Understanding the thermal behavior of vapor phase precursors is important to assess their potential for thin film deposition processes and to discern decomposition pathways. Here we present a series of dichloromolybdenum(VI) compounds on three different frameworks: the bis(alkylimido)-, dioxo- and mono(alkylimido)mono(oxo), which is the first foray into understanding the potential differences of decomposition mechanisms for molecules using these strongly bonded ligands. We report the synthesis of three novel metal complexes which have been fully characterized by spectroscopic techniques as well as single-crystal X-ray diffraction (SCXRD) and thermal analysis. Through in situ thermolysis reactions, we show the decomposition of all compounds generates the free N,N′-chelate ligand. Further thermal decomposition deviated from previously reported γ-H elimination, showing that the presence of β-hydrogens in the complexes provided alternative low-temperature decomposition pathways.

中文翻译：

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了解钼 （VI） 亚氨基吡啶加合物的热分解机制


了解气相前驱体的热行为对于评估它们在薄膜沉积过程中的潜力和辨别分解途径非常重要。在这里，我们介绍了三种不同框架上的一系列二氯钼 （VI） 化合物：双（烷基酰胺）-、二氧代-和单（烷基酰氨基）单（氧基），这是了解使用这些强键合配体的分子分解机制的潜在差异的首次尝试。我们报道了三种新型金属配合物的合成，这些配合物已通过光谱技术以及单晶 X 射线衍射 （SCXRD） 和热分析进行了充分表征。通过原位热解反应，我们展示了所有化合物的分解生成游离的 N，N′-螯合物配体。进一步的热分解偏离了先前报道的 γ-H 消除，表明复合物中 β-氢的存在提供了替代的低温分解途径。