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Tantalum Pentoxide Integrated Photonics: A Promising Platform for Low-Loss Planar Lightwave Circuits with Low Thermo-Optic Coefficients
ACS Photonics ( IF 6.5 ) Pub Date : 2025-01-22 , DOI: 10.1021/acsphotonics.4c01485
Zhenyu Liu, Wenle Yao, Mingjian You, Xiaolun Yu, Ning Ding, Weiren Cheng, Zhengqi Li, Xingyu Tang, Fei Guo, Dan Lu, Qiancheng Zhao

Photonic integrated external laser cavities are transformative components in laser frequency stabilization and linewidth narrowing applications. A key challenge in contemporary photonic integration is to realize low-loss waveguides while balancing the thermo-optic response of the cavities. Tantalum pentoxide (Ta2O5) has emerged as a promising photonic platform due to its low thermo-optic coefficient (TOC) and low material loss. Incorporating Ta2O5/SiO2 waveguides into a photonic circuit requires trade-offs among waveguide loss, device footprints, thermorefractive noise, optical I/O efficiency, and other desired functionalities. In this work, we present a Ta2O5 photonic platform that emphasizes low propagation loss and low thermo-optic sensitivity. We demonstrate that the intrinsic Q factors of these resonators exceed 106, corresponding to a propagation loss of 0.27 dB/cm at 1550 nm, using our CMOS-compatible fabrication technique. The temperature-dependent wavelength shift (TDWS) of the Ta2O5 resonators is merely 9 pm/K. The thermorefractive frequency noise of the Ta2O5 microresonators is predicted to be half smaller than that of Si3N4 resonators. Several key building blocks of integrated external laser cavities were demonstrated, including high-Q resonators, self-coupled microresonators, Vernier ring resonators, Sagnac loop mirrors, edge couplers, and Y-branch splitters, which contribute to a comprehensive suite of planar lightwave components on the Ta2O5 platform. A narrow-linewidth hybrid-integrated laser has been demonstrated, utilizing a distributed feedback (DFB) laser diode self-injection locked to a Ta2O5 microresonator. A fundamental linewidth of 1.6 kHz has been obtained. The distinctive optical characteristics of the Ta2O5 waveguides could have a broader impact on high-capacity, temperature-robust, and multifunctional photonic integrated circuits, which are essential for the next-generation photonic computing systems, quantum photonic circuits, and beyond.

中文翻译:


五氧化二钽集成光子学:具有低热光系数的低损耗平面光波电路的有前途的平台



光子集成外部激光腔是激光频率稳定和线宽变窄应用中的变革性组件。当代光子集成的一个关键挑战是实现低损耗波导,同时平衡腔体的热光响应。五氧化二钽 (Ta2O5) 由于其低热光系数 (TOC) 和低材料损耗而成为一种很有前途的光子平台。将 Ta2O5/SiO2 波导集成到光子电路中需要在波导损耗、器件占用空间、热折射噪声、光学 I/O 效率和其他所需功能之间进行权衡。在这项工作中,我们提出了一个强调低传播损耗和低热光灵敏度的 Ta2O5 光子平台。我们证明,使用我们与 CMOS 兼容的制造技术,这些谐振器的内禀 Q 因子超过 106,对应于 1550 nm 处 0.27 dB/cm 的传播损耗。Ta2O5 谐振腔的温度相关波长偏移 (TDWS) 仅为 9 pm/K。预计 Ta2O5 微谐振器的热折射频率噪声比 Si3N4 谐振器小一半。演示了集成外部激光腔的几个关键构建模块,包括高 Q 谐振器、自耦合微谐振器、游标环谐振器、萨格纳克环镜、边缘耦合器和 Y 分支分路器,它们有助于在 Ta2O5 平台上形成一整套平面光波元件。 已经展示了一种窄线宽混合集成激光器,它利用锁定在 Ta2O5 微谐振器上的分布式反馈 (DFB) 半导体激光管自注射。已获得 1.6 kHz 的基本线宽。Ta2O5 波导独特的光学特性可能会对高容量、温度稳健和多功能光子集成电路产生更广泛的影响,这对于下一代光子计算系统、量子光子电路等至关重要。
更新日期:2025-01-22
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