This paper provides the first statistically validated experimental demonstration of a novel characterization procedure based on fast frequency sweeps. A MEMS structure with a time constant of several seconds is characterized in linear regime under mechanical actuation and optical detection of its motion. 450 series of fast sweeps are analyzed with different sweep durations to evaluate the precision and accuracy of the proposed approach compared to 450 traditional ring-down measurements. Our study shows that an estimation based on fast frequency sweeps in not only possible but even a competitive approach to estimate the parameters of a linear resonator with limited practical means. The precision and accuracy of this approach demonstrate its relevance.

中文翻译：

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基于大时间常数线性谐振器快速扫描测量的新型表征程序的实验验证


本文首次提供了基于快速频率扫描的新型表征程序的统计验证实验演示。具有数秒时间常数的 MEMS 结构在机械驱动和光学运动检测下以线性状态进行表征。分析了具有不同扫描持续时间的 450 系列快速扫描，以评估所提出的方法与 450 次传统衰荡测量相比的精度和准确度。我们的研究表明，基于快速频率扫描的估计不仅是可能的，甚至是一种具有竞争力的方法，可以估计线性谐振器的参数，而实际手段有限。这种方法的精确度和准确性证明了它的相关性。