Electrode-Free Anodic Oxidation Nanolithography of Low-Dimensional Materials,Nano Letters

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Electrode-Free Anodic Oxidation Nanolithography of Low-Dimensional Materials
Nano Letters ( IF 9.6 ) Pub Date : 2018-11-30 00:00:00 , DOI: 10.1021/acs.nanolett.8b04166
Hongyuan Li _{1,

2} , Zhe Ying _{1,

2} , Bosai Lyu _{1,

2} , Aolin Deng _{1,

2} , Lele Wang _{1,

2} , Takashi Taniguchi ₃ , Kenji Watanabe ₃ , Zhiwen Shi _{1,

2}

Affiliation

Scanning probe lithography based on local anodic oxidation (LAO) provides a robust and general nanolithography tool for a wide range of applications. Its practical use, however, has been strongly hampered due to the requirement of a prefabricated microelectrode to conduct the driving electrical current. Here we report a novel electrode-free LAO technique, which enables in situ patterning of as-prepared low-dimensional materials and heterostructures with great flexibility and high precision. Unlike conventional LAO driven by a direct current, the electrode-free LAO is driven by a high-frequency (>10 kHz) alternating current applied through capacitive coupling, which eliminates the need of a contacting electrode and can be used even for tailoring insulating materials. Using this technique, we demonstrated flexible nanolithography of graphene, hexagonal boron nitride, and carbon nanotubes on insulating substrates with ∼10-nanometer precision. In addition, the electrode-free LAO exhibits high etching quality without oxide residues left. Such an in situ and electrode-free nanolithography with high etching quality opens up new opportunities for fabricating ultraclean nanoscale devices and heterostructures with great flexibility.

中文翻译：

低尺寸材料的无电极阳极氧化纳米光刻

基于局部阳极氧化（LAO）的扫描探针光刻技术为各种应用提供了一种强大而通用的纳米光刻工具。然而，由于需要预制的微电极来传导驱动电流，因此其实际使用受到了严重的阻碍。在这里，我们报告了一种新颖的无电极LAO技术，该技术可对制备的低维材料和异质结构进行原位图案化，具有很高的灵活性和高精度。与传统的LAO由直流电驱动不同，无电极的LAO由通过电容耦合施加的高频（> 10 kHz）交流电驱动，这消除了对接触电极的需求，甚至可用于定制绝缘材料。使用这项技术，我们展示了石墨烯的柔性纳米光刻技术，六方氮化硼和绝缘基底上的碳纳米管，精度约为10纳米。另外，无电极的LAO表现出高蚀刻质量，而没有残留氧化物。这种具有高蚀刻质量的原位无电极纳米光刻技术为制造具有极大灵活性的超净纳米级器件和异质结构开辟了新的机遇。

更新日期：2018-11-30

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