Near-field acoustic levitation (NFAL) is an innovative contactless handling technology with broad applications in precision manufacturing equipment and micro-electrical mechanical systems. The study systematically investigates the multi-level alterable transportation characteristics of a novel two-dimensional non-contact platform based on NFAL technology. The thrust forces in the x- and y-directions provided by the two-dimensional platform on the levitation plate are primarily influenced and adjusted by the amplitudes of the holed and bumped rails, respectively. Therefore, the levitation plate enables multi-level alterable transportation under different operation conditions by adjusting the vibration characteristics of two rails and the physical parameters. The theoretical model, including the governing equation of the squeeze film and the motion equation of the levitation plate, is established to analyze the mechanical and transportation performances. An experimental testbed is constructed to verify the numerical analysis solved by the theoretical model. Both numerical and experimental results demonstrate that the levitation plate can be moved along various angles from a stationary state, termed static multi-angle motion, by adjusting the relative amplitudes of the two rails. Additionally, the experimental results confirm that the levitation plate can perform dynamic turning motion from an initial running state under various operational conditions. The validated multi-level alterable transportation capability highlights the potential of the two-dimensional non-contact platform in precision manufacturing equipment and micro-electromechanical systems.

中文翻译：

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二维近场声悬浮平台的多级可变输运


近场声悬浮 （NFAL） 是一种创新的非接触式处理技术，在精密制造设备和微机电系统中有着广泛的应用。该研究系统研究了基于 NFAL 技术的新型二维非接触式平台的多层次可改变运输特性。悬浮板上二维平台提供的 x 和 y 方向的推力主要分别受带孔和凸起的轨道的振幅的影响和调整。因此，悬浮板通过调整两条轨道的振动特性和物理参数，实现不同运行条件下的多级可变运输。建立了包括挤压膜控制方程和悬浮板运动方程在内的理论模型，以分析其机械和运输性能。构建了实验试验台，验证了理论模型求解的数值分析。数值和实验结果表明，通过调整两条轨道的相对振幅，悬浮板可以从静止状态沿各种角度移动，称为静态多角度运动。此外，实验结果证实，悬浮板可以在各种运行条件下从初始运行状态进行动态转动运动。经过验证的多级可变运输能力突出了二维非接触式平台在精密制造设备和微机电系统中的潜力。