Electromagnetic metamaterials, which are a major type of artificially engineered materials, have boosted the development of optical and photonic devices due to their unprecedented and controllable effective properties, including electric permittivity and magnetic permeability. Metamaterials consist of arrays of subwavelength unit cells, which are also known as meta-atoms. Importantly, the effective properties of metamaterials are mainly determined by the geometry of the constituting subwavelength unit cells rather than their chemical composition, enabling versatile designs of their electromagnetic properties. Recent research has mainly focused on reconfigurable, tunable, and nonlinear metamaterials towards the development of metamaterial devices, namely, metadevices, via integrating actuation mechanisms and quantum materials with meta-atoms. Microelectromechanical systems (MEMS), or microsystems, provide powerful platforms for the manipulation of the effective properties of metamaterials and the integration of abundant functions with metamaterials. In this review, we will introduce the fundamentals of metamaterials, approaches to integrate MEMS with metamaterials, functional metadevices from the synergy, and outlooks for metamaterial-enabled photonic devices.

电磁超材料是一种主要的人工工程材料，由于其空前且可控的有效特性，包括介电常数和磁导率，推动了光学和光子器件的发展。超材料由亚波长单位单元阵列组成，也称为超原子。重要的是，超材料的有效特性主要取决于构成亚波长单位单元的几何形状，而不是它们的化学成分，从而能够对其电磁特性进行多种设计。最近的研究主要集中在可重构、可调谐和非线性超材料上，通过将驱动机制和量子材料与超原子集成来开发超材料器件，即超器件。微机电系统 (MEMS) 或微系统为操纵超材料的有效特性和丰富功能与超材料的集成提供了强大的平台。在这篇综述中，我们将介绍超材料的基本原理、将 MEMS 与超材料集成的方法、协同作用的功能性超器件，以及支持超材料的光子器件的前景。