2018, 第 2 作者, 专利号: CN201810521299
( 32 ) 基于压阻检测的谐振式压力传感器及其制备方法, 发明, 2018, 第 3 作者, 专利号: CN201810454924
( 33 ) 高通量检测细胞尺寸、尺寸无关单细胞电参数装置和方法, 发明, 2018, 第 5 作者, 专利号: CN201810108829
( 34 ) 单细胞胞浆粘性测量装置及方法, 发明, 2018, 第 4 作者, 专利号: CN201810092406
( 35 ) 颅内压力传感器、检测设备及制备方法, 发明, 2017, 第 1 作者, 专利号: CN201711498603
奖励信息
2008年入选北京市科技新星计划(A类)
2015年“高性能MEMS电化学地震检波器”获第十七届中国国际工业博览会创新奖(第1完成人)
2017年“高精度硅谐振压力传感器关键技术及应用”获得中国电子学会技术发明二等奖(第1完成人)
2017年“基于微流控芯片的单细胞电学特性高通量检测技术及应用”获得中国分析测试技术协会科学技术(CAIA)三等奖(第1完成人)
2017年“高精度硅基MEMS谐振式压力传感器”入选第12届中国半导体创新产品与技术(第1完成人)
2018年 获得国家杰出青年科学基金
2018年 获得中国科学院优秀导师奖
发表著作
(1) 英文专著一章节, Mechanical Properties of Single Cells: Label Free Biomarkers for Evaluation of Cell Status, Springer-Verlag GmbH., 2015-07, 第 5 作者
(2) 英文专著一章节, Micro Electro Mechanical Systems: A micromachined silicon resonant pressure sensor, Springer, 2017-08, 第 1 作者
(3) 英文专著1章节, Methods in Molecular Biology : Single-Cell Protein Assays--A Review, Springer International Publishing, 2017-08, 第 2 作者
科研项目
( 1 ) 电化学地震检波器研制, 主持, 国家级, 2011-08--2014-12
( 2 ) 无线无源胃肠压力传感器, 主持, 国家级, 2012-01--2014-12
( 3 ) 骨细胞在基于微流控技术重建的体外微环境中的代谢和功能研究, 主持, 国家级, 2013-01--2015-12
( 4 ) 基于细胞机械/电子特性高通量同时表征的肿瘤细胞检测研究, 参与, 国家级, 2013-01--2015-12
( 5 ) MicroCare, 主持, 研究所(学校), 2010-07--2014-07
( 6 ) 面向潜在抑郁风险预警的生物、心理信息获取方法及关键技术, 主持, 国家级, 2014-01--2018-09
( 7 ) 基于MEMS技术的宽带电化学地震检波器研制, 主持, 国家级, 2013-09--2018-09
( 8 ) 海底地震仪MEMS电化学宽带地震检波器研制, 参与, 国家级, 2014-01--2016-12
( 9 ) 非侵入式无线无源MEMS 眼压传感器研究, 参与, 国家级, 2014-01--2017-12
( 10 ) 肿瘤细胞生物物理/化学特性高通量综合检测方法研究, 主持, 国家级, 2015-01--2019-12
( 11 ) 单细胞固有电学/力学特性高通量检测分析仪研制, 主持, 部委级, 2015-01--2016-12
( 12 ) 电化学地震动传感器研究, 主持, 国家级, 2015-01--2016-12
( 13 ) 基于柔性衬底的无线无源腹主动脉瘤MEMS压力传感器研究, 参与, 省级, 2015-01--2017-12
( 14 ) 硅谐振压力传感器, 主持, 院级, 2016-01--2017-12
( 15 ) 高精度压力传感器, 主持, 国家级, 2017-01--2018-12
( 16 ) 低频地震检波器, 主持, 国家级, 2017-01--2018-12
( 17 ) 深海甚宽频带MEMS电化学地震检波器, 参与, 国家级, 2016-09--2020-08
( 18 ) 面向肿瘤异质性的单细胞蛋白检测新方法研究, 参与, 部委级, 2016-08--2020-12
( 19 ) 高精度硅谐振压力传感器批量化制造技术, 主持, 部委级, 2018-01--2019-12
( 20 ) MEMS传感器, 主持, 国家级, 2019-01--2023-12
( 21 ) 甚低频新型微纳传感器, 主持, 国家级, 2018-10--2019-12
( 22 ) 地震检波器, 主持, 部委级, 2019-01--2023-12
( 23 ) 高精度硅基谐振式压力传感器, 参与, 国家级, 2019-06--2022-07
( 24 ) 压力传感器批量化自动标定系统, 主持, 部委级, 2019-01--2019-12
( 25 ) 压力传感器, 主持, 国家级, 2020-01--2021-12
( 26 ) 装备健康状态监测复合集成微传感器系统研究, 主持, 国家级, 2020-01--2023-12
参与会议
(1)A constriction channel based microfluidic flow cytometry enabling highthroughput quantification of multiple types of intracellular proteins in single cells 2019-06-28
(2)An electrochemical microseismometer based on a new electrolyte system to improve the low-frequency performances 2019-06-28
(3)The electrochemical seismometer based on a novel designed sensing electrode for undersea exploration 2019-06-28
(4)Development of a crossing constriction channel based microfluidic cytometry enabling the high-throughput quantification of single-cell electrical phenotypes 2019-06-28
(5) A resonant pressure micro sensor based on suspended assembly 2019-06-28
(6)Development of Micro-machined Seismic Sensor and Its Application 2019-05-05
