Turbomolecular pumps with ultrahigh vacuum performances are a desired technology among modern vacuum systems, which requires the pump to synchronously possess the wide pumping speed and high vacuum. This paper describes a systematic design methodology for a magnetically levitated turbomolecular pump with consideration of multiphysics constraints, such as the mechanical strength, rotor dynamics, electromagnetic losses, and thermal characteristic. These variables will directly decide the acquisition of high vacuum performances. The design process for such high-performance pumps requires multidisciplinary and highly iterative due to the complex interaction of the many design variables involved. The structure of the bladed rotor is determined in terms of the material selection and mechanical verification. In this paper, an effective modeling method is presented to achieve accurate bending modes of the bladed rotor. An assessment on the loss level and the thermal limit is performed to ensure the temperature rise of the pump within the acceptable range. The measured results show that the pump can achieve the high vacuum performance with the pumping speed of 4370 l/s and the lowest working pressure of 10-8 magnitude. The proposed design process described in this paper provides the general guidelines for the multidisciplinary design of high-performance turbomolecular pumps.

中文翻译：

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具有超高真空性能的涡轮分子泵的多学科设计策略


具有超高真空性能的涡轮分子泵是现代真空系统中的理想技术，它要求泵同步具有宽抽速和高真空。本文介绍了一种磁悬浮涡轮分子泵的系统设计方法，该方法考虑了机械强度、转子动力学、电磁损耗和热特性等多物理场约束。这些变量将直接决定高真空性能的获得。由于涉及许多设计变量的复杂相互作用，这种高性能泵的设计过程需要多学科和高度迭代。叶片转子的结构是根据材料选择和机械验证来确定的。该文提出了一种有效的建模方法，以实现叶片转子的精确弯曲模式。对损失水平和热极限进行评估，以确保泵的温升在可接受的范围内。测量结果表明，该泵在抽速为 4370 l/s 和 10-8 级的最低工作压力下可实现高真空性能。本文描述的建议设计过程为高性能涡轮分子泵的多学科设计提供了一般指南。