The capability of fabricating three dimensional (3-D) nanostructures with desired morphology is a key to realizing effective light-harvesting strategy in optical applications. In this work, we report a novel 3-D nanopatterning technique that combines ion-assisted aerosol lithography (IAAL) and soft lithography that serves as a facile method to fabricate 3-D nanostructures. Aerosol nanoparticles can be assembled into desired 3-D nanostructures via ion-induced electrostatic focusing and antenna effects from charged nanoparticle structures. Replication of the structures with a polymeric mold allows high throughput fabrication of 3-D nanostructures with various liquid-soluble materials. 3-D flower-patterned polydimethylsiloxane (PDMS) stamp was prepared using the reported technique and utilized for fabricating 3-D nanopatterned mesoporous TiO₂ layer, which was employed as the electron transport layer in perovskite solar cells. By incorporating the 3-D nanostructures, absorbed photon-to-current efficiency of >95% at 650nm wavelength and overall power conversion efficiency of 15.96% were achieved. The enhancement can be attributed to an increase in light harvesting efficiency in a broad wavelength range from 400 to 800nm and more efficient charge collection from enlarged interfacial area between TiO₂ and perovskite layers. This hybrid nanopatterning technique has demonstrated to be an effective method to create textures that increase light harvesting and charge collection with 3-D nanostructures in solar cells.

中文翻译：

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轻松制造用于高效钙钛矿太阳能电池的三维TiO2结构

制造具有所需形态的三维（3-D）纳米结构的能力是在光学应用中实现有效的光收集策略的关键。在这项工作中，我们报告了一种新颖的3-D纳米图案化技术，该技术结合了离子辅助气溶胶光刻（IAAL）和软光刻技术，可作为制造3-D纳米结构的简便方法。可以通过离子诱导的静电聚焦和来自带电纳米颗粒结构的天线效应将气溶胶纳米颗粒组装成所需的3-D纳米结构。用聚合物模具复制结构允许使用各种液体可溶性材​​料高产量地制造3-D纳米结构。使用已报道的技术制备了3-D花型聚二甲基硅氧烷（PDMS）压模，并用于制造3-D纳米型介孔TiO_第二层，用作钙钛矿太阳能电池中的电子传输层。通过掺入3-D纳米结构，在650nm波长处吸收的光子-电流效率＞ 95％，总功率转换效率为15.96％。这种增强可以归因于在从400nm到800nm的较宽波长范围内光收集效率的提高，以及从TiO ₂和钙钛矿层之间扩大的界面区域更有效的电荷收集。这种混合纳米图案技术已被证明是一种有效的方法，可以创建纹理来增加太阳能电池中3-D纳米结构的光收集和电荷收集。