(7)高性能MEMS电化学地震检波器 鳌山海洋传感器论坛 2019-01-17
(8)基于微流控芯片的单细胞电学特性高通量检测技术及应用 中国微米纳米技术学会首届微流控技术应用创新论坛 2018-12-09
(9)高精度硅谐振MEMS压力传感器关键技术 中国机械工程学会微纳制造分会年会 2018-11-09
(10)Numerical Study of the Frequency Charateristics of the Electrochemical Seismometer 2018-10-30
(11)高精度硅基谐振式压力传感器关键技术 中国微米纳米技术2018年学术年会 2018-10-21
(12)An Analytical Method for Modelling Pull-in Effect during Anodic Bonding 2018-09-08
(13)A Double-Ended Tuning Fork Based Resonant Pressure Micro-sensor Relying on Electrostatic Excitation and Piezoresistive Detection 2018-09-08
(14)The development of micromachined electrochmeical seismometer 2018-07-15
(15)The Development of Micro-machined Based Electrochemical Seismic Sensor 2017-11-21
(16)A Force-balanced Negative Feedback Method for MEMS Based Electrochemical Seismic Sensor 2017-10-30
(17)A Monolithic Three Axial Electrochemical Seismic Sensor Based on MEMS Technology 2017-10-30
(18)Development of micromachined molecular seismometer 2017-07-18
(19)A Monolithic Three Axial Electrochemical Seismic Sensor Based on MEMS Technology 2017-06-21
(20)A high-quality resonant pressure micro sensor withthrough-silicon-via electrical interconnections 2017-06-21
(21)单细胞生物物理特性高通量检测技术 第二届“微纳传感器与系统集成技术”青年学者论坛 2017-06-17
(22)High-sensitivity Electrochemical Seismometers Relying on Parylene-based Microelectrodes 2017-04-12
(23)Reduction of the Temperature Sensitivity of Anodic Bonded Resonant Pressure Micro Sensors 2017-04-12
(24)基于微流控芯片的单细胞生物物理特性高通量检测技术 第十七届“微言大义”研讨会 王军波 2017-01-22
(25)高性能MEMS电化学地震检波器研究 第一届“微纳机械测试理论与技术基础”青年学者论坛 王军波 2016-11-25
(26)A Novel Method Based on RF Detection Enabling Wireless and Passive LC Sensing Qiuxu Wei,Yanshuang Wang,Deyong Chen,Jian Chen,Junbo Wang 2016-10-29
(27)Effect of the Cathodes on the Characteristics of the MEMS Based Electrochemical Seismometer Zhenyuan Sun,Deyong Chen,Junbo Wang,Jian Chen,Tao Deng,Guanglei Li 2016-10-29
(28)无线无源颅内压传感器结构设计与优化 第十四届全国敏感元件与传感器学术会议 魏秋旭(#),王军波(*),陈健,陈德勇,赵明 2016-10-12
(29)A System Enabling Isolation and Electrical Property Characterization of Circulating Tumour Cells Tzu-Keng Chiu,Yang Zhao,Deyong Chen,Chia-Hsun Hsieh,Ke Wang,Wen-Pin Chou,Beiyuan Fan,Junbo Wang(*),Jian Chen(*),Min-Hsien Wu(*) 2016-10-09
(30)A Microfluidic System Enabling High-Throughput Single-Cell Intracellular Protein Quantification Xiufeng Li,Beiyuan Fan,Deyong Chen,Xiaoting Zhao,Wentao Yue,Junbo Wang(*),Jian Chen(*) 2016-10-09
(31)A 96-Well Three-Dimensional Microfluidic Wound-Healing Assay Rui Hao,Yuanchen Wei,Feng Chen,Deyong Chen,Wei Guo(*),Junbo Wang(*),Jian Chen(*) 2016-10-09
(32)A MEMS Based Electrochemical Seismometer with Central Working Frequency under 1 Hz and Ultra-low Self-noise Zhenyuan Sun(#),Deyong Chen(*),Jian Chen,Tao Deng,Guanglei Li,Junbo Wang(*),, 2016-07-28
(33)The effect of elasticity coefficient on the characteristics of MEMS based electrochemical seismic sensors Guanlei Li(#),Junbo Wang(*),Deyong Chen,Tao Deng,Zhenyuan Sun,Yonghao Xing,Jian Chen, 2016-07-24
