The successful large-scale fabrication of perovskite solar modules at the square meter level represents a significant milestone in the industrialization process of perovskite photovoltaic technology. In the fabrication of perovskite solar modules, cost-effective solution-based methods are commonly employed for the preparation of the perovskite layer due to their ability to ensure film uniformity with a thickness of approximately 500 nm. However, achieving uniformly coated charge transport layers (CTLs) at square meter levels using solution methods remains a formidable challenge due to the ultrathin nature of the CTLs, which is a few tens of nanometers thick. The fulfillment of this requirement necessitates the exclusive utilization of vacuum deposition technology for CTL preparation. This review focuses on vacuum deposition methods, including magnetron sputtering, atomic layer deposition, electron-beam evaporation, thermal evaporation, chemical vapor deposition and pulsed laser deposition for the fabrication of CTLs in perovskite solar cells and modules. We highlight the advantages and drawbacks of various deposition techniques, while summarizing the CTLs that can be deposited via each method, encompassing thin film characteristics and optimization strategies. Finally, we conclude with some perspectives and challenges for future research on vacuum methods for CTLs in perovskite solar cells.

中文翻译：

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钙钛矿太阳能电池和组件的电荷传输层的真空制备


成功大规模制造平方米级钙钛矿太阳能组件代表了钙钛矿光伏技术产业化进程中的一个重要里程碑。在钙钛矿太阳能组件的制造中，通常采用具有成本效益的基于解决方案的方法来制备钙钛矿层，因为它们能够确保厚度约为 500 nm 的薄膜均匀性。然而，由于 CLL 的超薄性质（厚度为几十纳米），使用溶液方法实现平方米级均匀涂层的电荷传输层 （CTL） 仍然是一项艰巨的挑战。满足这一要求需要专门使用真空沉积技术进行 CTL 制备。本文重点介绍真空沉积方法，包括磁控溅射、原子层沉积、电子束蒸发、热蒸发、化学气相沉积和脉冲激光沉积，用于在钙钛矿太阳能电池和组件中制造 CTL。我们强调了各种沉积技术的优缺点，同时总结了可以通过每种方法沉积的 CTL，包括薄膜特性和优化策略。最后，我们总结了钙钛矿太阳能电池中 CTL 真空方法未来研究的一些观点和挑战。