Solution-based methods represent the most widespread approach used to deposit hybrid organic-inorganic perovskite films for low-cost but efficient solar cells. However, solution-process techniques offer limited control over film morphology and crystallinity, and most importantly do not allow sequential film deposition to produce perovskite-perovskite heterostructures. Here the successful deposition of CH₃NH₃PbI₃ (MAPI) thin films by RF-magnetron sputtering is reported, an industry-tested method to grow large area devices with precisely controlled stoichiometry. MAPI films are grown starting from a single-target made of CH₃NH₃I (MAI) and PbI₂. Films are single-phase, with a barely detectable content of unreacted PbI₂, full surface coverage and thickness ranging from less than 200 nm to more than 3 μm. Light absorption and emission properties of the deposited films are comparable to as-grown solution-processed MAPI films. The development of vapor-phase deposition methods is of interest to advance perovskite photovoltaic devices with the possibility of fabricating perovskite multijunction solar cells or multicolor bright light-emitting devices in the whole visible spectrum.

中文翻译：

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杂化钙钛矿的新型物理气相沉积方法：通过射频磁控溅射法生长MAPbI3薄膜。

基于解决方案的方法代表了用于沉积低成本但高效太阳能电池的有机-无机钙钛矿杂化膜的最广泛方法。然而，固溶处理技术对膜的形态和结晶度提供了有限的控制，最重要的是不允许连续的膜沉积产生钙钛矿-钙钛矿异质结构。此处报道了通过射频磁控溅射成功沉积CH ₃ NH ₃ PbI ₃（MAPI）薄膜的方法，这是一种经过工业测试的方法，可以通过精确控制的化学计量来生长大面积器件。MAPI膜从由CH ₃ NH ₃ I（MAI）和PbI ₂制成的单个靶材开始生长。薄膜是单相的，未反应的PbI ₂含量几乎无法检测，整个表面覆盖范围和厚度范围从小于200 nm到大于3μm。沉积膜的光吸收和发射特性可与原液处理的MAPI膜媲美。气相沉积方法的发展对于推进钙钛矿光伏器件是有意义的，其具有在整个可见光谱中制造钙钛矿多结太阳能电池或多色明亮发光器件的可能性。