Directed block copolymer self-assembly implemented via surface-embedded electrets.,Nature Communications

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Directed block copolymer self-assembly implemented via surface-embedded electrets.
Nature Communications ( IF 14.7 ) Pub Date : 2016-Feb-15 , DOI: 10.1038/ncomms10752
Mei-Ling Wu _{1,

2,

3} , Dong Wang _{1,

2} , Li-Jun Wan _{1,

2}

Affiliation

Block copolymer (BCP) nanolithography is widely recognized as a promising complementary approach to circumvent the feature size limits of conventional photolithography. The directed self-assembly of BCP thin film to form ordered nanostructures with controlled orientation and localized pattern has been the key challenge for practical nanolithography applications. Here we show that BCP nanopatterns can be directed on localized surface electrets defined by electron-beam irradiation to realize diverse features in a simple, effective and non-destructive manner. Charged electrets can generate a built-in electric field in BCP thin film and induce the formation of perpendicularly oriented microdomain of BCP film. The electret-directed orientation control of BCP film can be either integrated with mask-based patterning technique or realized by electron-beam direct-writing method to fabricate microscale arbitrary lateral patterns down to single BCP cylinder nanopattern. The electret-directed BCP self-assembly could provide an alternative means for BCP-based nanolithography, with high resolution.

中文翻译：

通过表面嵌入驻极体实现定向嵌段共聚物自组装。

嵌段共聚物（BCP）纳米光刻被广泛认为是一种有前途的补充方法，可以规避传统光刻的特征尺寸限制。 BCP薄膜的定向自组装形成具有受控取向和局部图案的有序纳米结构一直是实际纳米光刻应用的关键挑战。在这里，我们展示了 BCP 纳米图案可以定向到电子束辐照定义的局部表面驻极体上，以简单、有效和非破坏性的方式实现多种特征。带电驻极体可以在BCP薄膜中产生内建电场，并诱导BCP薄膜垂直取向的微区的形成。 BCP薄膜的驻极体定向取向控制可以与基于掩模的图案化技术集成，也可以通过电子束直写方法实现，以制造微尺度任意横向图案直至单个BCP圆柱纳米图案。驻极体引导的 BCP 自组装可以为基于 BCP 的纳米光刻提供一种高分辨率的替代方法。

更新日期：2016-02-19

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