(34)The Development of Micro-machined Based Electrochemical Seismic Sensor, Junbo Wang 2016-07-24
(35)Implantable Wireless Passive Intracranial Pressure Monitoring System Qiuxu Wei(#),Junbo Wang(*),Deyong Chen,Jian Chen,Ming Zhao 2016-06-25
(36)基于微流控芯片的单细胞生物物理特性高通量检测技术 王军波 2016-06-16
(37)A MEMS based electrochemical seismometer with a novel integrated sensing unit 2016-01-28
(38)A MEMS based electrochemical seismometer with a novel integrated sensing unit Zhenyuan Sun(#),Deyong Chen(*),Jian Chen,Tao Deng,Guanglei Li,Junbo Wang(*) 2016-01-24
(39)海底地震仪用高性能MEMS 电化学地震检波器研制 第二届全国海洋技术学术会议 2015-11-11
(40)An electrochemical seismometer with frequency features under regulation 2015-11-01
(41)Electrochemical vibration sensor with force balance feedback system 2015-11-01
(42)The effect of electrolyte concentration on the characteristics of MEMS based electrochemical seismic sensors 2015-11-01
(43)A 384-well microfluidic wound-healing assay 2015-10-28
(44)Classification of mouse tumor samples based on specific membrane capacitance and cytoplasm conductivity of single cells 2015-10-28
(45)高精度谐振式MEMS压力传感器 第三届国际(常州)传感器技术与应用高峰论坛 2015-10-22
(46)A resonant pressure sensor integrated with self-temperature sensing 2015-10-13
(47)A differential resonant pressure micro sensor with identical sensitivity of two resonant beams 2015-10-13
(48)Real-time and high-performance blood pressure monitoring system based on LC sensors 2015-10-13
(49)The effect of elasticity coefficient on the characteristics of MEMS based electrochemical seismic sensors 2015-10-13
(50)Microfluidic platform for tumor cell characterization and classification based on specific membrane capacitance and cytoplasm conductivity 2015-08-21
(51)Microfluidic studies of vascular smooth muscle cells 2015-08-21
(52)A tubing-free microfluidic wound-healing assay quantifying vascular smooth muscle cell migrtion 2015-06-23
(53)Temperature effects on characteristics of mems based electrochemical seismic sensors for linear motion detecting 2015-06-23
(54)A self-temperature compensating barometer with dual doubly-clamped resonators 2015-06-22
(55)Micro-machined based electrochemical vibration sensor and its applications 2015-05-11
(56)A Tubing-Free Microfluidic Wound-Healing Assay Quantifying Vascular Smooth Muscle Cell Migration 第九届全国微全分析系统学术会议 卫元晨,陈峰*,张韬*,陈德勇,贾鑫*,王军波,郭伟*,陈健 2014-10-31
(57)A Constriction Channel Based T-Shape Microfluidic Platform Enabling Continuous Single-Cell Electrical Property Characterization 第九届全国微全分析系统学术会议 赵阳,陈德勇, 薛成宬,王军波,陈健 2014-10-31
(58)A Microfluidic System Enabling Continuous Quantification of Specific Membrane Capacitance and Instantaneous Young’s Modulus of Single Cells 赵阳,陈德勇, 罗亚娜,陈峰,赵晓婷*,江妹*,岳文涛*,龙荣*,王军波,陈健 2014-10-26
(59)On-Chip Culture of Osteocytes 卫超,陈德勇,卫元晨,游莉丹*,王军波,陈健 2014-10-26
(60)Tumor Cell Classification Based on Instantaneous Young’s Modulus Using Constriction Channel based Microfluidic Devices 罗亚娜,陈德勇,赵阳,卫超,赵晓婷*,岳文涛*,龙荣*,王军波,陈健 2014-10-26
(61)Non-invasive Wireless And Passive MEMS Intraocular Pressure Sensor Based on Flexible Substrate 刘丽娟,王军波,陈德勇,陈健 2014-10-23
