Intel’s efforts to build a practical quantum computer are focused on developing a scalable spin-qubit platform leveraging industrial high-volume semiconductor manufacturing expertise and 300 mm fabrication infrastructure. Here, we provide an overview of the design, fabrication, and demonstration of a new customized quantum test chip, which contains 12-quantum-dot spin-qubit linear arrays, code named Tunnel Falls. These devices are fabricated using immersion and extreme ultraviolet lithography (EUV), along with other standard high-volume manufacturing (HVM) processes as well as production-level process control. We present key device features and fabrication details as well as qubit characterization results confirming device functionality. These results corroborate our fabrication methods and are a crucial step toward scaling of extensible 2D qubit array schemes.

中文翻译：

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在 300 mm 半导体生产线上制造的 12 自旋量子比特阵列


英特尔致力于构建实用的量子计算机，重点是利用工业大批量半导体制造专业知识和 300 毫米制造基础设施开发可扩展的自旋量子比特平台。在这里，我们概述了一种新的定制量子测试芯片的设计、制造和演示，该芯片包含 12 量子点自旋量子比特线性阵列，代号为 Tunnel Falls。这些器件采用浸没式和极紫外光刻 （EUV） 以及其他标准大批量制造 （HVM） 工艺以及生产级工艺控制制造。我们介绍了关键器件特性和制造细节，以及确认器件功能的量子比特表征结果。这些结果证实了我们的制造方法，是扩展可扩展 2D 量子比特阵列方案的关键一步。