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Flexible Capacitive Pressure Sensor Enhanced by Tilted Micropillar Arrays
ACS Applied Materials & Interfaces ( IF 8.3 ) Pub Date : 2019-04-22 00:00:00 , DOI: 10.1021/acsami.9b03718 Yongsong Luo 1 , Jinyou Shao 1 , Shouren Chen 1 , Xiaoliang Chen 1 , Hongmiao Tian 1 , Xiangming Li 1 , Liang Wang 1 , Duorui Wang 1 , Bingheng Lu 1
ACS Applied Materials & Interfaces ( IF 8.3 ) Pub Date : 2019-04-22 00:00:00 , DOI: 10.1021/acsami.9b03718 Yongsong Luo 1 , Jinyou Shao 1 , Shouren Chen 1 , Xiaoliang Chen 1 , Hongmiao Tian 1 , Xiangming Li 1 , Liang Wang 1 , Duorui Wang 1 , Bingheng Lu 1
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Sensitivity of the sensor is of great importance in practical applications of wearable electronics or smart robotics. In the present study, a capacitive sensor enhanced by a tilted micropillar array-structured dielectric layer is developed. Because the tilted micropillars undergo bending deformation rather than compression deformation, the distance between the electrodes is easier to change, even discarding the contribution of the air gap at the interface of the structured dielectric layer and the electrode, thus resulting in high pressure sensitivity (0.42 kPa–1) and very small detection limit (1 Pa). In addition, eliminating the presence of uncertain air gap, the dielectric layer is strongly bonded with the electrode, which makes the structure robust and endows the sensor with high stability and reliable capacitance response. These characteristics allow the device to remain in normal use without the need for repair or replacement despite mechanical damage. Moreover, the proposed sensor can be tailored to any size and shape, which is further demonstrated in wearable application. This work provides a new strategy for sensors that are required to be sensitive and reliable in actual applications.
中文翻译：
倾斜式微柱阵列增强了柔性电容式压力传感器
在可穿戴电子设备或智能机器人的实际应用中，传感器的灵敏度至关重要。在本研究中，开发了一种由倾斜的微柱阵列结构介电层增强的电容传感器。由于倾斜的微柱承受的是弯曲变形而不是压缩变形，因此电极之间的距离更容易改变，甚至消除了结构化介电层与电极界面处的气隙的影响，从而导致了较高的压力灵敏度（0.42 kPa –1）和很小的检出限（1 Pa）。另外，由于消除了不确定的气隙，电介质层与电极牢固地结合在一起，这使结构坚固并且赋予传感器高稳定性和可靠的电容响应。这些特性使设备即使受到机械损坏，也可以保持正常使用而无需修理或更换。而且，所提出的传感器可以定制为任何尺寸和形状，这在可穿戴应用中得到了进一步证明。这项工作为在实际应用中要求敏感和可靠的传感器提供了一种新的策略。
更新日期：2019-04-22
中文翻译：
倾斜式微柱阵列增强了柔性电容式压力传感器
在可穿戴电子设备或智能机器人的实际应用中，传感器的灵敏度至关重要。在本研究中，开发了一种由倾斜的微柱阵列结构介电层增强的电容传感器。由于倾斜的微柱承受的是弯曲变形而不是压缩变形，因此电极之间的距离更容易改变，甚至消除了结构化介电层与电极界面处的气隙的影响，从而导致了较高的压力灵敏度（0.42 kPa –1）和很小的检出限（1 Pa）。另外，由于消除了不确定的气隙，电介质层与电极牢固地结合在一起，这使结构坚固并且赋予传感器高稳定性和可靠的电容响应。这些特性使设备即使受到机械损坏，也可以保持正常使用而无需修理或更换。而且，所提出的传感器可以定制为任何尺寸和形状，这在可穿戴应用中得到了进一步证明。这项工作为在实际应用中要求敏感和可靠的传感器提供了一种新的策略。
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