使用pn结的局部机械致动。,Scientific Reports

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使用pn结的局部机械致动。
Scientific Reports ( IF 3.8 ) Pub Date : 2019-10-16 , DOI: 10.1038/s41598-019-49988-z
Mikhail Kanygin ₁ , Abbin Perunnilathil Joy ₁ , Behraad Bahreyni ₁

Affiliation

我们正在报告由典型pn结耗尽区内感应出的内力驱动的微型电动执行器的制造和表征。耗尽区致动器基于外部电势对pn结耗尽区内的内部电场和净空间电荷的相互作用进行调制。就性能而言，耗尽区致动器介于静电致动器和压电致动器之间，在静电致动器中，物理间隙将两个电极上的电荷分开；在压电致动器中，电荷之间的间隔约为材料的晶格常数。建立了耗尽区执行器对施加电势的响应的解析模型，并进行了实验验证。原型微机械装置利用了耗尽区致动器产生的局部应力，以在远低于结构共振频率的频率下产生机械振动。激光多普勒振动计用于测量和比较由耗尽区和静电致动器引起的位移和振动模式。利用耗尽区致动器既不需要蚀刻窄的间隙，这在技术上是有挑战性的，也不需要将压电材料引入到制造工艺流程中。简单的工作原理以及利用该技术进行小规模的各种优化线性或非线性致动的可能性，为微机械和纳米机械设备的精确机电转换提供了机会。因此，这些执行器适用于微机械和纳米机械系统以及微电子电路的共同制造。另外，产生的应变仅取决于耗尽区规格和激励电压，而不与器件尺寸成比例。这样，耗尽区致动器可以是有效的纳米级机电致动的候选者。

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Localized Mechanical Actuation using pn Junctions.

We are reporting on the fabrication and characterization of microscale electromechanical actuators driven by the internal forces induced within the depletion region of a typical pn junction. Depletion region actuators operate based on the modulation of the interactions of the internal electric field and the net space charge within the depletion region of a pn junction by an external potential. In terms of performance, depletion region actuators fall between electrostatic actuators, where a physical gap separates the charges on two electrodes, and piezoelectric actuators, where the separation between the charges is on the order of lattice constants of the material. An analytic model of depletion region actuator response to an applied potential is developed and verified experimentally. The prototype micro-mechanical device utilized the local stresses produced by the depletion region actuators to generate mechanical vibrations at frequencies far below the resonance frequencies of the structure. A laser Doppler vibrometer was used to measure and compare the displacements and vibration patterns caused by the depletion region and electrostatic actuators. Utilizing depletion region actuators neither requires etching of narrow gaps, which is technically challenging nor is there a need for introducing piezoelectric materials into the fabrication process flow. The simple operating principle and the possibility of exploiting the technique for various optimized linear or nonlinear actuation at small scales provide opportunities for precise electro-mechanical transduction for micro- and nano-mechanical devices. These actuators are therefore suited for the co-fabrication of micro- and nano-mechanical systems and microelectronic circuits. Additionally, the produced strains depend only on the depletion region specifications and the excitation voltage and do not scale with device dimensions. As such, depletion region actuators can be candidates for efficient nanoscale electromechanical actuation.

更新日期：2019-10-17

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