Aerostatic thrust bearings are extensively utilized in ultra-precision machining. Enhancing bearing load capacity, stiffness, and reducing vibration is a continuing demand. This paper introduces a novel active recess compensation aerostatic thrust bearing (ARCATB) with hermetic squeeze film damper (HSFD), aiming to achieving active compensation of bearing load capacity and stiffness while maintaining exceptionally low vibration amplitude. A two-stage amplification mechanism is employed to magnify the small displacement input from the piezoelectric transducer (PZT) actuator, thereby adjusting the recess depth to achieve bearing load capacity and stiffness adjustments. Theoretical analyses reveal that adjusting the recess depth can change the pressure distribution inside the bearing and thus achieve the regulation of the bearing load capacity. However, this adjustment process is also accompanied by changes in the vortices inside the recess. These changes are unpredictable and may exacerbate the vibration of the bearing or even lead to air hammer. The design of the HSFD can effectively counteract the adverse effects of vortex change and significantly reduce the vibration amplitude of the bearings to a low level. Two experimental rigs are constructed to evaluate the bearing performance. The results of the load capacity test align well with theoretical calculations and show that load capacity and stiffness can be regulated by adjusting the recess depth. Vibration test results show that the ARCATB with HSFD exhibits a notable reduction in vibration levels compared to conventional aerostatic thrust bearings without dampers.

中文翻译：

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一种带气密挤压膜阻尼器的新型主动凹槽补偿空气静力推力轴承：理论和实验研究


空气静压推力轴承广泛用于超精密加工。提高轴承负载能力、刚度和减少振动是一项持续的需求。本文介绍了一种带有气密挤压膜阻尼器 （HSFD） 的新型主动凹槽补偿空气静力推力轴承 （ARCATB），旨在实现轴承负载能力和刚度的主动补偿，同时保持极低的振动幅值。采用两级放大机制来放大来自压电传感器 （PZT） 促动器的小位移输入，从而调整凹槽深度以实现轴承负载能力和刚度调整。理论分析表明，调整槽深可以改变轴承内部的压力分布，从而达到轴承负载能力的调节。然而，这个调整过程也伴随着凹槽内漩涡的变化。这些变化是不可预测的，可能会加剧轴承的振动，甚至导致空气锤。HSFD 的设计可以有效抵消涡流变化的不利影响，并将轴承的振动幅度显著降低到较低水平。建造了两个实验台来评估轴承性能。负载能力测试的结果与理论计算非常吻合，并表明可以通过调整凹槽深度来调节负载能力和刚度。振动测试结果表明，与没有阻尼器的传统空气静力推力轴承相比，带有 HSFD 的 ARCATB 的振动水平显着降低。