TiAlCN coatings, designed as advanced alternatives to TiAlN for enhanced tribological performance, were deposited via reactive high-power impulse magnetron sputtering (HiPIMS) with acetylene flow rates varying between 0 and 10 sccm. The carbon content, ranging from 1 at.% to 58 at.%, significantly influenced the microstructure, hardness and Young modulus properties of the coatings. At lower carbon concentrations (up to 17 at.%), carbon atoms substituted nitrogen in the TiAlN lattice. However, higher levels of carbon led to the formation of TiAl(CN) nanocrystals and amorphous carbon phases. These structural changes resulted in a shift in the coating’s growth orientation from (1 1 1) to (200) and the presence of amorphous carbon at grain boundaries, which resulted in a steady decline in hardness and Young’s modulus. Additionally, the increased carbon content reduced the coatings’ corrosion resistance. These findings highlight the complex interplay between carbon content, microstructure, and performance, providing insights for optimizing TiAlCN coatings.

中文翻译：

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碳掺入对反应性 HiPIMS 沉积的 TiAlCN 涂层的微观结构、形貌、硬度、杨氏模量和耐腐蚀性的影响


TiAlCN 涂层被设计为 TiAlN 的先进替代品，以增强摩擦学性能，通过反应高功率脉冲磁控溅射 （HiPIMS） 沉积，乙炔流速在 0 到 10 sccm 之间变化。碳含量从 1 at.% 到 58 at.% 不等，显著影响涂层的微观结构、硬度和杨氏模量性能。在较低的碳浓度下（高达 17%），碳原子取代了 TiAlN 晶格中的氮。然而，较高水平的碳导致 TiAl（CN） 纳米晶和非晶碳相的形成。这些结构变化导致涂层的生长方向从 （111） 转变为 （200），并且在晶界处存在无定形碳，从而导致硬度和杨氏模量稳步下降。此外，碳含量的增加降低了涂层的耐腐蚀性。这些发现突出了碳含量、微观结构和性能之间的复杂相互作用，为优化 TiAlCN 涂层提供了见解。