A high-resolution lens-coupled X-ray imaging detector equipped with a thin-layer transparent ceramics scintillator has been developed. The scintillator consists of a 5 μm thick Ce-doped ${\mathrm{Lu}}_3{\mathrm{Al}}_5{\mathrm{O}}_{12}$ layer (LuAG:Ce) bonded onto the support substrate of the non-doped LuAG ceramics by using a solid-state diffusion technique. Secondary electron microscopy of the bonded interface indicated that the crystal grains were densely packed without any pores in the optical wavelength scale, indicating a quasi-uniform refractive index across the interface. This guarantees high transparency and minimum reflection, which are essential properties for X-ray imaging detectors. The LuAG:Ce scintillator was incorporated into an X-ray imaging detector coupled with an objective lens with a numerical aperture of 0.85 and an optical magnification of 100. The scintillation light was imaged onto a complementary metal–oxide–semiconductor image sensor. The effective pixel size on the scintillator plane was 65 nm. X-ray transmission images of 200 nm line-and-space patterns were successfully resolved. The high spatial resolution was demonstrated by X-ray transmission images of large integrated circuits with the wiring patterns clearly visualized.

中文翻译：

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开发X射线成像检测器，以通过使用通过固态扩散结合的透明陶瓷层来分辨200 nm的线和空间图案

已经开发了配备有薄层透明陶瓷闪烁体的高分辨率透镜耦合X射线成像检测器。闪烁体由5μm厚的Ce掺杂组成${鲁}_3{铝}_5{\mathrm{Ø}}_{12}$通过使用固态扩散技术将层（LuAG：Ce）粘结到非掺杂LuAG陶瓷的支撑衬底上。结合界面的二次电子显微镜表明，晶粒紧密堆积，在光波长范围内没有任何孔，表明在界面上的准均匀折射率。这保证了高透明度和最小反射率，这是X射线成像检测器的基本特性。LuAG：Ce闪烁体被结合到X射线成像检测器中，该检测器与物镜的数值孔径为0.85，光学放大倍数为100。闪烁光被成像到互补的金属-氧化物-半导体图像传感器上。闪烁体平面上的有效像素大小为65 nm。成功解析了200 nm线和间隔图案的X射线透射图像。大型集成电路的X射线透射图像显示了高空间分辨率，且布线图清晰可见。