Solid-state membranes are finding use in many applications in nanoelectronics and nanomedicine, from single molecule sensors to water filtration, and yet many of their electronics applications are limited by the relatively high current noise and low bandwidth stemming from the relatively high capacitance (>10 pF) of the membrane chips. To address this problem, we devised an integrated fabrication process to grow and define circular silicon nitride membranes on glass chips that successfully lower the chip capacitance to below 1 pF. We use these devices to demonstrate low-noise, high-bandwidth DNA translocation measurements. We also make use of this versatile, low-capacitance platform to suspend other thin, two-dimensional membrane such as graphene.

中文翻译：

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具有小于1pF电容的玻璃芯片上的悬浮固态膜，用于生物分子传感应用。

从单分子传感器到水过滤，固态膜已在纳米电子学和纳米医学的许多应用中找到了应用，但由于相对较高的电容（> 10，相对较高的电流噪声和较低的带宽），固态膜仍在许多电子应用中受到限制。 pF）的膜片。为了解决这个问题，我们设计了一种集成制造工艺来在玻璃芯片上生长并定义圆形氮化硅膜，从而成功地将芯片电容降低至1 pF以下。我们使用这些设备来演示低噪声，高带宽DNA易位测量。我们还利用这个通用的低电容平台来悬挂其他薄的二维薄膜，例如石墨烯。