Rapid Engraving of Artificial Compound Eyes from Curved Sapphire Substrate,Advanced Functional Materials

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Rapid Engraving of Artificial Compound Eyes from Curved Sapphire Substrate
Advanced Functional Materials ( IF 18.5 ) Pub Date : 2019-03-03 , DOI: 10.1002/adfm.201900037
Xue‐Qing Liu ₁ , Shuang‐Ning Yang ₂ , Lei Yu ₂ , Qi‐Dai Chen ₂ , Yong‐Lai Zhang ₂ , Hong‐Bo Sun _{1,

2}

Affiliation

With high thermal and mechanical stability, glass artificial compound eyes have great potential applications in wide field‐of‐view (FOV) imaging and fast detection. However, the rapid fabrication of large‐area, high integration, uniform, and well‐designed three‐dimensional (3D) glass compound eyes is still a great challenge. Here, a dry‐etching‐assisted femtosecond laser machining (DE‐FsLM) technology is proposed for fabrication of cm‐sized concave compound eye from a curved sapphire substrate, with which the fabrication efficiency can be improved by over two orders of magnitude compared with direct laser ablation. With high hardness and thermal stabilities, the sapphire concave compound eyes can be used as high‐temperature and hard‐casting templates for the replication of convex compound eyes on K9 glass. The replicated cm²‐size all‐glass compound eye consists of a spherical macrolens (1 cm diameter and 2.3 mm height) and over 190 000 close‐packed ommatidia (≈20 µm diameter and 1.5 µm height). The compound eyes exhibit excellent optical properties with wide FOV (up to 90°) imaging and focusing. These results indicate that the DE‐FsLM and casting replication technology will open new opportunities in micro‐/nanofabrication of hard materials.

中文翻译：

从弧形蓝宝石基板快速雕刻人造复眼

玻璃人工复眼具有高的热稳定性和机械稳定性，在宽视场（FOV）成像和快速检测中具有巨大的潜在应用。但是，大面积，高集成度，均匀且设计良好的三维（3D）玻璃复眼的快速制造仍然是一个巨大的挑战。在此，提出了一种干蚀刻辅助飞秒激光加工（DE-FsLM）技术，用于从弯曲的蓝宝石衬底制造cm尺寸的凹复眼，与之相比，其制造效率可提高两个数量级。直接激光烧蚀。蓝宝石凹面复眼具有较高的硬度和热稳定性，可用作在K9玻璃上复制凸面复眼的高温和硬铸模板。复制的厘米²尺寸的全玻璃复眼由球形大透镜（直径1厘米，高度2.3毫米）和超过190 000密闭眼球（直径≈20 µm，高度1.5 µm）组成。复眼具有出色的光学性能，并具有宽视野（高达90°）的成像和聚焦能力。这些结果表明，DE-FsLM和铸件复制技术将为硬材料的微/纳米制造带来新的机会。

更新日期：2019-03-03

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