(62)MEMS眼压传感器研究进展综述 第十三届全国敏感元件与传感器学术会议 王军波,刘丽娟,陈德勇,陈健 2014-10-11
(63)电化学振动传感器 第十三届全国敏感元件与传感器学术会议 张正宇,王军波,陈德勇,何文涛,龚黎明 2014-10-10
(64)High-Q Resonant Pressure Sensor with Through-glass Electrical Interconnect Based on SOI wafer Technology 罗振宇,陈德勇,王军波 2014-08-31
(65)Gold Pattern on Highly Topographic Surface with Though-Silicon-Holes for Wire Interconnection Using Electrochemical Method 谢波,王军波,陈德勇,罗振宇, 2014-08-31
(66)The Study of Bandwidth Expansion Based on Electrochemical Vibration Sensor 张正宇,王军波,陈德勇,李忆南 2014-08-31
(67)On-Chip Tubing-Free Culture of Vascular Smooth Muscle Cells 卫元晨,陈峰*,张韬*,陈德勇,贾鑫*,王军波,郭伟*,陈健 2014-08-28
(68)Microfluidic Platform Enabling Tumor Cell Characterization and Classification Based on Specific Membrane Capacitance and Cytoplasm Conductivity 赵阳,赵晓婷,陈德勇,罗亚娜,江妹,岳文涛,王军波,陈健 2014-05-27
(69)Constriction Channel Based Microfluidic Systems Enabling Single-Cell Instantaneous Young’s Modulus Measurement In a Continuous Manner 罗亚娜,陈德勇,赵阳,卫超,赵晓婷,岳文涛,龙荣,王军波,陈健 2014-05-27
(70)Resonant Pressure Sensor with Through-glass Electrical Interconnect Based on SOI wafer Technology 罗振宇,陈德勇,王军波 2014-04-13
(71)Control System for an Electromagnetic Vibrating Ring Gyroscope Jili Liu 2013-11-07
(72)A SOI-MEMS Based Resonant Barometric Pressure Sensor with Differential Output 中国微米纳米技术学会第十五届学术年会 Zhenyu Luo 2013-11-07
(73)A Wireless Power-Free Pressure Sensor for Real-Time In Vivo Gastrointestinal Pressure Monitoring 中国微米纳米技术学会第十五届学术年会 Qiang Shi 2013-11-07
(74)A Differential Resonant Barometric Pressure Sensor Using SOI-MEMS Technology Zhenyu Luo 2013-11-04
(75)A Readout Circuit for Wireless Passive Resonant-Circuit Sensors Kaikai Bao 2013-11-04
(76)Extending upper cutoff frequency of electrochemical seismometer by usting extremely thin su8 insulating spacers Wentao he 2013-11-04
(77)Cell type classification based on specific membrane capacitance and cytoplasm conductivity using microfluidic devices Yang Zhao 2013-10-27
(78)A MEMS based electrochemical seismic sensor Tao Deng, et al 2013-06-09
(79)A microfluidic device capable of continuous quantification of single-cell specific membrane capacitance and cytoplasm conductivity Yang Zhao, et al 2013-06-05
(80)An electrostatically-driven and capacitively-sensed differential lateral resonant pressure microsensor Bo Xie 2013-04-07
(81)A microfluidic system enabling continuous characterization of single-cell specific membrane capacitance and cytoplasm conductivity Yang Zhao 2013-04-07
(82)An Electrostatically Driven - Capacitively Sensed Silicon Resonator Based on SOI- MEMS Technology Hailong Jiao 2012-11-04
(83)The Characteristics of MEMS Based Seismic Sensors Using the Electrochemical Approach Yunjie Fan 2012-11-04
(84)A wireless and power-free micro sensor enabling gastrointestinal pressure monitoring Qiang Shi, Junbo Wang, Deyong Chen, Jian Chen 2012-10-29
(85)A differential resonant accelerometer fabricated by SOI-MEMS technology Yanlong Shan, Junbo Wang, Deyong Chen 2012-07-11
