Two-dimensional (2D) molybdenum ditelluride (MoTe₂) exhibits an intriguing polymorphic nature, showing stable semiconducting 2H and metallic 1T′ phases at room temperature. Polymorphism in MoTe₂ presents new opportunities in developing phase-change memory, high- performance transistors, and spintronic devices. However, it also poses challenges in synthesizing homogeneous MoTe₂ with a precisely controlled phase. Recently, a new yet simple method using sputtering and 2D solid-phase crystallization (SPC) is proposed for synthesizing high-quality and large-area MoTe₂. This study investigates the polymorphism control of MoTe₂ synthesis using 2D SPC. The Te/Mo ratio and oxygen content in the as-sputtered films correlate strongly with the final phase and electrical properties of SPC MoTe₂. Furthermore, the SPC thermal budget may be exploited for stabilizing a deterministic phase. The comprehensive experiments presented in this work demonstrate the versatile and precise controllability on the MoTe₂ phase by using the simple 2D SPC technique.

二维（2D）二碲化钼（MoTe ₂）表现出令人着迷的多晶型性质，在室温下显示出稳定的半导体2H和金属1T'相。MoTe _2中的多态性为开发相变存储器，高性能晶体管和自旋电子器件提供了新的机遇。但是，在合成具有精确控制相的均质MoTe ₂时也带来了挑战。近来，提出了一种使用溅射和二维固相结晶（SPC）的新而简单的方法来合成高质量和大面积的MoTe ₂。本研究探讨了MoTe ₂的多态性控制使用2D SPC进行合成。溅射后的薄膜中的Te / Mo比和氧含量与SPC MoTe ₂的最终相和电学特性密切相关。此外，可以利用SPC热预算来稳定确定性阶段。通过简单的2D SPC技术，这项工作中提出的全面实验证明了MoTe ₂相的通用性和精确性。