Modern transmission X-ray microscopy techniques provide very high resolution at low and medium X-ray energies, but suffer from a limited field-of-view. If sub-micrometre resolution is desired, their field-of-view is typically limited to less than one millimetre. Although the field-of-view increases through combining multiple images from adjacent regions of the specimen, so does the required data acquisition time. Here, we present a method for fast full-field super-resolution transmission microscopy by structured illumination of the specimen. This technique is well-suited even for hard X-ray energies above 30 keV, where efficient optics are hard to obtain. Accordingly, investigation of optically thick specimen becomes possible with our method combining a wide field-of-view spanning multiple millimetres, or even centimetres, with sub-micron resolution and hard X-ray energies.

现代的透射X射线显微镜技术在低和中X射线能量下提供了很高的分辨率，但视野有限。如果需要亚微米分辨率，则通常将其视场限制在小于一毫米的范围内。尽管通过合并样本相邻区域的多个图像可以增加视野，但所需的数据采集时间也可以增加。在这里，我们提出一种通过标本的结构化照明快速全视野超分辨率透射显微镜的方法。即使在30 keV以上的硬X射线能量难以获得有效的光学器件的情况下，该技术也非常适合。因此，利用我们的方法将跨越几毫米甚至几厘米的宽视场相结合，可以对光学厚度的标本进行研究，