(86)Sensors and Systems based on MEMS technology Junbo Wang 2012-07-06
(87)A Novel Micromachined Differential Resonant Accelerometer With Flexual Mechanisms Fabricated by SOI-MEMS Technology 商艳龙,王军波,涂晟,陈德勇 2011-10-28
(88)A Novel Micromachined Viscosity and Density Sensor Based on Resonant Torsional Paddle 李浩,王军波,李翔,陈德勇 2011-10-28
(89)Micro-machined resonant accelerometer with high sensitivity 王军波,商艳龙,涂晟,刘磊,陈德勇 2011-02-19
(90)A novel biosensor based on electromagnetic pendulous resonator for direct liquid detection 王军波,李浩,李翔,陈德勇 2011-02-19
(91)An electrostatically actuated micromachined vibrating ring gyroscope with highly symmetric support beams 陈德勇,张明,王军波 2010-11-01
(92)Design and experiment of a laterally driven micromachined resonant pressure sensor for barometers 陈德勇,李玉欣,刘猛,王军波 2010-09-05
(93)A micro-machined vibrating ring gyroscope with highly symmetric structure for harsh environment 王军波,陈李,张明,陈德勇 2010-01-20
项目协作单位
与英国卢瑟福国家实验室、德国明斯特大学、法国巴黎高等师范学院合作承担欧盟第七框架人员交换国际合作项目;与台湾长庚大学合作承担院“台湾青年学者计划”项目;与加拿大多伦多大学合作承担国家自然科学基金中加国际合作项目。
近期论文
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(1) Wireless Passive Intracranial Pressure Sensor Based on Vacuum Packaging, IEEE Sensors Journal, 2020, 通讯作者
(2) A MEMS Based Electrochemical Angular Accelerometer with Integrated Plane Electrodes for Seismic Motion Monitoring, IEEE Sensors Journal, 2020, 通讯作者
(3) The Electrochemical Seismometer Based on A Novel Designed Sensing Electrode for Undersea Exploration, IEEE Sensors Journal, 2020, 通讯作者
(4) Microfluidic Cytometry for High-Throughput Characterization of Single Cell Cytoplasmic Viscosity Using Crossing Constriction Channels, CYTOMETRY PART A, 2019, 通讯作者
(5) A Resonant Pressure Microsensor With a Stress Isolation Layer, IEEE SENSORS JOURNAL, 2019, 通讯作者
(6) A Temperature-Insensitive Resonant Pressure Micro Sensor Based on Silicon-on-Glass Vacuum Packaging, Sensors, 2019, 通讯作者
(7) , Microelectromechanical System-Based Electrochemical Seismometers with Two Pairs of Electrodes Integrated on One Chip, SENSORS, 2019, 通讯作者
(8) Resonant Pressure Micro Sensors Based on Dual Double Ended Tuning Fork Resonators, MICROMACHINES, 2019, 通讯作者
(9) Optimization of LC sensor enabling wireless passive intracranial pressure sensing, Microsystem Technologies, 2019, 通讯作者
(10) Charaterization of cytoplasm viscosity of single tumor cell cased on micropipette aspiration, Royal Society Open Science, 2019, 通讯作者
(11) A Resonant Pressure Microsensor with the Measurement Range of 1 MPa Based on Sensitivities Balanced Dual Resonators, Sensors, 2019, 通讯作者
(12) Crossing constriction channel-based microfluidic cytometry capable of electrically phenotyping large populations of single cells,, ANALYST, 2019, 通讯作者
(13) A Microfluidic Fluorescent Flow Cytometry Capable of Quantifying Cell Sizes and Numbers of Specific Cytosolic Proteins, Scientific Reports, 2018, 通讯作者
(14) A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection, Sensors, 2018, 通讯作者
(15) Mechanical property characterization of hundreds of single nuclei based on microfluidic constriction channel, CYTOMETRY PART A, 2018, 通讯作者
