The phenomenon of magnetostriction can wirelessly couple external magnetic fields to generate structural motion. This is an attractive solution for remote delivery of power to microactuators in constrained environments. This study discusses the magnetostriction of electrosynthesized CoFe thin film microactuators. Electrodeposition is commonly employed for the fabrication of metallic thin films, however the magnetostriction of such films has been rarely investigated. In particular, the magnetostrictive behavior of electroplated CoFe films is poorly understood, despite the high magnetostriction capabilities of CoFe alloys. In this work, uniformly thick and smooth Co_0.65Fe_0.35 thin films were electrochemically grown on commercially available micron-scale cantilevers. The CoFe thin films were characterized for their morphology, composition, crystal structure, and magnetic properties. The AC magnetostrictive response of the cantilevers was measured interferometrically and the actuator exhibited a maximum expected displacement of 86nm.

中文翻译：

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电镀CoFe合金中的磁致伸缩

磁致伸缩现象可以无线耦合外部磁场以产生结构运动。这是在受限环境中向微执行器远程供电的一种有吸引力的解决方案。这项研究讨论了电合成CoFe薄膜微致动器的磁致伸缩。电沉积通常用于制造金属薄膜，但是很少研究这种薄膜的磁致伸缩。尤其是，尽管CoFe合金具有很高的磁致伸缩能力，但对电镀CoFe膜的磁致伸缩性能了解甚少。在这项工作中，均匀且光滑的Co _0.65 Fe _0.35薄膜在市售的微米级悬臂上电化学生长。CoFe薄膜的形貌，组成，晶体结构和磁性能得到了表征。悬臂梁的交流磁致伸缩响应是通过干涉法测量的，并且执行器的最大预期位移为86nm。