Multiscale Hierarchical Design of a Flexible Piezoresistive Pressure Sensor with High Sensitivity and Wide Linearity Range,Small

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Multiscale Hierarchical Design of a Flexible Piezoresistive Pressure Sensor with High Sensitivity and Wide Linearity Range
Small ( IF 13.0 ) Pub Date : 2018-05-30 , DOI: 10.1002/smll.201800819
Jidong Shi _{1,

2} , Liu Wang ₃ , Zhaohe Dai ₃ , Lingyu Zhao _{1,

2} , Mingde Du _{1,

2} , Hongbian Li ₁ , Ying Fang _{1,

4}

Affiliation

Flexible piezoresistive pressure sensors have been attracting wide attention for applications in health monitoring and human‐machine interfaces because of their simple device structure and easy‐readout signals. For practical applications, flexible pressure sensors with both high sensitivity and wide linearity range are highly desirable. Herein, a simple and low‐cost method for the fabrication of a flexible piezoresistive pressure sensor with a hierarchical structure over large areas is presented. The piezoresistive pressure sensor consists of arrays of microscale papillae with nanoscale roughness produced by replicating the lotus leaf's surface and spray‐coating of graphene ink. Finite element analysis (FEA) shows that the hierarchical structure governs the deformation behavior and pressure distribution at the contact interface, leading to a quick and steady increase in contact area with loads. As a result, the piezoresistive pressure sensor demonstrates a high sensitivity of 1.2 kPa⁻¹ and a wide linearity range from 0 to 25 kPa. The flexible pressure sensor is applied for sensitive monitoring of small vibrations, including wrist pulse and acoustic waves. Moreover, a piezoresistive pressure sensor array is fabricated for mapping the spatial distribution of pressure. These results highlight the potential applications of the flexible piezoresistive pressure sensor for health monitoring and electronic skin.

中文翻译：

高灵敏度和宽线性范围的柔性压阻式压力传感器的多尺度分层设计

柔性压阻式压力传感器由于其简单的设备结构和易于读取的信号而在健康监测和人机界面中引起了广泛的关注。对于实际应用，非常需要具有高灵敏度和宽线性范围的柔性压力传感器。在此，提出了一种简单且低成本的方法，用于制造具有大面积分层结构的柔性压阻式压力传感器。压阻式压力传感器由微尺度的乳头状阵列组成，这些纳米状的乳头状结构是通过复制荷叶的表面并喷涂石墨烯墨水而产生的。有限元分析（FEA）表明，分层结构控制着接触界面的变形行为和压力分布，导致与负载的接触面积快速稳定地增加。结果，压阻式压力传感器显示出1.2 kPa的高灵敏度^-1，线性范围从0到25 kPa。灵活的压力传感器适用于灵敏的小振动监测，包括手腕脉冲和声波。此外，制造压阻式压力传感器阵列以映射压力的空间分布。这些结果突出了柔性压阻压力传感器在健康监测和电子皮肤中的潜在应用。

更新日期：2018-05-30

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