(16) Development of microfluidic impedance cytometry enabling the quantification of specific membrane capacitance and cytoplasm conductivity from 100,000 single cells, Biosensors & Bioelectronics, 2018, 通讯作者
(17) Wireless Passive Intracranial Pressure Sensor Based on a Microfabricated Flexible Capacitor, IEEE TRANSACTIONS ON ELECTRON DEVICES, 2018, 通讯作者
(18) Absolute Copy Numbers of -Actin Proteins Collected from 10,000 Single Cells, MICROMACHINES, 2018, 通讯作者
(19) A Monolithic Electrochemical Micro Seismic Sensor Capable of Monitoring Three-Dimensional Vibrations, Sensors, 2018, 通讯作者
(20) A Flexible Sensing Unit Manufacturing Method of Electrochemical Seismic Sensor, Sensors, 2018, 通讯作者
(21) A microfluidic flow cytometer enabling absolute quantification of single-cell intracellular proteins, Lab on a Chip, 2017, 通讯作者
(22) The Instrumentation of a Microfluidic Analyzer Enabling the Characterization of the Specific Membrane Capacitance, Cytoplasm Conductivity, and Instantaneous Young’s Modulus of Single Cells, Journal of the Royal Society Interface, 2017, 通讯作者
(23) A High-Consistency Broadband MEMS-Based Electrochemical Seismometer With Integrated Planar Microelectrodes, IEEE TRANSACTIONS ON ELECTRON DEVICES, 2017, 通讯作者
(24) A Microfabricated 96-Well Wound-HealingAssay, Cytometry Part A, 2017, 通讯作者
(25) Microelectromechanical systems based electrochemical seismic sensors with ananode and a cathode integrated on one chip, Journal of Micromechanics and Microengineering, 2017, 通讯作者
(26) Specific membrane capacitance, cytoplasm conductivity and instantaneous Young’s modulus of single tumour cells, Scientific Data, 2017, 通讯作者
(27) A low-sample-loss microfluidic system for the quantification of size-independent cellular electrical property—Its demonstration for the identification and characterization of circulating tumour cells (CTCs), Sensors and Actuators B: Chemical, 2017, 通讯作者
(28) A microfabricated 96-well 3D assay enabling high-throughput quantification of cellular invasion capabilities, Scientific Reports, 2017, 通讯作者
(29) Microelectromechanical systems based electrochemical seismic sensors with insulating spacers integrated electrodes for anetary exploration, IEEE Sensors Journal, 2016, 通讯作者
(30) Single-cell electrical phenotyping enabling the classification of mouse tumor samples, Scientific Reports, 2016, 通讯作者
(31) Development of Droplet Microfluidics Enabling High-Throughput Single-Cell Analysis, Molecules, 2016, 通讯作者
(32) Electrical Property Characterization of Neural Stem Cells in Differentiation, PLoS ONE, 2016, 通讯作者
(33) Development of Microfluidic Systems Enabling High-Throughput Single-Cell Protein Characterization, Sensors, 2016, 通讯作者
(34) 差分谐振式压力微传感器灵敏度匹配特性(英文), 强激光与粒子束, 2016, 通讯作者
(35) A resonant pressure microsensor capable of self-temperature compensation, Sensors, 2015, 通讯作者
(36) Constriction channel based single-cell mechanical property characterization, Micromachines, 2015, 通讯作者
