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Epitaxial Growth of β-Bi2O3 Thin Films and Particles with Mist Chemical Vapor Deposition
Crystal Growth & Design ( IF 3.2 ) Pub Date : 2019-11-11 , DOI: 10.1021/acs.cgd.9b01033
Zaichun Sun 1 , Daichi Oka 1 , Tomoteru Fukumura 1, 2
Affiliation  

Metastable β-Bi2O3 (201) epitaxial thin films and particles were synthesized on α-Al2O3 (0001) single crystal substrates with mist chemical vapor deposition. With increasing synthesis temperature, the morphology of β-Bi2O3 was transformed from flat thin film with root-mean-square roughness of about 1 nm to nano- or micro-particles, in which the thin films and particles showed good crystallinity despite the large lattice mismatch between β-Bi2O3 and α-Al2O3. The key factor to stabilize the metastable β-phase was crystallization from the amorphous phase by solid phase epitaxy. Short postannealing significantly improved the crystallinity and surface flatness.

中文翻译:

的外延生长β-Bi系2 ö 3薄膜和微粒薄雾化学气相沉积

亚稳β-Bi系2 ö 3(201)外延薄膜和颗粒上的α-Al合成2 ö 3(0001),有薄雾化学气相沉积单晶衬底。随着合成温度,形态β-Bi系2 ö 3是从平坦的薄膜转化有根均方粗糙度约为1nm至纳米或微米颗粒,其中,所述薄膜和颗粒显示出良好的结晶度,尽管之间的大的晶格失配β-Bi系2 ö 3和α-Al系2 ö 3。稳定亚稳态β相的关键因素是通过固相外延从无定形相中结晶出来。短时间的后退火显着改善了结晶度和表面平整度。
更新日期:2019-11-11
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