Piezoelectric quartz resonators are attracting increasing attention in resonant accelerometers due to their excellent quality factor and stable crystal structure, which helps to achieve more robust mechanical sensing. Previously quartz resonators operated in the linear region of an atmospheric pressure environment. To achieve a better signal-to-noise ratio, it is imperative to investigate the effect of nonlinear effects on the performance of quartz resonators. In this work, piezoelectric quartz resonators' nonlinear dynamics are researched, and frequency bifurcation and phase stretching phenomena are systematically characterized. We show the effect of the quality factor and temperature on the bifurcation point and reveal the modulation mechanism of the resonator operating point on stability. We find a method to rapidly change the stability and bandwidth of the resonator by conveniently tuning the electrical parameters and validate it in static and dynamic experiments on a quartz resonant accelerometer, which can be used in resonant sensors and actuators.

中文翻译：

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非线性压电石英 MEMS 谐振器，具有电可调稳定性，可增强谐振加速度计的性能


压电石英谐振器因其出色的品质因数和稳定的晶体结构而在谐振加速度计中越来越受到关注，这有助于实现更稳健的机械传感。以前，石英谐振器在大气压环境的线性区域工作。为了实现更好的信噪比，必须研究非线性效应对石英谐振器性能的影响。本工作研究了压电石英谐振器的非线性动力学，并系统表征了频率分岔和相位拉伸现象。我们展示了品质因数和温度对分岔点的影响，并揭示了谐振器工作点对稳定性的调制机制。我们找到了一种通过方便地调整电气参数来快速改变谐振器稳定性和带宽的方法，并在石英谐振加速度计上的静态和动态实验中对其进行验证，石英谐振加速度计可用于谐振传感器和执行器。