(37) A lateral differential resonant pressure microsensor based on SOI-glass wafer-level vacuum packaging, Sensors, 2015, 通讯作者
(38) A tubing-free microfluidic wound healing assay enabling the quantification of vascular smooth muscle cell migration, Scientific Reports, 2015, 通讯作者
(39) Study of bandwidth expansion based on electrochemical vibration sensor, Key Engineering Materials,2015, 2015, 通讯作者
(40) Microfluidic impedance flow cytometry enabling high-throughput single-cell electrical property characterization, International Journal of Molecular Sciences, 2015, 通讯作者
(41) Non-invasive wireless and passive MEMS intraocular pressure sensor based on flexible substrate,, Applied Mechanics & Materials, 2015, 通讯作者
(42) 平面电极型MEMS电化学地震传感器, 光学精密工程, 2015, 第 1 作者
(43) MEMS宽带电化学地震检波器, 光学精 密工程, 2015, 第 3 作者
(44) Simultaneous characterization of instantaneous Young’s modulus and specific membrane capacitance of single cells using a microfluidic system, Sensors, 2015, 通讯作者
(45) Osteocyte culture in microfluidic devices, Biomicrofluidics, 2015, 通讯作者
(46) Vacuum-packaged resonant pressure sensor with dual resonators for high sensitivity and linearity,, Procedia Engineering, 2015, 通讯作者
(47) Classification of cells with membrane staining and/or fixation based on cellular specific membrane capacitance and cytoplasm conductivity, Micromachines, 2015, 通讯作者
(48) Tumor Cell Characterization and Classification Based on Cellular Specific Membrane Capacitance and Cytoplasm Conductivity, Biosensors and Bioelectronics, 2014, 通讯作者
(49) Parameter Screening in Microfluidics Based Hydrodynamic Single-Cell Trapping, The Scientific World Journal, 2014, 通讯作者
(50) A Constriction Channel Based Microfluidic System Enabling Continuous Characterization of Cellular Instantaneous Young’s Modulus, Sensors and Actuators B: Chemical, 2014, 通讯作者
(51) Vascular Smooth Muscle Cell Culture in Microfluidic Devices, Biomicrofluidics, 2014, 通讯作者
(52) In Vitro and In Vivo characterization of wireless and passive micro system enabling gastrointestinal pressure monitoring, Biomedical Microdevices, 2014, 通讯作者
(53) A readout circuit for wireless passive LC sensors and its application for gastrointestinal monitoring, Measurement Science and Technology, 2014, 通讯作者
(54) A MEMS Based Electrochemical Vibration Sensor for Seismic Motion Monitoring, Journal of Microelectromechanical Systems, 2014, 通讯作者
(55) Control System of an Electromagnetic Vibrating Ring Gyroscope, Key Engineering Materials, 2014, 第 3 作者
(56) Fabrication and test of an electromagnetic vibrating ring gyroscope based on SOI wafer, Journal of Electronics, 2014, 第 3 作者
(57) A SOI-MEMS Based Resonant Barometric Pressure Sensor with Differential Output, Key Engineering Materials, 2014, 第 3 作者
(58) A Wireless Power-Free Pressure Sensor for Real-Time In Vivo Gastrointestinal Pressure Monitoring, Key Engineering Materials, 2014, 通讯作者
(59) 谐振式MEMS压力传感器的制作及圆片级真空封装, 光学精密工程 , 2014, 第 3 作者
(60) 一种谐振式MEMS压力传感器单芯片级真空封装和低应力组装方法, 纳米技术与精密工程, 2013, 通讯作者
