Scientific Reports ( IF 3.8 ) Pub Date : 2019-09-10 , DOI: 10.1038/s41598-019-49324-5 Jianxun Hong 1, 2 , Andrew M Spring 3 , Feng Qiu 1 , Shiyoshi Yokoyama 1, 3
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We propose a high efficiency apodized grating coupler with a bottom reflector for silicon nitride photonic integrated circuits. The reflector consists of a stack of alternate silicon nitride and silicon dioxide quarter-wave films. The design, fabrication and optical characterization of the couplers has been presented. The measured fiber to detector insertion loss was −3.5 dB which corresponds to a peak coupling efficiency of −1.75 dB. A 3 dB wavelength bandwidth of 76.34 nm was demonstrated for the grating coupler with a 20-layer reflector. The fabrication process is CMOS-compatible and requires only a single etching step.
中文翻译：
具有多层底部反射器的高效氮化硅波导光栅耦合器。
我们提出了一种具有底部反射器的高效变迹光栅耦合器，用于氮化硅光子集成电路。反射器由一叠交替的氮化硅和二氧化硅四分之一波膜组成。已经介绍了耦合器的设计，制造和光学特性。测得的光纤到检测器的插入损耗为-3.5 dB，对应于-1.75 dB的峰值耦合效率。带有20层反射器的光栅耦合器的3 dB波长带宽为76.34 nm。该制造工艺是CMOS兼容的，并且仅需要一个蚀刻步骤。
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