The ability to characterize periodic nanostructures in the laboratory gains more attention as nanotechnology is widely utilized in a variety of application fields. Scanning-free grazing-emission X-ray fluorescence spectroscopy (GEXRF) is a promising candidate to allow non-destructive, element-sensitive characterization of sample structures down to the nanometer range for process engineering. Adopting a complementary metal–oxide semiconductor (CMOS) detector to work energy-dispersively via single-photon detection, the whole range of emission angles of interest can be recorded at once. In this work, a setup based on a Cr X-ray tube and a CMOS detector is used to investigate two TiO₂ nanogratings and a TiO₂ layer sample in the tender X-ray range. The measurement results are compared to simulations of sample models based on known sample parameters. The fluorescence emission is simulated using the finite-element method together with a Maxwell-solver. In addition, a reconstruction of the sample model based on the measurement data is conducted to illustrate the feasibility of laboratory scanning-free GEXRF as a technique to non-destructively characterize periodic nanostructures in the tender X-ray range.

中文翻译：

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通过实验室免扫描 GEXRF 研究 Ti 纳米结构


随着纳米技术广泛用于各种应用领域，在实验室中表征周期性纳米结构的能力越来越受到关注。免扫描掠射 X 射线荧光光谱 （GEXRF） 是一种很有前途的候选技术，可以在工艺工程中对低至纳米范围的样品结构进行无损、元素敏感的表征。采用互补金属氧化物半导体 （CMOS） 探测器，通过单光子检测进行能量色散工作，可以一次记录整个感兴趣的发射角范围。在这项工作中，基于Cr X射线管和CMOS探测器的装置被用来研究招标X射线范围内的两个$\mathrm{Ti O_2}$纳米光栅和一个$\mathrm{Ti O_2}$层样品。将测量结果与基于已知样品参数的样品模型模拟进行比较。荧光发射是使用有限元方法和 Maxwell 求解器模拟的。此外，基于测量数据对样品模型进行了重建，以说明实验室免扫描 GEXRF 作为一种在招标 X 射线范围内无损表征周期性纳米结构的技术的可行性。