Room‐Temperature Fabricated Amorphous Ga2O3 High‐Response‐Speed Solar‐Blind Photodetector on Rigid and Flexible Substrates,Advanced Optical Materials

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Room‐Temperature Fabricated Amorphous Ga2O3 High‐Response‐Speed Solar‐Blind Photodetector on Rigid and Flexible Substrates
Advanced Optical Materials ( IF 8.0 ) Pub Date : 2017-07-24 , DOI: 10.1002/adom.201700454
Shujuan Cui _{1,

2} , Zengxia Mei ₁ , Yonghui Zhang _{1,

2} , Huili Liang ₁ , Xiaolong Du _{1,

2}

Affiliation

A solution to the fabrication of amorphous Ga₂O₃ solar‐blind photodetectors on rigid and flexible substrates at room temperature is reported. A robust improvement in the response speed is achieved by delicately controlling the oxygen flux in the reactive radio frequency magnetron sputtering process. Temporal response measurements show that the detector on quartz has a fast decay time of 19.1 µs and a responsivity of 0.19 A W⁻¹ as well, which are even better than those single crystal Ga₂O₃ counterparts prepared at high temperatures. X‐ray photoelectron spectroscopy and current–voltage tests suggest that the reduced oxygen vacancy concentration and the increased Schottky barrier height jointly contribute to the faster response speed. Amorphous Ga₂O₃ solar‐blind photodetector is further constructed on polyethylene naphthalate substrate. The flexible devices demonstrate similar photoresponse behavior as the rigid ones, and no significant degradation of the device performance is observed in bending states and fatigue tests. The results reveal the importance of finely tuned oxygen processing gas in promoting the device performance and the applicability of room‐temperature synthesized amorphous Ga₂O₃ in fabrication of flexible solar‐blind photodetectors.

中文翻译：

刚性和柔性基板上室温制造的非晶态Ga2O3高响应速度太阳能盲光电探测器

报道了一种在室温下在刚性和柔性衬底上制造非晶Ga ₂ O ₃太阳盲光电探测器的解决方案。通过在反应性射频磁控管溅射工艺中精细地控制氧气流量，可以实现响应速度的强劲提高。时间响应测量表明，石英探测器的快速衰减时间为19.1 µs，响应度也为0.19 AW ^-1，甚至比单晶Ga ₂ O ₃还要好。对应物是在高温下准备的。X射线光电子能谱和电流电压测试表明，氧空位浓度的降低和肖特基势垒高度的增加共同有助于更快的响应速度。在聚萘二甲酸乙二醇酯基底上进一步构建了非晶Ga ₂ O ₃日盲光电探测器。柔性器件表现出与刚性器件相似的光响应特性，并且在弯曲状态和疲劳测试中未观察到器件性能的显着下降。结果表明，微调氧气处理气体对于提高器件性能和室温合成非晶态Ga ₂ O ₃的适用性具有重要意义。在制造柔性日盲光电探测器中。

更新日期：2017-07-24

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