(61) An Electrostatically Driven-Capacitively Sensed Silicon Resonator Based on SOI-MEMS Technology, Nanotechnology and Precision Engineering, 2013, 第 3 作者
(62) The Characteristics of MEMS Based Seismic Sensors Using the Electrochemical Approach, Key Engineering Materials , 2013, 通讯作者
(63) Electrostatically driven and capacitively detected differential lateral resonant pressure microsensor, Micro and Nano Letters, 2013, 通讯作者
(64) A new stress isolation method in the packaging of resonant pressure micro sensors, Sensor Letters, 2013, 第 3 作者
(65) A micro electrochemical seismic sensor based on MEMS technologies, Sensors and Actuators, A, 2013, 第 3 作者
(66) A microfluidic system enabling continuous characterization of specific membrane capacitance and cytoplasm conductivity of single cells in suspension, Lab on a Chip, 2013, 通讯作者
(67) A microfluidic system enabling continuous characterization of specific membrane capacitance and cytoplasm conductivity of single cells in suspension, Biosensors and Bioelectronics, 2013, 通讯作者
(68) 基于SOI-MEMS 工艺的谐振式压力传感器研究, 传感技术学报, 2013, 第 3 作者
(69) Micro-machined resonant out-of-plane accelerometer with a differential structure fabricated by silicon-on-insulator-MEMS technology, Micro and Nano Letters, 2012, 第 1 作者
(70) Regulating parameters of electromagnetic micromachined vibrating ring gyroscope, Micro and Nano Letters, 2012, 第 3 作者
(71) Closed-loop Control of a SOI-MEMS Resonant Accelerometer with Electromagnetic Excitation, 纳米技术与精密工程, 2012, 第 1 作者
(72) 基于谐振式MEMS传感器的仪表开发关键技术, 仪表技术与传感器 , 2012, 第 3 作者
(73) Low Temperature Wafer Level Adhesive Bonding Using BCB for Resonant Pressure Sensor , Key Engineering Material, 2012, 第 3 作者
(74) Micro-machined Electrochemical Seismic Sensor with Interdigital Electrodes , Key Engineering Material, 2012, 第 4 作者
(75) Low Frequency Electrochemical Accelerometer with low Noise based on MEMS, Key Engineering Material, 2012, 第 4 作者
(76) A Flush-mounted Resonant Ice detection sensor with High Sensitivity, Key Engineering Material, 2012, 通讯作者
(77) Closed-loop Control of a SOI-MEMS Resonant Accelerometer with Electromagnetic Excitation, Key Engineering Material, 2012, 通讯作者
(78) A MEMS Based Seismic Sensor Using the Electrochemical Approach, Procedia Engineering , 2012, 第 4 作者
(79) Regulating parameters of electromagnetic micromachined vibrating ring gyroscope by feedback control, Micro and Nano Letters, 2012, 第 3 作者
(80) Z-axis differential silicon-on-insulator resonant accelerometer with high sensitivity, IET Micro and Nano Letters, 2011, 通讯作者
(81) Viscosity–density sensor with resonant torsional paddle for direct detection in liquid, IET Nanobiotechnology, 2011, 通讯作者
(82) MEMS应变式结冰传感器及其检测方法, 传感技术学报, 2011, 第 3 作者
(83) Z-axis Differential SOI-resonant accelerometer with high sensitivity, Micro and Nano Letters, 2011, 通讯作者
(84) 高灵敏度谐振式微加速度传感器的设计与制作, 传感技术学报, 2011, 通讯作者
(85) Direct-write piezoelectric polymeric nanogenerator with high energy conversion efficiency, Nano Letter, 2010, 第 3 作者
(86) 单晶硅振动环陀螺仪的制作, 光学精密工程, 2010, 第 3 作者
(87) 电磁激励谐振式MEMS压力传感器闭环控制研究, 传感技术学报, 2010, 通讯作者