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Scalable production of ultraflat and ultraflexible diamond membrane
Nature ( IF 50.5 ) Pub Date : 2024-12-18 , DOI: 10.1038/s41586-024-08218-x
Jixiang Jing, Fuqiang Sun, Zhongqiang Wang, Linjie Ma, Yumeng Luo, Zhiyuan Du, Tianyu Zhang, Yicheng Wang, Feng Xu, Tongtong Zhang, Changsheng Chen, Xuhang Ma, Yang He, Ye Zhu, Huarui Sun, Xinqiang Wang, Yan Zhou, James Kit Hon Tsoi, Jörg Wrachtrup, Ngai Wong, Can Li, Dong-Keun Ki, Qi Wang, Kwai Hei Li, Yuan Lin, Zhiqin Chu

Diamond is an exceptional material with great potential across various fields owing to its interesting properties1,2. However, despite extensive efforts over the past decades3,4,5, producing large quantities of desired ultrathin diamond membranes for widespread use remains challenging. Here we demonstrate that edge-exposed exfoliation using sticky tape is a simple, scalable and reliable method for producing ultrathin and transferable polycrystalline diamond membranes. Our approach enables the mass production of large-area (2-inch wafer), ultrathin (sub-micrometre thickness), ultraflat (sub-nano surface roughness) and ultraflexible (360° bendable) diamond membranes. These high-quality membranes, which have a flat workable surface, support standard micromanufacturing techniques, and their ultraflexible nature allows for direct elastic strain engineering and deformation sensing applications, which is not possible with their bulky counterpart. Systematic experimental and theoretical studies reveal that the quality of the exfoliated membranes depends on the peeling angle and membrane thickness, for which largely intact diamond membranes can be robustly produced within an optimal operation window. This single-step method, which opens up new avenues for the mass production of high-figure-of-merit diamond membranes, is expected to accelerate the commercialization and arrival of the diamond era in electronics, photonics and other related fields.



中文翻译:


超平和超柔韧金刚石膜的放大生产



金刚石是一种特殊的材料,由于其有趣的特性 1,2 ,在各个领域都具有巨大潜力。然而,尽管过去几十年 3,4,5 做出了巨大努力,但生产大量所需的超薄金刚石膜以供广泛使用仍然具有挑战性。在这里,我们证明了使用胶带进行边缘暴露的剥离是一种简单、可扩展且可靠的方法,可用于生产超薄且可转移的多晶金刚石膜。我们的方法可以大规模生产大面积(2 英寸晶圆)、超薄(亚微米厚度)、超平(亚纳米表面粗糙度)和超柔性(360° 可弯曲)金刚石膜。这些高质量的膜具有平坦的可加工表面,支持标准的微制造技术,其超柔韧性允许直接弹性应变工程和变形传感应用,这是笨重的膜无法实现的。系统的实验和理论研究表明,剥离膜的质量取决于剥离角度和膜厚度,因此可以在最佳操作窗口内稳健地生产基本完整的金刚石膜。这种单步法为大规模生产高品质因数金刚石膜开辟了新途径,有望加速电子、光子学和其他相关领域的商业化和金刚石时代的到来。

更新日期:2024-12-19
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